| Patent | Date |
|---|
Calibration sample, electron beam adjustment method and electron beam apparatus using same
Grant 11,435,178 - Sohda , et al. September 6, 2 | 2022-09-06 |
Inspection device
Grant 11,276,551 - Shintani , et al. March 15, 2 | 2022-03-15 |
Scanning electron microscope
Grant 11,251,018 - Sohda , et al. February 15, 2 | 2022-02-15 |
Electron gun and electron beam application device
Grant 11,227,740 - Matsunaga , et al. January 18, 2 | 2022-01-18 |
Scanning Electron Microscope
App 20210272770 - SOHDA; Yasunari ; et al. | 2021-09-02 |
Calibration Sample, Electron Beam Adjustment Method And Electron Beam Apparatus Using Same
App 20210131801 - SOHDA; Yasunari ; et al. | 2021-05-06 |
Inspection Device
App 20200365364 - SHINTANI; Atsuko ; et al. | 2020-11-19 |
Electron beam device
Grant 10,825,649 - Sohda , et al. November 3, 2 | 2020-11-03 |
Electron Gun And Electron Beam Application Device
App 20200266020 - MATSUNAGA; Soichiro ; et al. | 2020-08-20 |
System and method for measuring patterns
Grant 10,692,693 - Sun , et al. | 2020-06-23 |
Charged particle beam apparatus
Grant 10,636,618 - Bizen , et al. | 2020-04-28 |
Electron beam device and sample inspection method
Grant 10,629,405 - Sohda , et al. | 2020-04-21 |
Scanning electron microscope
Grant 10,559,450 - Takahashi , et al. Feb | 2020-02-11 |
Aberration correction method, aberration correction system, and charged particle beam apparatus
Grant 10,446,361 - Cheng , et al. Oc | 2019-10-15 |
Electron Beam Device
App 20190295805 - SOHDA; Yasunari ; et al. | 2019-09-26 |
Electron Beam Device And Sample Inspection Method
App 20190287757 - SOHDA; Yasunari ; et al. | 2019-09-19 |
Electron Source And Electron Beam Irradiation Device
App 20190198284 - MATSUNAGA; Soichiro ; et al. | 2019-06-27 |
System And Method For Measuring Patterns
App 20190148108 - SUN; Wei ; et al. | 2019-05-16 |
Scanning Electron Microscope
App 20190074159 - Takahashi; Noritsugu ; et al. | 2019-03-07 |
Charged Particle Beam Apparatus
App 20190066969 - BIZEN; Kaori ; et al. | 2019-02-28 |
Scanning electron microscope
Grant 10,134,558 - Sohda , et al. November 20, 2 | 2018-11-20 |
Aberration Correction Method, Aberration Correction System, And Charged Particle Beam Apparatus
App 20180190469 - CHENG; Zhaohui ; et al. | 2018-07-05 |
Scanning electron microscope and method for controlling same
Grant 10,014,160 - Shirahata , et al. July 3, 2 | 2018-07-03 |
Charged-particle-beam device
Grant 9,960,006 - Takahashi , et al. May 1, 2 | 2018-05-01 |
Charged particle beam device and detection method using said device
Grant 9,799,483 - Shojo , et al. October 24, 2 | 2017-10-24 |
Scanning Electron Microscope And Method For Controlling Same
App 20170186583 - SHIRAHATA; Kaori ; et al. | 2017-06-29 |
Scanning electron beam device with focus adjustment based on acceleration voltage and dimension measurement method using same
Grant 9,644,955 - Yano , et al. May 9, 2 | 2017-05-09 |
Charged-particle-beam Device
App 20170092459 - TAKAHASHI; Noritsugu ; et al. | 2017-03-30 |
Charged Particle Beam Device And Detection Method Using Said Device
App 20170053777 - SHOJO; Tomoyasu ; et al. | 2017-02-23 |
Scanning Electron Microscope
App 20170018394 - SOHDA; Yasunari ; et al. | 2017-01-19 |
Electron beam equipment
Grant 9,543,053 - Sohda , et al. January 10, 2 | 2017-01-10 |
Pattern critical dimension measurement equipment and method for measuring pattern critical dimension
Grant 9,520,266 - Shirahata , et al. December 13, 2 | 2016-12-13 |
Charged-particle beam device
Grant 9,443,695 - Ohashi , et al. September 13, 2 | 2016-09-13 |
Charged particle beam apparatus
Grant 9,312,091 - Sohda , et al. April 12, 2 | 2016-04-12 |
Charged particle beam microscope
