Patent applications and USPTO patent grants for SOININEN; Pekka.The latest application filed is for "apparatus and method for atomic layer deposition (ald)".
Patent | Date |
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Apparatus And Method For Atomic Layer Deposition (ald) App 20220275512 - MALILA; Matti ;   et al. | 2022-09-01 |
An Atomic Layer Deposition Apparatus App 20220259733 - AMINOFF; Hulda ;   et al. | 2022-08-18 |
Precursor Source Arrangement And Atomic Layer Deposition Apparatus App 20220243320 - AMINOFF; Hulda ;   et al. | 2022-08-04 |
Precursor Source Arrangement And Atomic Layer Deposition Apparatus App 20220243328 - SOININEN; Pekka ;   et al. | 2022-08-04 |
Precursor Supply Chamber App 20220220614 - WESSLIN; Johannes ;   et al. | 2022-07-14 |
An Atomic Layer Deposition Apparatus App 20220205097 - MIIKKULAINEN; Ville ;   et al. | 2022-06-30 |
Atomic Layer Deposition Apparatus App 20220205098 - SOININEN; Pekka ;   et al. | 2022-06-30 |
Precursor Supply Cabinet App 20220146051 - SOININEN; Pekka ;   et al. | 2022-05-12 |
Nozzle head and apparatus Grant 11,214,866 - Soininen , et al. January 4, 2 | 2022-01-04 |
Nozzle Head App 20210214847 - Soininen; Pekka ;   et al. | 2021-07-15 |
Apparatus And Method App 20210164100 - SOININEN; Pekka | 2021-06-03 |
Nozzle Head And Apparatus App 20210115561 - SOININEN; Pekka ;   et al. | 2021-04-22 |
Nozzle Head And Apparatus App 20210025057 - SOININEN; Pekka ;   et al. | 2021-01-28 |
Nozzle And Nozzle Head App 20200385863 - Soininen; Pekka ;   et al. | 2020-12-10 |
Apparatus, method and reaction chamber Grant 10,590,536 - Soderlund , et al. | 2020-03-17 |
Method of coating a substrate and an apparatus Grant 10,385,450 - Soderlund , et al. A | 2019-08-20 |
Method Of Coating A Substrate And An Apparatus App 20190186011 - Soderlund; Mikko ;   et al. | 2019-06-20 |
Nozzle head and apparatus for coating substrate surface Grant 10,280,508 - Soininen , et al. | 2019-05-07 |
Apparatus, Method And Reaction Chamber App 20190127850 - Soderlund; Mikko ;   et al. | 2019-05-02 |
An Apparatus For Atomic Layer Deposition App 20190032212 - SOININEN; Pekka ;   et al. | 2019-01-31 |
Apparatus, method and reaction chamber Grant 10,167,551 - Soderlund , et al. J | 2019-01-01 |
Apparatus For Processing A Surface Of Substrate And Method Operating The Apparatus App 20180258536 - Keto; Leif ;   et al. | 2018-09-13 |
Apparatus For Processing Substrate App 20180251896 - JAUHIAINEN; Mika ;   et al. | 2018-09-06 |
Apparatus and method for processing substrate Grant 10,023,957 - Jauhiainen , et al. July 17, 2 | 2018-07-17 |
Apparatus for processing substrate surface Grant 9,909,212 - Alasaarela , et al. March 6, 2 | 2018-03-06 |
Apparatus And Method App 20170362708 - SOININEN; Pekka ;   et al. | 2017-12-21 |
Nozzle Head And Apparatus For Coating Substrate Surface App 20170362706 - SOININEN; Pekka ;   et al. | 2017-12-21 |
Nozzle head and apparatus Grant 9,803,281 - Soininen , et al. October 31, 2 | 2017-10-31 |
Apparatus and method Grant 9,783,887 - Soininen , et al. October 10, 2 | 2017-10-10 |
Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors Grant 9,708,710 - Alasaarela , et al. July 18, 2 | 2017-07-18 |
Apparatus for processing surface of substrate and nozzle head Grant 9,683,291 - Enholm , et al. June 20, 2 | 2017-06-20 |
Nozzle Head, Apparatus and Method for Subjecting Surface of Substrate to Successive Surface Reactions App 20170159179 - Soininen; Pekka ;   et al. | 2017-06-08 |
Method And Apparatus For Coating A Surface Of A Substrate App 20160168703 - ALASAARELA; Tapani ;   et al. | 2016-06-16 |
Apparatus And Method For Processing Substrate App 20150167164 - Jauhiainen; Mika ;   et al. | 2015-06-18 |
Apparatus For Processing Surface Of Substrate And Nozzle Head App 20150152552 - Enholm; Robin ;   et al. | 2015-06-04 |
Nozzle And Nozzle Head App 20150004318 - Alasaarela; Tapani ;   et al. | 2015-01-01 |
