Sogard; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sogard; Michael.The latest application filed is for "apparatus and methods for measuring thermally induced reticle distortion".

Company Profile

0.50.63

Sogard; Michael - Menlo Park CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus and methods for measuring thermally induced reticle distortion Grant 11,313,758 - Sogard April 26, 2	2022-04-26
Apparatus And Methods For Measuring Thermally Induced Reticle Distortion App 20200209104 - Sogard; Michael	2020-07-02
Illumination device for optimizing polarization in an illumination pupil Grant 10,690,317 - Smith , et al.	2020-06-23
Apparatus and methods for measuring thermally induced reticle distortion Grant 10,612,997 - Sogard	2020-04-07
Fluid gauges comprising multiple differential pressure sensors Grant 10,466,045 - Sogard No	2019-11-05
Apparatus And Methods For Measuring Thermally Induced Reticle Distortion App 20180266916 - Sogard; Michael	2018-09-20
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20180259860 - HAZELTON; Andrew J. ; et al.	2018-09-13
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 9,977,350 - Hazelton , et al. May 22, 2	2018-05-22
Apparatus and methods for measuring thermally induced reticle distortion Grant 9,976,930 - Sogard May 22, 2	2018-05-22
Illumination Device For Optimizing Polarization In An Illumination Pupil App 20170328538 - Smith; Daniel Gene ; et al.	2017-11-16
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20170235237 - HAZELTON; Andrew J. ; et al.	2017-08-17
Illumination device for optimizing polarization in an illumination pupil Grant 9,732,934 - Smith , et al. August 15, 2	2017-08-15
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 9,658,537 - Hazelton , et al. May 23, 2	2017-05-23
Apparatus and methods for reducing autofocus error Grant 9,513,460 - Sogard December 6, 2	2016-12-06
Apparatus And Methods For Measuring Thermally Induced Reticle Distortion App 20160341630 - Sogard; Michael	2016-11-24
Apparatus and methods for measuring thermally induced reticle distortion Grant 9,423,704 - Sogard August 23, 2	2016-08-23
Methods and devices for reducing errors in Goos-Hanchen corrections of displacement data Grant 9,335,159 - Sogard , et al. May 10, 2	2016-05-10
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20160085159 - HAZELTON; Andrew J. ; et al.	2016-03-24
Environmental system including a transport region for an immersion lithography apparatus Grant 9,244,363 - Novak , et al. January 26, 2	2016-01-26
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 9,244,362 - Hazelton , et al. January 26, 2	2016-01-26
Apparatus And Methods For Measuring Thermally Induced Reticle Distortion App 20150309418 - Sogard; Michael	2015-10-29
System and method for compensating instability in an autofocus system Grant 9,097,851 - Goodwin , et al. August 4, 2	2015-08-04
Apparatus and methods for measuring thermally induced reticle distortion Grant 8,994,918 - Sogard March 31, 2	2015-03-31
Methods And Devices For Reducing Errors In Goos-hanchen Corrections Of Displacement Data App 20150015896 - Sogard; Michael ; et al.	2015-01-15
Environmental System Including A Transport Region For An Immersion Lithography Apparatus App 20140354967 - NOVAK; W. Thomas ; et al.	2014-12-04
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20140320831 - HAZELTON; Andrew J. ; et al.	2014-10-30
Methods and devices for hybridization and binding assays using thermophoresis Grant 8,852,858 - Sogard October 7, 2	2014-10-07
Methods and devices for reducing errors in Goos-Hanchen corrections of displacement data Grant 8,842,296 - Sogard , et al. September 23, 2	2014-09-23
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,836,914 - Hazelton , et al. September 16, 2	2014-09-16
System And Method For Compensating Instability In An Autofocus System App 20140233011 - Goodwin; Eric Peter ; et al.	2014-08-21
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,810,768 - Hazelton , et al. August 19, 2	2014-08-19
Stroboscopic light source for a transmitter of a large scale metrology system Grant 8,711,335 - Sogard April 29, 2	2014-04-29
Apparatus And Methods For Reducing Autofocus Error App 20140036245 - Sogard; Michael	2014-02-06
Methods And Devices For Reducing Errors In Goos-hanchen Corrections Of Displacement Data App 20130293900 - Sogard; Michael ; et al.	2013-11-07
Fluid Gauges Comprising Multiple Differential Pressure Sensors App 20130211777 - Sogard; Michael	2013-08-15
Illumination Device for optimizing polarization in an illumination pupil App 20130148359 - Smith; Daniel Gene ; et al.	2013-06-13
Target For Large Scale Metrology System App 20130141735 - Sogard; Michael ; et al.	2013-06-06
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,456,610 - Hazelton , et al. June 4, 2	2013-06-04
Stroboscopic Light Source For A Transmitter Of A Large Scale Metrology System App 20130003042 - SOGARD; MICHAEL	2013-01-03
Environmental System Including Vacuum Scavenge For An Immersion Lithography Apparatus App 20120262684 - HAZELTON; Andrew J. ; et al.	2012-10-18
Dynamic fluid control system for immersion lithography Grant 8,194,229 - Sogard June 5, 2	2012-06-05
