| Patent | Date |
|---|
Process control using analysis of an upstream process
Grant 8,615,314 - Sonderman , et al. December 24, 2 | 2013-12-24 |
Parallel fault detection
Grant 8,359,494 - Coss, Jr. , et al. January 22, 2 | 2013-01-22 |
Dynamic adaptive sampling rate for model prediction
Grant 8,017,411 - Sonderman , et al. September 13, 2 | 2011-09-13 |
Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same
Grant 7,402,257 - Sonderman , et al. July 22, 2 | 2008-07-22 |
Total tool control for semiconductor manufacturing
Grant 7,292,959 - Markle , et al. November 6, 2 | 2007-11-06 |
Secondary process controller for supplementing a primary process controller
Grant 7,254,453 - Markle , et al. August 7, 2 | 2007-08-07 |
Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing same
Grant 7,160,740 - Sonderman , et al. January 9, 2 | 2007-01-09 |
Determining transmission of error effects for improving parametric performance
Grant 7,117,062 - Sonderman , et al. October 3, 2 | 2006-10-03 |
Method and apparatus for initializing tool controllers based on tool event data
Grant 7,103,439 - Bode , et al. September 5, 2 | 2006-09-05 |
Method and apparatus for updating control state variables of a process control model based on rework data
Grant 6,970,757 - Hewett , et al. November 29, 2 | 2005-11-29 |
Method and apparatus for dynamically monitoring controller tuning parameters
Grant 6,961,636 - Chong , et al. November 1, 2 | 2005-11-01 |
Method and apparatus for controlling process target values based on manufacturing metrics
Grant 6,937,914 - Bode , et al. August 30, 2 | 2005-08-30 |
Process control based on an estimated process result
Grant 6,925,347 - Miller , et al. August 2, 2 | 2005-08-02 |
Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters
Grant 6,917,849 - Pasadyn , et al. July 12, 2 | 2005-07-12 |
Method and apparatus for distinguishing between sources of process variation
Grant 6,901,340 - Pasadyn , et al. May 31, 2 | 2005-05-31 |
Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing same
App 20050009217 - Sonderman, Thomas J. ; et al. | 2005-01-13 |
Process control based upon a metrology delay
Grant 6,834,213 - Sonderman , et al. December 21, 2 | 2004-12-21 |
Method and apparatus for determining a sampling plan based on process and equipment state information
Grant 6,821,792 - Sonderman , et al. November 23, 2 | 2004-11-23 |
Control methodology using optical emission spectroscopy derived data, system for performing same
Grant 6,818,561 - Sonderman November 16, 2 | 2004-11-16 |
Method and apparatus for incorporating control simulation environment
Grant 6,802,045 - Sonderman , et al. October 5, 2 | 2004-10-05 |
Method of controlling wafer charging effects due to manufacturing processes
Grant 6,800,562 - Cusson , et al. October 5, 2 | 2004-10-05 |
Method and apparatus for integrating multiple process controllers
Grant 6,801,817 - Bode , et al. October 5, 2 | 2004-10-05 |
Method and apparatus for adaptively scheduling tool maintenance
Grant 6,785,586 - Toprac , et al. August 31, 2 | 2004-08-31 |
Dynamic targeting for a process control system
Grant 6,773,931 - Pasadyn , et al. August 10, 2 | 2004-08-10 |
Dynamic adaptive sampling rate for model prediction
App 20040121495 - Sonderman, Thomas J. ; et al. | 2004-06-24 |
Parallel fault detection
App 20040123182 - Cross, Elfido JR. ; et al. | 2004-06-24 |
Dynamic process state adjustment of a processing tool to reduce non-uniformity
Grant 6,751,518 - Sonderman , et al. June 15, 2 | 2004-06-15 |
Method and apparatus for determining control actions incorporating defectivity effects
Grant 6,745,086 - Pasadyn , et al. June 1, 2 | 2004-06-01 |
Secondary process controller for supplementing a primary process controller
App 20040102857 - Markle, Richard J. ; et al. | 2004-05-27 |
Method and apparatus for utilizing integrated metrology data as feed-forward data
Grant 6,708,075 - Sonderman , et al. March 16, 2 | 2004-03-16 |
Method for prioritizing production lots based on grade estimates and output requirements
Grant 6,699,727 - Toprac , et al. March 2, 2 | 2004-03-02 |
Dynamic targeting for a process control system
App 20040029299 - Pasadyn, Alexander J. ; et al. | 2004-02-12 |
Method and apparatus for determining output characteristics using tool state data
Grant 6,678,570 - Pasadyn , et al. January 13, 2 | 2004-01-13 |
Method and apparatus for controlling the flow of wafers through a process flow
Grant 6,675,058 - Pasadyn , et al. January 6, 2 | 2004-01-06 |
Methods for dynamically controlling etch endpoint time, and system for accomplishing same
Grant 6,660,539 - Sonderman , et al. December 9, 2 | 2003-12-09 |
Method and apparatus for determining a sampling plan based on process and equipment fingerprinting
Grant 6,650,955 - Sonderman , et al. November 18, 2 | 2003-11-18 |
Method and apparatus for combining integrated and offline metrology for process control
Grant 6,645,780 - Sonderman , et al. November 11, 2 | 2003-11-11 |
Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same
Grant 6,617,258 - Sonderman , et al. September 9, 2 | 2003-09-09 |
Method and apparatus for controlling a tool using a baseline control script
Grant 6,615,098 - Bode , et al. September 2, 2 | 2003-09-02 |
Method and apparatus for utilizing integrated metrology data as feed-forward data
App 20030097198 - Sonderman, Thomas J. ; et al. | 2003-05-22 |
Method and apparatus for controlling a thickness of a copper film
App 20020192944 - Sonderman, Thomas J. ; et al. | 2002-12-19 |
Method and apparatus for controlling feature critical dimensions based on scatterometry derived profile
App 20020177245 - Sonderman, Thomas J. ; et al. | 2002-11-28 |
Method and apparatus for controlling a plating process
Grant 6,444,481 - Pasadyn , et al. September 3, 2 | 2002-09-03 |
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