Protective Coating Of Silver App 20140335272 - MAKELA; Milja ;   et al. | 2014-11-13 |
Protective coating of silver Grant 8,883,258 - Makela , et al. November 11, 2 | 2014-11-11 |
Apparatus, Method And Reaction Chamber App 20130269608 - Soderlund; Mikko ;   et al. | 2013-10-17 |
Apparatus App 20130199446 - Alasaarela; Tapani ;   et al. | 2013-08-08 |
Arrangement in connection with ALD reactor Grant 8,496,753 - Jauhiainen , et al. July 30, 2 | 2013-07-30 |
Device and method for producing nanotubes Grant 8,475,760 - Rajala , et al. July 2, 2 | 2013-07-02 |
Apparatus And Method App 20130164458 - Soininen; Pekka ;   et al. | 2013-06-27 |
Nozzle Head And Apparatus App 20130149446 - Soininen; Pekka ;   et al. | 2013-06-13 |
Apparatus App 20120067284 - Soininen; Pekka ;   et al. | 2012-03-22 |
Ald Reactor, Method For Loading Ald Reactor, And Production Line App 20110274837 - Soininen; Pekka ;   et al. | 2011-11-10 |
Reaction Chamber App 20110265719 - Peltoniemi; Janne ;   et al. | 2011-11-03 |
Source, an arrangement for installing a source, and a method for installing and removing a source Grant 7,922,821 - Soininen April 12, 2 | 2011-04-12 |
Arrangement In Connection With Ald Reactor App 20110036291 - Jauhiainen; Mika ;   et al. | 2011-02-17 |
Method And Apparatus For Generating Plasma App 20110003087 - Soininen; Pekka ;   et al. | 2011-01-06 |
Glass Product And A Method For Manufacturing A Glass Product App 20110003125 - Rajala; Markku ;   et al. | 2011-01-06 |
Coating Method App 20100285205 - Soininen; Pekka ;   et al. | 2010-11-11 |
Device And Method For Producing Nanotubes App 20100072429 - Rajala; Markku ;   et al. | 2010-03-25 |
Source, an Arrangement for Installing a Source, and a Method for Installing and Removing a Source App 20090277390 - Soininen; Pekka | 2009-11-12 |
Ald Reactor App 20090255470 - Soininen; Pekka ;   et al. | 2009-10-15 |
Arrangement in Connection with ALD Reactor App 20090169743 - Soininen; Pekka ;   et al. | 2009-07-02 |
Hot Source App 20090078203 - Soininen; Pekka ;   et al. | 2009-03-26 |
Reactor App 20090031947 - Soininen; Pekka | 2009-02-05 |
Protective Coating of Silver App 20090004386 - Makela; Milja ;   et al. | 2009-01-01 |
Method for Doping Material and Doped Material App 20070218290 - Rajala; Markku ;   et al. | 2007-09-20 |
Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh network Grant 7,215,658 - Alastalo , et al. May 8, 2 | 2007-05-08 |
Method and apparatus for making optical fibres App 20060130524 - Hovinen; Anssi ;   et al. | 2006-06-22 |
Method and apparatus for processing a preform App 20050213904 - Hyvarinen, Jouni ;   et al. | 2005-09-29 |
Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh network App 20050083852 - Alastalo, Ari ;   et al. | 2005-04-21 |
Data transfer method in radio system App 20040087308 - Tirkkonen, Olav ;   et al. | 2004-05-06 |
Channel selection in a radio link system Grant 6,694,141 - Pulkkinen , et al. February 17, 2 | 2004-02-17 |
Method and apparatus for growing thin films Grant 6,630,030 - Suntola , et al. October 7, 2 | 2003-10-07 |
Data transmission method and a radio system Grant 6,625,138 - Karna , et al. September 23, 2 | 2003-09-23 |
Data transmission method and a radio system Grant 6,594,248 - July 15, 2 | 2003-07-15 |
Data transmission method and a radio system App 20020114297 - Karna, Juha ;   et al. | 2002-08-22 |
Switching control method and apparatus for wireless telecommunications Grant 6,434,130 - Soininen , et al. August 13, 2 | 2002-08-13 |
Apparatus, and associated method, for utilizing antenna information determinative of antenna operation in a wireless mesh network App 20020097700 - Alastalo, Ari ;   et al. | 2002-07-25 |
Apparatus for growing thin films Grant 5,855,680 - Soininen , et al. January 5, 1 | 1999-01-05 |
Method and equipment for growing thin films Grant 5,711,811 - Suntola , et al. January 27, 1 | 1998-01-27 |
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