Grant 9,261,360 - Okai , et al. February 16, 2 | 2016-02-16 |
Charged particle instrument
Grant 9,230,775 - Ohashi , et al. January 5, 2 | 2016-01-05 |
Charged-particle Beam Device
App 20150348747 - OHASHI; Takeyoshi ; et al. | 2015-12-03 |
Method and apparatus for measuring displacement between patterns and scanning electron microscope installing unit for measuring displacement between patterns
Grant 9,000,366 - Yamaguchi , et al. April 7, 2 | 2015-04-07 |
Charged Particle Beam Apparatus
App 20150076362 - Sohda; Yasunari ; et al. | 2015-03-19 |
Scanning electron microscope
Grant 8,969,801 - Okai , et al. March 3, 2 | 2015-03-03 |
Pattern Critical Dimension Measurement Equipment And Method For Measuring Pattern Critical Dimension
App 20150041648 - Shirahata; Kaori ; et al. | 2015-02-12 |
Electron Beam Equipment
App 20150034836 - Sohda; Yasunari ; et al. | 2015-02-05 |
Scanning Electron Beam Device And Dimension Measurement Method Using Same
App 20140339425 - Yano; Tasuku ; et al. | 2014-11-20 |
Scanning Electron Microscope
App 20140299769 - Okai; Nobuhiro ; et al. | 2014-10-09 |
Pattern evaluation method, device therefor, and electron beam device
Grant 8,816,277 - Yamanashi , et al. August 26, 2 | 2014-08-26 |
Charged particle beam device
Grant 8,766,183 - Fukuda , et al. July 1, 2 | 2014-07-01 |
Electron microscope
Grant 8,742,342 - Okai , et al. June 3, 2 | 2014-06-03 |
Electron beam device
Grant 8,735,814 - Sohda , et al. May 27, 2 | 2014-05-27 |
Scanning electron microscope
Grant 8,704,175 - Sohda , et al. April 22, 2 | 2014-04-22 |
Scanning electron microscope and inspection method using same
Grant 8,637,820 - Sohda , et al. January 28, 2 | 2014-01-28 |
Electron beam measurement apparatus
Grant 8,575,547 - Sohda , et al. November 5, 2 | 2013-11-05 |
Electron Beam Device
App 20130270435 - Sohda; Yasunari ; et al. | 2013-10-17 |
Method And Apparatus For Measuring Displacement Between Patterns And Scanning Electron Microscope Installing Unit For Measuring Displacement Between Patterns
App 20130264479 - YAMAGUCHI; Atsuko ; et al. | 2013-10-10 |
Scanning Electron Microscope
App 20130175447 - Sohda; Yasunari ; et al. | 2013-07-11 |
Charged beam device
Grant 8,478,021 - Shirahata , et al. July 2, 2 | 2013-07-02 |
Pattern Evaluation Method, Device Therefor, And Electron Beam Device
App 20130026361 - Yamanashi; Hiromasa ; et al. | 2013-01-31 |
Charged Particle Beam Microscope
App 20120327213 - Okai; Nobuhiro ; et al. | 2012-12-27 |
Scanning Electron Microscope And Inspection Method Using Same
App 20120286158 - Sohda; Yasunari ; et al. | 2012-11-15 |
Charged Particle Instrument
App 20120286160 - OHASHI; Takeyoshi ; et al. | 2012-11-15 |
Pattern forming method and its mold
Grant 8,268,209 - Ogino , et al. September 18, 2 | 2012-09-18 |
Standard member for correction, scanning electron microscope using same, and scanning electron microscope correction method
Grant 8,263,929 - Nakayama , et al. September 11, 2 | 2012-09-11 |
Electron Microscope
App 20120217393 - Okai; Nobuhiro ; et al. | 2012-08-30 |
Scanning electron microscope
Grant 8,125,518 - Okai , et al. February 28, 2 | 2012-02-28 |
Method and apparatus for inspecting reticle
Grant 8,064,681 - Okai , et al. November 22, 2 | 2011-11-22 |
Charged Beam Device
App 20110274341 - Shirahata; Kaori ; et al. | 2011-11-10 |
Scanning Electron Microscope
App 20110249110 - Okai; Nobuhiro ; et al. | 2011-10-13 |
Charged Particle Beam Device
App 20110147586 - Fukuda; Muneyuki ; et al. | 2011-06-23 |
Standard Member for Correction, Scanning Electron Microscope Using Same, and Scanning Electron Microscope Correction Method
App 20110133065 - Nakayama; Yoshinori ; et al. | 2011-06-09 |
Defect inspection method and its system
Grant 7,943,903 - Okazaki , et al. May 17, 2 | 2011-05-17 |
