Soper; Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Soper; Robert.The latest application filed is for "sub-resolution assist feature to improve symmetry for contact hole lithography".
- Soper; Robert - San Jose CA
- Soper; Robert - Plano TX
| Patent | Date |
|---|---|
| Appliance Grant D945,814 - DeAngelis , et al. March 15, 2 | 2022-03-15 |
| Sub-resolution assist feature to improve symmetry for contact hole lithography Grant 7,987,436 - Jessen , et al. July 26, 2 | 2011-07-26 |
| Sub-Resolution Assist Feature To Improve Symmetry for Contact Hole Lithography App 20090146259 - Jessen; Scott William ; et al. | 2009-06-11 |
| Sub-resolution assist feature to improve symmetry for contact hole lithography Grant 7,512,928 - Jessen , et al. March 31, 2 | 2009-03-31 |
| Using a center pole illumination scheme to improve symmetry for contact hole lithography App 20070082425 - Jessen; Scott William ; et al. | 2007-04-12 |
| Sub-resolution assist feature to improve symmetry for contact hole lithography App 20070035031 - Jessen; Scott William ; et al. | 2007-02-15 |
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