Soininen; Pekka T.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Soininen; Pekka T..The latest application filed is for "a coating precursor nozzle and a nozzle head".
- Soininen; Pekka T. - Espoo FI
- Soininen; Pekka T. - Helsinki FI
- Soininen, Pekka T - Helsinki FI
| Patent | Date |
|---|---|
| Coating precursor nozzle and a nozzle head Grant 11,041,243 - Soininen June 22, 2 | 2021-06-22 |
| A Coating Precursor Nozzle And A Nozzle Head App 20180347044 - SOININEN; Pekka T. | 2018-12-06 |
| Safe liquid source containers Grant 7,971,861 - Soininen July 5, 2 | 2011-07-05 |
| Apparatus for fabrication of thin films Grant 7,833,352 - Bondestam , et al. November 16, 2 | 2010-11-16 |
| Safe Liquid Source Containers App 20090133632 - Soininen; Pekka T. | 2009-05-28 |
| Safe liquid source containers Grant 7,497,420 - Soininen March 3, 2 | 2009-03-03 |
| Trench Isolation Structures For Integrated Circuits App 20070287261 - Raaijmakers; Ivo ; et al. | 2007-12-13 |
| Trench isolation structures for integrated circuits Grant 7,276,774 - Raaijmakers , et al. October 2, 2 | 2007-10-02 |
| Safe liquid source containers App 20070170604 - Soininen; Pekka T. | 2007-07-26 |
| Method of growing a thin film onto a substrate App 20070054049 - Lindfors; Sven ; et al. | 2007-03-08 |
| Safe liquid source containers Grant 7,156,380 - Soininen January 2, 2 | 2007-01-02 |
| Method of growing a thin film onto a substrate Grant 7,037,372 - Lindfors , et al. May 2, 2 | 2006-05-02 |
| Method of growing a thin film onto a substrate Grant 7,018,478 - Lindfors , et al. March 28, 2 | 2006-03-28 |
| Method of growing a thin film onto a substrate Grant 6,881,263 - Lindfors , et al. April 19, 2 | 2005-04-19 |
| Safe liquid source containers App 20050066893 - Soininen, Pekka T. | 2005-03-31 |
| Method of growing a thin film onto a substrate App 20050056211 - Lindfors, Sven ; et al. | 2005-03-17 |
| Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition Grant 6,861,334 - Raaijmakers , et al. March 1, 2 | 2005-03-01 |
| Method of growing a thin film onto a substrate App 20040261706 - Lindfors, Sven ; et al. | 2004-12-30 |
| Trench isolation structures for integrated circuits App 20040222490 - Raaijmakers, Ivo ; et al. | 2004-11-11 |
| Method of growing a thin film onto a substrate Grant 6,783,590 - Lindfors , et al. August 31, 2 | 2004-08-31 |
| Sealing porous structures Grant 6,759,325 - Raaijmakers , et al. July 6, 2 | 2004-07-06 |
| Method for controlling conformality with alternating layer deposition Grant 6,699,783 - Raaijmakers , et al. March 2, 2 | 2004-03-02 |
| Apparatus for growing thin films Grant 6,689,210 - Soininen , et al. February 10, 2 | 2004-02-10 |
| Protective layers prior to alternating layer deposition Grant 6,686,271 - Raaijmakers , et al. February 3, 2 | 2004-02-03 |
| Method of growing a thin film onto a substrate App 20030224107 - Lindfors, Sven ; et al. | 2003-12-04 |
| Apparatus for fabrication of thin films App 20030150385 - Bondestam, Niklas ; et al. | 2003-08-14 |
| Sealing porous structures App 20030143839 - Raaijmakers, Ivo ; et al. | 2003-07-31 |
| Controlled conformality with alternating layer deposition App 20030134508 - Raaijmakers, Ivo ; et al. | 2003-07-17 |
| Apparatus for fabrication of thin films Grant 6,579,374 - Bondestam , et al. June 17, 2 | 2003-06-17 |
| Apparatus for fabrication of thin films Grant 6,562,140 - Bondestam , et al. May 13, 2 | 2003-05-13 |
| Protective layers prior to alternating layer deposition App 20030054631 - Raaijmakers, Ivo ; et al. | 2003-03-20 |
| Trench isolation for integrated circuit App 20030015764 - Raaijmakers, Ivo ; et al. | 2003-01-23 |
| Apparatus for growing thin films App 20020185060 - Soininen, Pekka T. ; et al. | 2002-12-12 |
| Protective layers prior to alternating layer deposition Grant 6,482,733 - Raaijmakers , et al. November 19, 2 | 2002-11-19 |
| Apparatus for growing thin films Grant 6,447,607 - Soininen , et al. September 10, 2 | 2002-09-10 |
| Method of growing a thin film onto a substrate App 20010054377 - Lindfors, Sven ; et al. | 2001-12-27 |
| Protective layers prior to alternating layer deposition App 20010054769 - Raaijmakers, Ivo ; et al. | 2001-12-27 |
| Apparatus for growing thin films App 20010013312 - Soininen, Pekka T. ; et al. | 2001-08-16 |
| Apparatus for fabrication of thin films App 20010009140 - Bondestam, Niklas ; et al. | 2001-07-26 |
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