Electron Beam Measurement Apparatus
App 20110095183 - SOHDA; Yasunari ; et al. | 2011-04-28 |
Electron beam measurement apparatus
Grant 7,884,325 - Sohda , et al. February 8, 2 | 2011-02-08 |
Standard component for calibration and electron-beam system using the same
Grant 7,875,850 - Nakayama , et al. January 25, 2 | 2011-01-25 |
Scanning electron microscope and calibration of image distortion
Grant 7,750,296 - Hitomi , et al. July 6, 2 | 2010-07-06 |
Pattern forming method and pattern forming system
Grant 7,745,237 - Katagiri , et al. June 29, 2 | 2010-06-29 |
Charged particle beam measurement equipment, size correction and standard sample for correction
Grant 7,683,313 - Sohda , et al. March 23, 2 | 2010-03-23 |
Metrology system of fine pattern for process control by charged particle beam
Grant 7,679,056 - Yamanashi , et al. March 16, 2 | 2010-03-16 |
Charged particle beam apparatus and pattern measuring method
Grant 7,655,907 - Tanimoto , et al. February 2, 2 | 2010-02-02 |
Standard reference component for calibration, fabrication method for the same, and scanning electron microscope using the same
Grant 7,612,334 - Nakayama , et al. November 3, 2 | 2009-11-03 |
Defect inspection method and its system
App 20090206252 - Okazaki; Shinji ; et al. | 2009-08-20 |
Electron Beam Measurement Apparatus
App 20090146057 - SOHDA; Yasunari ; et al. | 2009-06-11 |
Method and apparatus for inspecting reticle
App 20090136116 - Okai; Nobuhiro ; et al. | 2009-05-28 |
Calibration method for electron-beam system and electron-beam system
Grant 7,476,882 - Nakayama , et al. January 13, 2 | 2009-01-13 |
Standard component for calibration and electron-beam system using the same
App 20080251868 - Nakayama; Yoshinori ; et al. | 2008-10-16 |
Measurement method of electron beam current, electron beam writing system and electron beam detector
Grant 7,425,714 - Sakakibara , et al. September 16, 2 | 2008-09-16 |
Electron beam writing system and electron beam writing method
Grant 7,423,274 - Nakayama , et al. September 9, 2 | 2008-09-09 |
Scanning Electron Microscope and Calibration of Image Distortion
App 20080210867 - Hitomi; Keiichiro ; et al. | 2008-09-04 |
Charged particle beam measurement equipment, size correction and standard sample for correction
App 20080203285 - Sohda; Yasunari ; et al. | 2008-08-28 |
Charged particle beam application system
Grant 7,385,194 - Kamimura , et al. June 10, 2 | 2008-06-10 |
Standard Reference Component For Calibration, Fabrication Method For The Same, And Scanning Electron Microscope Using The Same
App 20080121791 - Nakayama; Yoshinori ; et al. | 2008-05-29 |
Method and apparatus for applying charged particle beam
Grant 7,378,668 - Tanimoto , et al. May 27, 2 | 2008-05-27 |
Charged Particle Beam Apparatus
App 20080067376 - Tanimoto; Sayaka ; et al. | 2008-03-20 |
Charged particle beam apparatus and pattern measuring method
App 20070272858 - Tanimoto; Sayaka ; et al. | 2007-11-29 |
Metrology System of Fine pattern for Process Control by Charged Particle Beam
App 20070221844 - Yamanashi; Hiromasa ; et al. | 2007-09-27 |
Pattern Forming Method And Pattern Forming System
App 20070172967 - Katagiri; Souichi ; et al. | 2007-07-26 |
Pattern Forming Method And Its Mold
App 20070164458 - Ogino; Masahiko ; et al. | 2007-07-19 |
Charged particle beam application system
App 20070023654 - Kamimura; Osamu ; et al. | 2007-02-01 |
Method and apparatus for applying charged particle beam
App 20060289781 - Tanimoto; Sayaka ; et al. | 2006-12-28 |
Calibration method for electron-beam system and electron-beam system
App 20060255272 - Nakayama; Yoshinori ; et al. | 2006-11-16 |
Method of charged particle beam lithography and equipment for charged particle beam lithography
