Soininen; Pekka J.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Soininen; Pekka J..The latest application filed is for "an atomic layer deposition apparatus".
Company Profile
4.23.32
- Soininen; Pekka J. - Espoo FI
- Soininen; Pekka J - Espoo FI
Patent Activity
| Patent | Date |
|---|---|
| Plasma etch-resistant film and a method for its fabrication Grant 11,421,319 - Soininen , et al. August 23, 2 | 2022-08-23 |
| An Atomic Layer Deposition Apparatus App 20220259733 - AMINOFF; Hulda ; et al. | 2022-08-18 |
| Precursor Source Arrangement And Atomic Layer Deposition Apparatus App 20220243328 - SOININEN; Pekka ; et al. | 2022-08-04 |
| Precursor Source Arrangement And Atomic Layer Deposition Apparatus App 20220243320 - AMINOFF; Hulda ; et al. | 2022-08-04 |
| Atomic Layer Deposition Apparatus App 20220205098 - SOININEN; Pekka ; et al. | 2022-06-30 |
| An Atomic Layer Deposition Apparatus App 20220205097 - MIIKKULAINEN; Ville ; et al. | 2022-06-30 |
| Method and apparatus for depositing thin films on a surface Grant RE48,871 - Soininen , et al. January 4, 2 | 2022-01-04 |
| Plasma Etch-resistant Film And A Method For Its Fabrication App 20210115555 - SOININEN; Pekka J. ; et al. | 2021-04-22 |
| Materials Comprising Matrix Material Doped With Metal And Methods For Fabrication App 20210108138 - Merdes; Saoussen ; et al. | 2021-04-15 |
| Plasma etch-resistant film and a method for its fabrication Grant 10,961,620 - Soininen , et al. March 30, 2 | 2021-03-30 |
| A Plasma Etch-resistant Film And A Method For Its Fabrication App 20200080197 - SOININEN; Pekka J. ; et al. | 2020-03-12 |
| Powder Particle Coating Using Atomic Layer Deposition Cartridge App 20150125599 - Lindfors; Sven ; et al. | 2015-05-07 |
| Atomic Layer Deposition Reactor For Processing A Batch Of Substrates And Method Thereof App 20140335267 - Lindfors; Sven ; et al. | 2014-11-13 |
| Method of depositing material using a deposition reactor Grant 8,753,716 - Soininen , et al. June 17, 2 | 2014-06-17 |
| Apparatus and methods for deposition reactors Grant 8,741,062 - Lindfors , et al. June 3, 2 | 2014-06-03 |
| Apparatus And Methods For Deposition Reactors App 20130240056 - Lindfors; Sven ; et al. | 2013-09-19 |
| Method of growing electrical conductors Grant 8,536,058 - Kostamo , et al. September 17, 2 | 2013-09-17 |
| Apparatus and Methods for Deposition Reactors App 20130183444 - Soininen; Pekka J. ; et al. | 2013-07-18 |
| Method Of Growing Electrical Conductors App 20120028474 - Kostamo; Juhana ; et al. | 2012-02-02 |
| Method of growing electrical conductors Grant 7,955,979 - Kostamo , et al. June 7, 2 | 2011-06-07 |
| Copper interconnect structure having stuffed diffusion barrier Grant 7,732,331 - Kim , et al. June 8, 2 | 2010-06-08 |
| Conformal lining layers for damascene metallization Grant 7,670,944 - Raaijmakers , et al. March 2, 2 | 2010-03-02 |
| Apparatus and methods for deposition reactors App 20090263578 - Lindfors; Sven ; et al. | 2009-10-22 |
| Method and apparatus for depositing thin films on a surface Grant 7,537,662 - Soininen , et al. May 26, 2 | 2009-05-26 |
| Method of growing electrical conductors Grant 7,494,927 - Kostamo , et al. February 24, 2 | 2009-02-24 |
| Oxygen bridge structures and methods to form oxygen bridge structures Grant 7,465,658 - Raaijmakers , et al. December 16, 2 | 2008-12-16 |
| Method Of Growing Electrical Conductors App 20080146042 - Kostamo; Juhana ; et al. | 2008-06-19 |
| Dielectric Layers And Methods Of Forming The Same App 20080093711 - Raaijmakers; Ivo ; et al. | 2008-04-24 |
| Dielectric layers and methods of forming the same Grant 7,323,422 - Raaijmakers , et al. January 29, 2 | 2008-01-29 |
| Conformal lining layers for damascene metallization App 20070096321 - Raaijmakers; Ivo ; et al. | 2007-05-03 |
| Oxygen bridge structures and methods to form oxygen bridge structures App 20060258150 - Raaijmakers; Ivo ; et al. | 2006-11-16 |
| Conformal lining layers for damascene metallization Grant 7,102,235 - Raaijmakers , et al. September 5, 2 | 2006-09-05 |
| Oxygen bridge structures and methods to form oxygen bridge structures Grant 7,034,397 - Raaijmakers , et al. April 25, 2 | 2006-04-25 |
| Copper interconnect structure having stuffed diffusion barrier Grant 6,936,535 - Kim , et al. August 30, 2 | 2005-08-30 |
| Copper interconnect structure having stuffed diffusion barrier App 20050101132 - Kim, Ki-Bum ; et al. | 2005-05-12 |
| Method of growing electrical conductors Grant 6,887,795 - Soininen , et al. May 3, 2 | 2005-05-03 |
| In situ reduction of copper oxide prior to silicon carbide deposition Grant 6,878,628 - Sophie , et al. April 12, 2 | 2005-04-12 |
| Method and apparatus for depositing thin films on a surface App 20040216665 - Soininen, Pekka J. ; et al. | 2004-11-04 |
| Conformal lining layers for damascene metallization App 20040130029 - Raaijmakers, Ivo ; et al. | 2004-07-08 |
| Oxygen bridge structures and methods to form oxygen bridge structures App 20040092096 - Raaijmakers, Ivo ; et al. | 2004-05-13 |
| Method of making conformal lining layers for damascene metallization Grant 6,727,169 - Raaijmakers , et al. April 27, 2 | 2004-04-27 |
| Metal anneal with oxidation prevention Grant 6,679,951 - Soininen , et al. January 20, 2 | 2004-01-20 |
| Method of growing electrical conductors App 20040005753 - Kostamo, Juhana ; et al. | 2004-01-08 |
| Dielectric layers and methods of forming the same App 20030234417 - Raaijmakers, Ivo ; et al. | 2003-12-25 |
| Method of growing electrical conductors App 20030096468 - Soininen, Pekka J. ; et al. | 2003-05-22 |
| Copper interconnect structure having stuffed diffusion barrier App 20020187631 - Kim, Ki-Bum ; et al. | 2002-12-12 |
| Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH Grant 6,482,740 - Soininen , et al. November 19, 2 | 2002-11-19 |
| In situ reduction of copper oxide prior to silicon carbide deposition App 20020098685 - Sophie, Auguste J.L. ; et al. | 2002-07-25 |
| Metal anneal with oxidation prevention App 20020092584 - Soininen, Pekka J. ; et al. | 2002-07-18 |
| Method of growing electrical conductors App 20020004293 - Soininen, Pekka J. ; et al. | 2002-01-10 |
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