Song; Byoung Gyu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Song; Byoung Gyu.The latest application filed is for "substrate processing apparatus including exhaust ports and substrate processing method".

Company Profile

4.15.29

Song; Byoung Gyu - Yongin-Si KR
Song; Byoung-Gyu - Gyeonggi-do KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus and substrate processing method using the same Grant 10,793,949 - Hyon , et al. October 6, 2	2020-10-06
Method for substrate processing using exhaust ports Grant 10,593,545 - Yang , et al.	2020-03-17
Substrate processing apparatus Grant 10,337,103 - Hyon , et al.	2019-07-02
Substrate treatment apparatus Grant 10,229,845 - Hyon , et al.	2019-03-12
Substrate processing apparatus Grant 10,161,036 - Hyon , et al. Dec	2018-12-25
Substrate processing apparatus including heat-shield plate Grant 9,953,850 - Yang , et al. April 24, 2	2018-04-24
Substrate processing apparatus including exhaust ports and substrate processing method Grant 9,875,895 - Yang , et al. January 23, 2	2018-01-23
Substrate processing apparatus including processing unit Grant 9,869,019 - Yang , et al. January 16, 2	2018-01-16
Substrate Processing Apparatus Including Exhaust Ports And Substrate Processing Method App 20170148649 - YANG; IL-KWANG ; et al.	2017-05-25
Substrate Processing Apparatus And Substrate Processing Method Using The Same App 20170137938 - HYON; Jun Jin ; et al.	2017-05-18
Heater moving type substrate processing apparatus Grant 9,644,895 - Yang , et al. May 9, 2	2017-05-09
Apparatus for processing substrate for supplying reaction gas having phase difference Grant 9,620,395 - Yang , et al. April 11, 2	2017-04-11
Substrate Processing Apparatus App 20170073810 - HYON; Jun Jin ; et al.	2017-03-16
Substrate Processing Apparatus App 20170073813 - HYON; Jun Jin ; et al.	2017-03-16
Showerhead having cooling system and substrate processing apparatus including the showerhead Grant 9,593,418 - Yang , et al. March 14, 2	2017-03-14
Substrate processing apparatus including auxiliary gas supply port Grant 9,593,415 - Yang , et al. March 14, 2	2017-03-14
Substrate Treatment Apparatus App 20160195331 - HYON; Jun-Jin ; et al.	2016-07-07
Substrate processing device with connection space Grant 9,368,380 - Yang , et al. June 14, 2	2016-06-14
Substrate Processing Device App 20160013086 - YANG; Il-Kwang ; et al.	2016-01-14
Apparatus For Processing Substrate App 20150380284 - YANG; Il-Kwang ; et al.	2015-12-31
Apparatus For Processing Substrate App 20150369539 - YANG; Il-Kwang ; et al.	2015-12-24
Substrate-processing Device App 20150337460 - YANG; Il-Kwang ; et al.	2015-11-26
Purge Chamber, And Substrate-processing Apparatus Including Same App 20150267291 - Yang; Il-Kwang ; et al.	2015-09-24
Substrate Processing Apparatus App 20150252476 - Yang; Il-Kwang ; et al.	2015-09-10
Substrate Transfer Robot and Substrate Processing Apparatus Using The Same App 20150228520 - Hyon; Jun-Jin ; et al.	2015-08-13
Substrate Processing Device App 20150211116 - Yang; Il-Kwang ; et al.	2015-07-30
Substrate Processing Device App 20150191821 - Yang; Il-Kwang ; et al.	2015-07-09
Substrate Processing Apparatus App 20150176128 - Song; Byoung-Gyu ; et al.	2015-06-25
Substrate Processing Module, Substrate Processing Apparatus Including the same, and Substrate Transferring Method App 20150179489 - Hyon; Jun-Jin ; et al.	2015-06-25
Apparatus For Processing Substrate App 20150136026 - Yang; Il-Kwang ; et al.	2015-05-21
Apparatus For Processing Substrate App 20150122177 - Yang; Il-Kwang ; et al.	2015-05-07
Heater Moving Type Substrate Processing Apparatus App 20150044622 - Yang; Il-Kwang ; et al.	2015-02-12
Substrate Processing Apparatus Including Auxiliary Gas Supply Port App 20150013909 - Yang; Il-Kwang ; et al.	2015-01-15
Apparatus For Processing Substrate For Supplying Reaction Gas Having Phase Difference App 20140345801 - Yang; Il-Kwang ; et al.	2014-11-27
Substrate Processing Apparatus Including Processing Unit App 20140345528 - Yang; Il-Kwang ; et al.	2014-11-27
Substrate Processing Apparatus Including Heat-shield Plate App 20140348617 - Yang; Il-Kwang ; et al.	2014-11-27
Apparatus For Processing Apparatus Having Side Pumping Type App 20140331933 - Yang; Il-Kwang ; et al.	2014-11-13
Showerhead Having Cooling System And Substrate Processing Apparatus Including The Showerhead App 20140311411 - Yang; Il-Kwang ; et al.	2014-10-23
Substrate Processing Apparatus Including Exhaust Ports And Substrate Processing Method App 20140315375 - Yang; Il-Kwang ; et al.	2014-10-23
Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unit Grant 8,771,417 - Yoon , et al. July 8, 2	2014-07-08
Exhaust Unit, Exhaust Method Using The Exhaust Unit, And Substrate Processing Apparatus Including The Exhaust Unit App 20100206231 - Yoon; Song Keun ; et al.	2010-08-19
Showerhead, Substrate Processing Apparatus Including The Showerhead, And Plasma Supplying Method Using The Showerhead App 20100196625 - Yoon; Song Keun ; et al.	2010-08-05
Substrate Processing Apparatus App 20100175622 - Yoon; Song Keun ; et al.	2010-07-15

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