Grant 7,105,842 - Tanimoto , et al. September 12, 2 | 2006-09-12 |
Electron beam writing system and electron beam writing method
App 20060197453 - Nakayama; Yoshinori ; et al. | 2006-09-07 |
Electron beam writing equipment and electron beam writing method
Grant 7,098,464 - Sohda , et al. August 29, 2 | 2006-08-29 |
Electron beam writing equipment and electron beam writing method
Grant 7,049,607 - Sohda , et al. May 23, 2 | 2006-05-23 |
Electron beam exposure apparatus and electron beam processing apparatus
Grant 7,041,988 - Hamaguchi , et al. May 9, 2 | 2006-05-09 |
Measurement method of electron beam current, electron beam writing system and electron beam detector
App 20060060775 - Sakakibara; Makoto ; et al. | 2006-03-23 |
Electron beam writing equipment using plural beams and method
Grant 7,015,482 - Sohda , et al. March 21, 2 | 2006-03-21 |
Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus
Grant 6,903,353 - Muraki , et al. June 7, 2 | 2005-06-07 |
Electron beam writing equipment and electron beam writing method
App 20050072939 - Sohda, Yasunari ; et al. | 2005-04-07 |
Method of charged particle beam lithography and equipment for charged particle beam lithography
App 20050072941 - Tanimoto, Sayaka ; et al. | 2005-04-07 |
Electron beam exposure equipment and electron beam exposure method
Grant 6,838,682 - Sohda , et al. January 4, 2 | 2005-01-04 |
Electron beam writing equipment and electron beam writing method
Grant 6,809,319 - Sohda , et al. October 26, 2 | 2004-10-26 |
Electron beam monitoring sensor and electron beam monitoring method
Grant 6,768,118 - Nakayama , et al. July 27, 2 | 2004-07-27 |
Electron beam writing equipment and electron beam writing method
App 20040129898 - Sohda, Yasunari ; et al. | 2004-07-08 |
Electron beam exposure equipment and electron beam exposure method
App 20040119026 - Sohda, Yasunari ; et al. | 2004-06-24 |
Electron beam monitoring sensor and electron beam monitoring method
App 20040026627 - Nakayama, Yoshinori ; et al. | 2004-02-12 |
Electron beam writing equipment
App 20040021095 - Sohda, Yasunari ; et al. | 2004-02-05 |
Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same
Grant 6,667,486 - Ohta , et al. December 23, 2 | 2003-12-23 |
Electron beam exposure apparatus and electron beam processing apparatus
App 20030209674 - Hamaguchi, Shinichi ; et al. | 2003-11-13 |
Electron Beam Exposure Method, Electron Beam Exposure Apparatus And Device Manufacturing Method Using The Same
App 20030189181 - Ohta, Hiroya ; et al. | 2003-10-09 |
Electron beam lithography apparatus and pattern forming method
Grant 6,511,048 - Sohda , et al. January 28, 2 | 2003-01-28 |
Charged particle beam lithography apparatus for forming pattern on semi-conductor
App 20020179856 - Ito, Hiroyuki ; et al. | 2002-12-05 |
Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus
App 20020160311 - Muraki, Masato ; et al. | 2002-10-31 |
Charged particle beam lithography apparatus for forming pattern on semi-conductor
App 20020100881 - Ito, Hiroyuki ; et al. | 2002-08-01 |
Charged particle beam lithography apparatus for forming pattern on semi-conductor
App 20020096651 - Ito, Hiroyuki ; et al. | 2002-07-25 |
Charged particle beam lithography apparatus for forming pattern on semi-conductor
Grant 6,121,625 - Ito , et al. September 19, 2 | 2000-09-19 |
Charged particle beam lithography method and apparatus thereof
Grant 5,831,273 - Someda , et al. November 3, 1 | 1998-11-03 |
Electron beam lithography apparatus having electron optics correction system
Grant 5,396,077 - Sohda , et al. March 7, 1 | 1995-03-07 |
Electron beam writing system
Grant 5,387,799 - Sohda , et al. February 7, 1 | 1995-02-07 |
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