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name:-0.015188932418823
name:-0.04557991027832
name:-0.0017969608306885
Son; Hyoung Kyu Patent Filings

Son; Hyoung Kyu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Son; Hyoung Kyu.The latest application filed is for "apparatus for treating substrate and assembly for distributing gas".

Company Profile
1.12.14
  • Son; Hyoung Kyu - Seoul KR
  • Son; Hyoung-Kyu - Seongnam-si N/A KR
  • Son; Hyoung-Kyu - Gangbuk-gu KR
  • Son; Hyoung-Kyu - Sungnam KR
  • Son; Hyoung-Kyu - Sungnam City KR
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Gas supplying unit of substrate treating apparatus
Grant 11,408,071 - Son , et al. August 9, 2
2022-08-09
Apparatus For Treating Substrate And Assembly For Distributing Gas
App 20220208516 - SON; Hyoung Kyu
2022-06-30
Gas Supplying Unit Of Substrate Treating Apparatus
App 20200277702 - SON; Hyoung Kyu ;   et al.
2020-09-03
Process chamber having gate slit opening and closing apparatus
Grant 8,834,673 - Son September 16, 2
2014-09-16
Substrate processing apparatus having electrode member
Grant 8,623,173 - Son January 7, 2
2014-01-07
Vacuum processing apparatus
Grant 8,349,082 - Lee , et al. January 8, 2
2013-01-08
Vacuum processing apparatus
Grant 8,187,384 - Lee , et al. May 29, 2
2012-05-29
Vacuum processing apparatus
Grant 8,152,926 - Lee , et al. April 10, 2
2012-04-10
Vacuum processing apparatus
Grant 8,075,691 - Lee , et al. December 13, 2
2011-12-13
Lift pin driving device and a flat panel display manufacturing apparatus having same
Grant 7,988,817 - Son August 2, 2
2011-08-02
Apparatus and method for measuring chuck attachment force
Grant 7,770,478 - Son August 10, 2
2010-08-10
Vacuum Processing Apparatus
App 20100089531 - LEE; Young Jong ;   et al.
2010-04-15
Vacuum Processing Apparatus
App 20100086382 - LEE; Young Jong ;   et al.
2010-04-08
Vacuum Processing Apparatus
App 20100086383 - LEE; Young Jong ;   et al.
2010-04-08
Vacuum Processing Apparatus
App 20100086381 - Lee; Young Jong ;   et al.
2010-04-08
Embossing apparatus and method
Grant 7,690,913 - Son April 6, 2
2010-04-06
Apparatus Amd Method For Measuring Chuck Attachment Force
App 20090107250 - SON; Hyoung Kyu
2009-04-30
Substrate Processing Apparatus Having Electrode Member
App 20090071524 - SON; Hyoung-Kyu
2009-03-19
Lift Pin Driving Device And A Flat Panel Display Manufacturing Apparatus Having Same
App 20080110397 - SON; Hyoung Kyu
2008-05-15
Process Chamber Having Gate Slit Opening And Closing Apparatus
App 20080110568 - SON; Hyoung Kyu
2008-05-15
Apparatus And Method For Measuring Chuck Attachment Force
App 20080108154 - Son; Hyoung Kyu
2008-05-08
Electrostatic chuck, substrate processing apparatus having the same, and substrate processing method using the same
App 20080055813 - Son; Hyoung-Kyu
2008-03-06
Embossing Apparatus And Method
App 20070266867 - Son; Hyoung-Kyu
2007-11-22
Vacuum processing apparatus
App 20060191118 - Lee; Young Jong ;   et al.
2006-08-31

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