Son; Tae Kyu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Son; Tae Kyu.The latest application filed is for "apparatus and method of controlling chuck, and exposure apparatus and control method thereof".

Company Profile

0.5.10

Son; Tae Kyu - Seongnam-si KR
Son, Tae-Kyu - Seongnam-City KR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and method of controlling chuck, and exposure apparatus and control method thereof Grant 9,507,272 - Kim , et al. November 29, 2	2016-11-29
Apparatus And Method Of Controlling Chuck, And Exposure Apparatus And Control Method Thereof App 20160154320 - KIM; Ja Yul ; et al.	2016-06-02
Apparatus and method of controlling chuck, and exposure apparatus and control method thereof Grant 9,287,155 - Kim , et al. March 15, 2	2016-03-15
Maskless exposure apparatus and method to determine exposure start position and orientation in maskless lithography Grant 8,755,034 - Ahn , et al. June 17, 2	2014-06-17
Ultra-precision Position Control Device And Method For Determining Position And Attitude Information Associated With A 6-degree-of-freedom Stage Thereof App 20130218304 - KIM; Ja Yul ; et al.	2013-08-22
Measurement System Using Alignment System And Position Measurement Method App 20130044938 - AHN; Sung Min ; et al.	2013-02-21
Apparatus And Method Of Controlling Chuck, And Exposure Apparatus And Control Method Thereof App 20130001898 - KIM; Ja Yul ; et al.	2013-01-03
Maskless Exposure Apparatus And Method To Determine Exposure Start Position And Orientation In Maskless Lithography App 20120081682 - AHN; Sung Min ; et al.	2012-04-05
Measurement System Using Alignment Unit And Method Of Determining System Parameters Of Alignment Unit App 20120038307 - Ahn; Sung Min ; et al.	2012-02-16
Measurement System Using Alignment Unit And Position Measuring Method App 20120038936 - Ahn; Sung Min ; et al.	2012-02-16
Feeding robot and control method therefor App 20020107611 - Son, Tae-Kyu	2002-08-08

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