Solarz; Richard William
Patent Applications and Registrations
Patent applications and USPTO patent grants for Solarz; Richard William.The latest application filed is for "coherent duv illumination for semiconductor wafer inspection".
- Solarz; Richard William - Danville CA
| Patent | Date |
|---|---|
| Coherent DUV illumination for semiconductor wafer inspection Grant 8,649,646 - Solarz February 11, 2 | 2014-02-11 |
| Coherent DUV illumination for semiconductor wafer inspection App 20080105835 - Solarz; Richard William | 2008-05-08 |
| Coherent DUV illumination for semiconductor wafer inspection Grant 7,295,739 - Solarz November 13, 2 | 2007-11-13 |
| Coherent DUV illumination for semiconductor wafer inspection App 20060083470 - Solarz; Richard William | 2006-04-20 |
| High transmission optical inspection tools Grant 6,661,580 - Solarz December 9, 2 | 2003-12-09 |
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