Patent | Date |
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Methods of forming dual damascene structures Grant 8,372,198 - Seo , et al. February 12, 2 | 2013-02-12 |
Methods of forming semiconductor devices Grant 8,039,345 - Jeon , et al. October 18, 2 | 2011-10-18 |
Methods of manufacturing a semiconductor device using a layer suspended across a trench Grant 8,003,487 - Cho , et al. August 23, 2 | 2011-08-23 |
Methods of Forming Semiconductor Devices App 20110059602 - Jeon; Kyung-yub ;   et al. | 2011-03-10 |
Methods of fabricating semiconductor device including fin-fet Grant 7,745,290 - Seo , et al. June 29, 2 | 2010-06-29 |
Phase change memory devices and methods for fabricating the same Grant 7,667,221 - Song , et al. February 23, 2 | 2010-02-23 |
Methods Of Manufacturing A Semiconductor Device Using A Layer Suspended Across A Trench App 20090162989 - Cho; Du-Hyun ;   et al. | 2009-06-25 |
Method of manufacturing integrated circuit device including recessed channel transistor Grant 7,531,414 - Park , et al. May 12, 2 | 2009-05-12 |
Methods of forming a conductive pattern in semiconductor devices and methods of manufacturing semiconductor devices having a conductive pattern App 20090117723 - Kim; Jong-Kyu ;   et al. | 2009-05-07 |
Dual Damascene Structure App 20080152866 - Seo; Jun ;   et al. | 2008-06-26 |
Methods of Forming Dual Damascene Structures App 20080149021 - Seo; Jun ;   et al. | 2008-06-26 |
Methods Of Fabricating Semiconductor Device Including Fin-fet App 20080124871 - SEO; Jun ;   et al. | 2008-05-29 |
Method Of Manufacturing Integrated Circuit Device Including Recessed Channel Transistor App 20080090356 - PARK; Jong-Chul ;   et al. | 2008-04-17 |
Dual damascene structure and methods of forming the same Grant 7,358,126 - Seo , et al. April 15, 2 | 2008-04-15 |
Method of manufacturing integrated circuit device including recessed channel transistor Grant 7,326,619 - Park , et al. February 5, 2 | 2008-02-05 |
Phase change memory devices and methods for fabricating the same App 20070194294 - Song; Jong-Heui ;   et al. | 2007-08-23 |
Mos Transistor With Recessed Gate And Method Of Fabricating The Same App 20070093021 - PARK; Jong-Chul ;   et al. | 2007-04-26 |
Mos Transistor With Recessed Gate And Method Of Fabricating The Same App 20070090435 - PARK; Jong-Chul ;   et al. | 2007-04-26 |
MOS transistor with recessed gate and method of fabricating the same Grant 7,157,770 - Park , et al. January 2, 2 | 2007-01-02 |
Dual damascene structure and methods of forming the same App 20060163738 - Seo; Jun ;   et al. | 2006-07-27 |
Method of manufacturing integrated circuit device including recessed channel transistor App 20050042833 - Park, Jong-Chul ;   et al. | 2005-02-24 |
MOS transistor with recessed gate and method of fabricating the same App 20050035427 - Park, Jong-Chul ;   et al. | 2005-02-17 |
Method for forming a self-aligned contact hole in a semiconductor device Grant 6,808,975 - Song , et al. October 26, 2 | 2004-10-26 |
Method of etching a silicon nitride film and method of manufacturing a semiconductor device using the same App 20040171261 - Song, Jong-Heui ;   et al. | 2004-09-02 |
Method for forming a self-aligned contact hole in a semiconductor device App 20040005786 - Song, Jong-Heui ;   et al. | 2004-01-08 |
Method of making intermetal dielectric layers having a low dielectric constant Grant 6,124,216 - Ko , et al. September 26, 2 | 2000-09-26 |
Plasma etching apparatus having a sealing member coupling an upper electrode to an etching chamber Grant 6,074,519 - Lee , et al. June 13, 2 | 2000-06-13 |