Sorabji; Khurshed

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sorabji; Khurshed.The latest application filed is for "automated linear vacuum distribution valve".

Company Profile

3.47.50

Sorabji; Khurshed - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Pressurized heated rolling press for manufacture and method of use Grant 11,211,517 - Sorabji , et al. December 28, 2	2021-12-28
Methods for chemical vapor deposition (CVD) in a movable liner assembly Grant 10,718,051 - Higashi , et al.	2020-07-21
Automated Linear Vacuum Distribution Valve App 20200101584 - YOSHIDA; Steven Giro ; et al.	2020-04-02
Pressurized heated rolling press for manufacture and method of use Grant 10,076,896 - Sorabji September 18, 2	2018-09-18
Movable Liner Assembly For A Deposition Zone In A Cvd Reactor App 20180251897 - HIGASHI; Gregg ; et al.	2018-09-06
Tiled showerhead for a semiconductor chemical vapor deposition reactor Grant 10,066,297 - Higashi , et al. September 4, 2	2018-09-04
Pressurized Heated Rolling Press For Manufacture And Method Of Use App 20180212093 - SORABJI; Khurshed ; et al.	2018-07-26
Movable liner assembly for a deposition zone in a CVD reactor Grant 9,982,346 - Higashi , et al. May 29, 2	2018-05-29
Perforation of films for separation Grant 9,859,162 - Sorabji , et al. January 2, 2	2018-01-02
Thermal bridge for chemical vapor deposition reactors Grant 9,644,268 - Higashi , et al. May 9, 2	2017-05-09
Rapid thermal processing chamber with micro-positioning system Grant 9,564,349 - Sorabji , et al. February 7, 2	2017-02-07
Lamp for rapid thermal processing chamber Grant 9,536,728 - Ranish , et al. January 3, 2	2017-01-03
Pressurized Heated Rolling Press For Manufacture And Method Of Use App 20160380146 - SORABJI; Khurshed ; et al.	2016-12-29
Pressurized Heated Rolling Press For Manufacture And Method Of Use App 20160375671 - SORABJI; Khurshed	2016-12-29
Rapid thermal processing chamber with micro-positioning system Grant 9,390,950 - Sorabji , et al. July 12, 2	2016-07-12
Heating Lamp System App 20160130724 - He; Gang ; et al.	2016-05-12
Perforation Of Films For Separation App 20160079121 - Sorabji; Khurshed ; et al.	2016-03-17
Tiled Showerhead For A Semiconductor Chemical Vapor Deposition Reactor App 20160047042 - Higashi; Gregg ; et al.	2016-02-18
CVD reactor with gas flow virtual walls Grant 9,212,422 - Higashi , et al. December 15, 2	2015-12-15
Rapid conductive cooling using a secondary process plane Grant 9,209,049 - Sorabji , et al. December 8, 2	2015-12-08
Tiled showerhead for a semiconductor chemical vapor deposition reactor Grant 9,175,393 - Higashi , et al. November 3, 2	2015-11-03
Wafer carrier track Grant 9,169,554 - He , et al. October 27, 2	2015-10-27
Wafer carrier track Grant 8,985,911 - He , et al. March 24, 2	2015-03-24
Rapid Thermal Processing Chamber with Micro-Positioning System App 20150050118 - Sorabji; Khurshed ; et al.	2015-02-19
Rapid thermal processing chamber with micro-positioning system Grant 8,900,889 - Sorabji , et al. December 2, 2	2014-12-02
Methods for heating with lamps Grant 8,859,042 - He , et al. October 14, 2	2014-10-14
Method for vapor deposition Grant 8,852,696 - He , et al. October 7, 2	2014-10-07
Rapid Conductive Cooling Using A Secondary Process Plane App 20140199786 - SORABJI; Khurshed ; et al.	2014-07-17
Rapid thermal processing lamphead with improved cooling Grant 8,698,049 - Ranish , et al. April 15, 2	2014-04-15
Rapid conductive cooling using a secondary process plane Grant 8,658,947 - Sorabji , et al. February 25, 2	2014-02-25
Lamp for rapid thermal processing chamber Grant RE44,712 - Ranish , et al. January 21, 2	2014-01-21
Methods and apparatus for a chemical vapor deposition reactor Grant 8,602,707 - He , et al. December 10, 2	2013-12-10
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,490,660 - Koelmel , et al. July 23, 2	2013-07-23
Methods And Apparatus For A Chemical Vapor Deposition Reactor App 20130098289 - He; Gang ; et al.	2013-04-25
Thermal Bridge For Chemical Vapor Deposition Reactors App 20130047922 - Higashi; Gregg ; et al.	2013-02-28
Movable Liner Assembly For A Deposition Zone In A Cvd Reactor App 20130052371 - Higashi; Gregg ; et al.	2013-02-28
Cvd Reactor With Gas Flow Virtual Walls App 20130052346 - Higashi; Gregg ; et al.	2013-02-28
