loadpatents
Patent applications and USPTO patent grants for Son; Hyoung Kyu.The latest application filed is for "apparatus for treating substrate and assembly for distributing gas".
Patent | Date |
---|---|
Gas supplying unit of substrate treating apparatus Grant 11,408,071 - Son , et al. August 9, 2 | 2022-08-09 |
Apparatus For Treating Substrate And Assembly For Distributing Gas App 20220208516 - SON; Hyoung Kyu | 2022-06-30 |
Gas Supplying Unit Of Substrate Treating Apparatus App 20200277702 - SON; Hyoung Kyu ;   et al. | 2020-09-03 |
Process chamber having gate slit opening and closing apparatus Grant 8,834,673 - Son September 16, 2 | 2014-09-16 |
Substrate processing apparatus having electrode member Grant 8,623,173 - Son January 7, 2 | 2014-01-07 |
Vacuum processing apparatus Grant 8,349,082 - Lee , et al. January 8, 2 | 2013-01-08 |
Vacuum processing apparatus Grant 8,187,384 - Lee , et al. May 29, 2 | 2012-05-29 |
Vacuum processing apparatus Grant 8,152,926 - Lee , et al. April 10, 2 | 2012-04-10 |
Vacuum processing apparatus Grant 8,075,691 - Lee , et al. December 13, 2 | 2011-12-13 |
Lift pin driving device and a flat panel display manufacturing apparatus having same Grant 7,988,817 - Son August 2, 2 | 2011-08-02 |
Apparatus and method for measuring chuck attachment force Grant 7,770,478 - Son August 10, 2 | 2010-08-10 |
Vacuum Processing Apparatus App 20100089531 - LEE; Young Jong ;   et al. | 2010-04-15 |
Vacuum Processing Apparatus App 20100086382 - LEE; Young Jong ;   et al. | 2010-04-08 |
Vacuum Processing Apparatus App 20100086383 - LEE; Young Jong ;   et al. | 2010-04-08 |
Vacuum Processing Apparatus App 20100086381 - Lee; Young Jong ;   et al. | 2010-04-08 |
Embossing apparatus and method Grant 7,690,913 - Son April 6, 2 | 2010-04-06 |
Apparatus Amd Method For Measuring Chuck Attachment Force App 20090107250 - SON; Hyoung Kyu | 2009-04-30 |
Substrate Processing Apparatus Having Electrode Member App 20090071524 - SON; Hyoung-Kyu | 2009-03-19 |
Lift Pin Driving Device And A Flat Panel Display Manufacturing Apparatus Having Same App 20080110397 - SON; Hyoung Kyu | 2008-05-15 |
Process Chamber Having Gate Slit Opening And Closing Apparatus App 20080110568 - SON; Hyoung Kyu | 2008-05-15 |
Apparatus And Method For Measuring Chuck Attachment Force App 20080108154 - Son; Hyoung Kyu | 2008-05-08 |
Electrostatic chuck, substrate processing apparatus having the same, and substrate processing method using the same App 20080055813 - Son; Hyoung-Kyu | 2008-03-06 |
Embossing Apparatus And Method App 20070266867 - Son; Hyoung-Kyu | 2007-11-22 |
Vacuum processing apparatus App 20060191118 - Lee; Young Jong ;   et al. | 2006-08-31 |
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