| Patent | Date |
|---|
Methods of manufacturing semiconductor device
Grant 11,181,831 - Lee , et al. November 23, 2 | 2021-11-23 |
Semiconductor pattern detecting apparatus
Grant 11,017,525 - Ahn , et al. May 25, 2 | 2021-05-25 |
Methods for nondestructive measurements of thickness of underlying layers
Grant 10,989,520 - Oh , et al. April 27, 2 | 2021-04-27 |
Method of inspecting pattern defect
Grant 10,969,428 - Sohn , et al. April 6, 2 | 2021-04-06 |
Apparatus for X-ray inspection, and a method for manufacturing a semiconductor device using the same
Grant 10,852,259 - Lee , et al. December 1, 2 | 2020-12-01 |
Methods For Nondestructive Measurements Of Thickness Of Underlying Layers
App 20200208964 - OH; Duck-mahn ; et al. | 2020-07-02 |
Methods Of Manufacturing Semiconductor Device
App 20200194317 - Lee; Kyoung-hwan ; et al. | 2020-06-18 |
Substrate Inspection Apparatus, Method Of Calibrating The Substrate Inspection Apparatus, And Method Of Fabricating Semiconducto
App 20200182777 - PARK; Jang Ik ; et al. | 2020-06-11 |
Semiconductor Pattern Detecting Apparatus
App 20200184618 - AHN; Jae Hyung ; et al. | 2020-06-11 |
Scanning probe inspector
Grant 10,585,115 - Oh , et al. | 2020-03-10 |
Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same
Grant 10,527,556 - Rim , et al. J | 2020-01-07 |
Apparatus For X-ray Inspection, And A Method For Manufacturing A Semiconductor Device Using The Same
App 20190187077 - Lee; Kyoung Hwan ; et al. | 2019-06-20 |
Scanning Probe Inspector
App 20190170788 - Oh; Duck Mahn ; et al. | 2019-06-06 |
Methods Of Inspecting Defect And Methods Of Fabricating A Semiconductor Device Using The Same
App 20190130552 - Sohn; Young-hoon ; et al. | 2019-05-02 |
Semiconductor Chip Inspection Device
App 20190114755 - LEE; Seong Sil ; et al. | 2019-04-18 |
Optical Measuring Method And Apparatus, And Method Of Manufacturing Semiconductor Device Using The Same
App 20180340894 - RIM; Min-Ho ; et al. | 2018-11-29 |
Surface inspecting method
Grant 10,001,444 - Ko , et al. June 19, 2 | 2018-06-19 |
Method Of Inspecting Pattern Defect
App 20170192052 - SOHN; Young-hoon ; et al. | 2017-07-06 |
Surface Inspecting Method
App 20160153915 - Ko; Kang-woong ; et al. | 2016-06-02 |
Process Management Systems Using Comparison Of Statistical Data To Process Parameters And Process Management Devices
App 20150248127 - Yang; Yu Sin ; et al. | 2015-09-03 |
Method of inspecting wafer
Grant 9,036,895 - Sohn , et al. May 19, 2 | 2015-05-19 |
Defect inspection apparatus and defect inspection method using the same
Grant 8,902,412 - Sohn , et al. December 2, 2 | 2014-12-02 |
Method and apparatus to measure step height of device using scanning electron microscope
Grant 8,759,763 - Sohn , et al. June 24, 2 | 2014-06-24 |
Methods of generating three-dimensional process window qualification
Grant 8,703,405 - Sohn , et al. April 22, 2 | 2014-04-22 |
Method Of Inspecting Wafer
App 20130301903 - SOHN; Young-hoon ; et al. | 2013-11-14 |
Method And Apparatus To Measure Step Height Of Device Using Scanning Electron Microscope
App 20130234021 - Sohn; Young-Hoon ; et al. | 2013-09-12 |
Defect Inspection Apparatus And Defect Inspection Method Using The Same
App 20120314205 - SOHN; Young-Hoon ; et al. | 2012-12-13 |
Methods Of Generating Three-dimensional Process Window Qualification
App 20120315583 - Sohn; Young-Hoon ; et al. | 2012-12-13 |
Organic electroluminescent display device having a novel concept for luminous efficiency
Grant 8,093,804 - Lee , et al. January 10, 2 | 2012-01-10 |
Semiconductor device capable of testing a transmission line for an impedance calibration code
Grant 7,994,813 - Sohn , et al. August 9, 2 | 2011-08-09 |
Organic Electroluminescent Display Device
App 20110121717 - LEE; Hyun-Ho ; et al. | 2011-05-26 |
Semiconductor Device Capable Of Testing A Transmission Line For An Impedance Calibration Code
App 20100237902 - Sohn; Young-Hoon ; et al. | 2010-09-23 |
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