Rapid Thermal Processing Lamphead With Improved Cooling App 20130044493 - RANISH; JOSEPH M. ; et al.	2013-02-21
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043632 - Sorabji; Khurshed ; et al.	2013-02-21
Rapid Thermal Processing Chamber With Micro-positioning System App 20130043235 - Sorabji; Khurshed ; et al.	2013-02-21
Rapid thermal processing chamber with micro-positioning system Grant 8,314,371 - Sorabji , et al. November 20, 2	2012-11-20
Rapid Conductive Cooling Using A Secondary Process Plane App 20120270166 - SORABJI; KHURSHED ; et al.	2012-10-25
Rapid thermal processing lamphead with improved cooling Grant 8,294,068 - Ranish , et al. October 23, 2	2012-10-23
Rapid conductive cooling using a secondary process plane Grant 8,227,729 - Sorabji , et al. July 24, 2	2012-07-24
Temperature measurement and control of wafer support in thermal processing chamber Grant 8,222,574 - Sorabji , et al. July 17, 2	2012-07-17
Heating Lamp System And Methods Thereof App 20120106935 - He; Gang ; et al.	2012-05-03
Wafer Carrier Track App 20120090548 - He; Gang ; et al.	2012-04-19
Reactor Lid Assembly For Vapor Deposition App 20120067282 - He; Gang ; et al.	2012-03-22
Vapor Deposition Reactor System And Methods Thereof App 20120067286 - He; Gang ; et al.	2012-03-22
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20120055405 - Koelmel; Blake ; et al.	2012-03-08
Rapid thermal processing chamber with shower head Grant 8,111,978 - Sorabji , et al. February 7, 2	2012-02-07
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,601 - Koelmel , et al. November 15, 2	2011-11-15
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber Grant 8,057,602 - Koelmel , et al. November 15, 2	2011-11-15
Rapid Conductive Cooling Using A Secondary Process Plane App 20110008740 - Sorabji; Khurshed ; et al.	2011-01-13
Rapid conductive cooling using a secondary process plane Grant 7,812,286 - Sorabji , et al. October 12, 2	2010-10-12
Showerhead For Vapor Deposition App 20100229793 - He; Gang ; et al.	2010-09-16
Reactor Lid Assembly For Vapor Deposition App 20100212591 - He; Gang ; et al.	2010-08-26
Heating Lamp System App 20100209082 - He; Gang ; et al.	2010-08-19
Method For Vapor Deposition App 20100209620 - He; Gang ; et al.	2010-08-19
Vapor Deposition Reactor System App 20100206229 - He; Gang ; et al.	2010-08-19
Wafer Carrier Track App 20100206235 - He; Gang ; et al.	2010-08-19
Methods For Heating With Lamps App 20100209626 - He; Gang ; et al.	2010-08-19
Rapid Thermal Processing Chamber With Micro-Positioning System App 20100133257 - Sorabji; Khurshed ; et al.	2010-06-03
Rapid Thermal Processing Lamphead With Improved Cooling App 20100059497 - RANISH; JOSEPH M. ; et al.	2010-03-11
Rapid Thermal Processing Chamber With Shower Head App 20100008656 - SORABJI; KHURSHED ; et al.	2010-01-14
Methods And Apparatus For A Chemical Vapor Deposition Reactor App 20090324379 - He; Gang ; et al.	2009-12-31
Methods And Apparatus For A Chemical Vapor Deposition Reactor App 20090325367 - He; Gang ; et al.	2009-12-31
Apparatus and Methods for Hyperbaric Rapid Thermal Processing App 20090298300 - Ranish; Joseph M. ; et al.	2009-12-03
Lamp for rapid thermal processing chamber Grant 7,612,491 - Ranish , et al. November 3, 2	2009-11-03
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080280453 - KOELMEL; Blake ; et al.	2008-11-13
Apparatus And Method For Supporting, Positioning And Rotating A Substrate In A Processing Chamber App 20080276864 - KOELMEL; BLAKE ; et al.	2008-11-13
Lamp for Rapid Thermal Processing Chamber App 20080199162 - Ranish; Joseph M. ; et al.	2008-08-21
Lamp for Rapid Thermal Processing Chamber App 20080199163 - Ranish; Joseph M. ; et al.	2008-08-21
Temperature Measurement And Control Of Wafer Support In Thermal Processing Chamber App 20080169282 - SORABJI; KHURSHED ; et al.	2008-07-17
Rapid Conductive Cooling Using A Secondary Process Plane App 20080141556 - SORABJI; KHURSHED ; et al.	2008-06-19
Rapid Conductive Cooling Using A Secondary Process Plane App 20080142497 - Sorabji; Khurshed ; et al.	2008-06-19
Rapid conductive cooling using a secondary process plane Grant 7,378,618 - Sorabji , et al. May 27, 2	2008-05-27
Thermally matched support ring for substrate processing chamber Grant 6,888,104 - Ranish , et al. May 3, 2	2005-05-03