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Patent applications and USPTO patent grants for Sommer; Bruce A..The latest application filed is for "apparatus for elimination of low temperature ammonia salts in ticl.sub.4 nh.sub.3 cvd reaction".
Patent | Date |
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Apparatus for elimination of low temperature ammonia salts in TiCl.sub.4 NH.sub.3 CVD reaction Grant 5,348,587 - Eichman , et al. September 20, 1 | 1994-09-20 |
Processing for forming low resistivity titanium nitride films Grant 5,308,655 - Eichman , et al. * May 3, 1 | 1994-05-03 |
Process for forming low resistivity titanium nitride films Grant 5,279,857 - Eichman , et al. January 18, 1 | 1994-01-18 |
Elimination of low temperature ammonia salt in TiCl.sub.4 NH.sub.3 CVD reaction Grant 5,271,963 - Eichman , et al. December 21, 1 | 1993-12-21 |
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