SONE; Hiroshi
Patent Applications and Registrations
Patent applications and USPTO patent grants for SONE; Hiroshi.The latest application filed is for "mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus".
- SONE; Hiroshi - Tokyo JP
- Sone; Hiroshi - Yamanashi JP
- SONE; Hiroshi - Nirasaki-shi Yamanashi
- Sone; Hiroshi - Nirasaki JP
- - Tokyo JP
- SONE; Hiroshi - Nirasaki City JP
- Sone; Hiroshi - Sagamihara JP
- Sone; Hiroshi - Sagamihara-shi JP
| Patent | Date |
|---|---|
| Mounting Table Structure, Substrate Processing Apparatus, And Method Of Controlling Substrate Processing Apparatus App 20220238314 - YAMAGATA; Motoi ; et al. | 2022-07-28 |
| Mounting Table And Substrate Processing Apparatus App 20220189813 - AIKAWA; Katsuyoshi ; et al. | 2022-06-16 |
| Film Forming Apparatus And Film Forming Method App 20220098717 - IMAKITA; Kenichi ; et al. | 2022-03-31 |
| Stage mechanism, processing apparatus, and method of operating the stage mechanism Grant 11,282,733 - Motomura , et al. March 22, 2 | 2022-03-22 |
| PVD processing method and PVD processing apparatus Grant 11,193,200 - Maeda , et al. December 7, 2 | 2021-12-07 |
| Sputtering apparatus Grant 11,149,342 - Takei , et al. October 19, 2 | 2021-10-19 |
| Sputter Device App 20210262080 - TAKEI; Junichi ; et al. | 2021-08-26 |
| Film Forming Apparatus App 20200381226 - IMAKITA; Kenichi ; et al. | 2020-12-03 |
| Substrate processing apparatus Grant 10,748,750 - Chihaya , et al. A | 2020-08-18 |
| Sputtering Apparatus App 20200255935A1 - | 2020-08-13 |
| Stage Mechanism, Processing Apparatus, And Method Of Operating The Stage Mechanism App 20200035537 - MOTOMURA; Yuuki ; et al. | 2020-01-30 |
| Substrate Stage And Film Forming Apparatus App 20190390326 - Takei; Junichi ; et al. | 2019-12-26 |
| Sputtering Device App 20190390325 - TAKEI; Junichi ; et al. | 2019-12-26 |
| Apparatus of processing workpiece in depressurized space Grant 10,381,258 - Umise , et al. A | 2019-08-13 |
| Pvd Processing Method And Pvd Processing Apparatus App 20190169737 - Maeda; Koji ; et al. | 2019-06-06 |
| Substrate Processing Apparatus App 20190172690 - CHIHAYA; Hiroaki ; et al. | 2019-06-06 |
| Deposition device and deposition method Grant 10,309,005 - Kojima , et al. | 2019-06-04 |
| Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped member Grant 10,254,693 - Yokohara , et al. | 2019-04-09 |
| Apparatus Of Processing Workpiece In Depressurized Space App 20170162424 - UMISE; Takuya ; et al. | 2017-06-08 |
| Deposition Device And Deposition Method App 20160251746 - KOJIMA; Yasuhiko ; et al. | 2016-09-01 |
| Fixing Unit Of Plate-shaped Member, Pvd Processing Apparatus And Fixing Method Of Plate-shaped Member App 20150370204 - YOKOHARA; Hiroyuki ; et al. | 2015-12-24 |
| Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device Grant 9,200,362 - Higashisaka , et al. December 1, 2 | 2015-12-01 |
| Substrate support apparatus and vacuum processing apparatus Grant 8,920,107 - Ikeda , et al. December 30, 2 | 2014-12-30 |
| Vacuum processing apparatus and substrate transfer method Grant 8,202,034 - Sone , et al. June 19, 2 | 2012-06-19 |
| Substrate Holder Stocker Device, Substrate Processing Apparatus, And Substrate Holder Moving Method Using The Substrate Holder Stocker Device App 20120006257 - Higashisaka; Ryuji ; et al. | 2012-01-12 |
| Substrate Support Apparatus And Vacuum Processing Apparatus App 20110286826 - Ikeda; Tadashi ; et al. | 2011-11-24 |
| Vacuum Processing Apparatus And Substrate Transfer Method App 20110052349 - SONE; Hiroshi ; et al. | 2011-03-03 |
| Transfer apparatus Grant 7,770,714 - Nozawa , et al. August 10, 2 | 2010-08-10 |
| Carrier With Deposition Shield App 20090308317 - Sone; Hiroshi ; et al. | 2009-12-17 |
| Transfer Apparatus App 20090056878 - Nozawa; Naoyuki ; et al. | 2009-03-05 |
| Inclination sensor Grant 6,032,375 - Shijo , et al. March 7, 2 | 2000-03-07 |
| Tilt sensor, mask and coat holder Grant 5,937,528 - Shijo , et al. August 17, 1 | 1999-08-17 |
| Thermographic endoscope Grant 5,445,157 - Adachi , et al. August 29, 1 | 1995-08-29 |
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