Apparatus And Methods For Measuring Thermally Induced Reticle Distortion App 20120099089 - Sogard; Michael	2012-04-26
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 8,089,610 - Hazelton , et al. January 3, 2	2012-01-03
Hybrid Electrostatic Chuck App 20110164343 - Sogard; Michael	2011-07-07
Measurement of EUV intensity Grant 7,916,274 - Sogard March 29, 2	2011-03-29
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20110037959 - Hazelton; Andrew J. ; et al.	2011-02-17
System and method for compensating instability in an autofocus system App 20100245829 - Goodwin; Eric Peter ; et al.	2010-09-30
System and Method Producing Data For Correcting Autofocus Error in An Imaging Optical System App 20100059657 - Smith; Daniel G. ; et al.	2010-03-11
Containment system for immersion fluid in an immersion lithography apparatus Grant 7,580,112 - Sogard August 25, 2	2009-08-25
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20090180096 - Hazelton; Andrew J. ; et al.	2009-07-16
Cooling assembly for a stage Grant 7,548,303 - Sogard June 16, 2	2009-06-16
Immersion fluid containment system and method for immersion lithogtraphy App 20090021706 - Sogard; Michael	2009-01-22
Dynamic fluid control system for immersion lithography App 20080309895 - Sogard; Michael	2008-12-18
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 7,456,930 - Hazelton , et al. November 25, 2	2008-11-25
Dynamic fluid control system for immersion lithography Grant 7,426,014 - Sogard September 16, 2	2008-09-16
Measurement of EUV intensity App 20080151221 - Sogard; Michael	2008-06-26
Autofocus Methods And Devices For Lithography App 20080111994 - Sogard; Michael	2008-05-15
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 7,355,676 - Sogard April 8, 2	2008-04-08
Autofocus methods and devices for lithography Grant 7,342,641 - Sogard March 11, 2	2008-03-11
Thermally insulated thermophoretic plate Grant 7,323,698 - Sogard January 29, 2	2008-01-29
Environmental system including vacuum scavenge for an immersion lithography apparatus Grant 7,321,415 - Hazelton , et al. January 22, 2	2008-01-22
Methods and devices for hybridization and binding assays using thermophoresis App 20080009071 - Sogard; Michael	2008-01-10
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20070247603 - Hazelton; Andrew J. ; et al.	2007-10-25
Using isotopically specified fluids as optical elements App 20070195302 - Sogard; Michael	2007-08-23
Dynamic fluid control system for immersion lithography App 20070177118 - Sogard; Michael	2007-08-02
Radiantly heated cathode for an electron gun and heating assembly Grant 7,250,618 - Sogard , et al. July 31, 2	2007-07-31
Methods and devices for hybridization and binding assays using thermophoresis Grant 7,244,611 - Sogard July 17, 2	2007-07-17
Using isotopically specified fluids as optical elements Grant 7,236,232 - Sogard June 26, 2	2007-06-26
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20070132974 - Hazelton; Andrew J. ; et al.	2007-06-14
Extreme ultraviolet reticle protection using gas flow thermophoresis App 20070121091 - Sogard; Michael	2007-05-31
Using isotopically specified fluids as optical elements Grant 7,224,435 - Sogard May 29, 2	2007-05-29
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20070103662 - Hazelton; Andrew J. ; et al.	2007-05-10
Using isotopically specified fluids as optical elements App 20070053090 - Sogard; Michael	2007-03-08
Containment system for immersion fluid in an immersion lithography apparatus App 20070046916 - Sogard; Michael	2007-03-01
Thermophoretic wand to protect front and back surfaces of an object Grant 7,162,881 - Sogard January 16, 2	2007-01-16
Autofocus methods and devices for lithography App 20060187434 - Sogard; Michael	2006-08-24
Radiantly heated cathode for an electron gun and heating assembly App 20060169928 - Sogard; Michael ; et al.	2006-08-03
Cleaning chuck in situ App 20060162739 - Sogard; Michael	2006-07-27
Methods and devices for hybridization and binding assays using thermophoresis App 20060134683 - Sogard; Michael	2006-06-22
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20060114435 - Hazelton; Andrew J. ; et al.	2006-06-01
Using isotopically specified fluids as optical elements App 20060092533 - Sogard; Michael	2006-05-04
Thermally insulated thermophoretic plate App 20060082742 - Sogard; Michael	2006-04-20
Extreme ultraviolet reticle protection using gas flow thermophoresis Grant 7,030,959 - Sogard April 18, 2	2006-04-18
Means of removing particles from a membrane mask in a vacuum App 20060077361 - Sogard; Michael	2006-04-13
Cooling assembly for a stage App 20060048363 - Sogard; Michael	2006-03-09
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20060033899 - Hazelton; Andrew J. ; et al.	2006-02-16
Environmental system including vacuum scavenge for an immersion lithography apparatus App 20060028632 - Hazelton; Andrew J. ; et al.	2006-02-09
Extreme Ultraviolet Reticle Protection Using Gas Flow Thermophoresis App 20060017895 - Sogard; Michael	2006-01-26
Deformable mirror actuation system Grant 6,989,922 - Phillips , et al. January 24, 2	2006-01-24
Method and apparatus for protecting an EUV reticle from particles App 20050275835 - Sogard, Michael	2005-12-15
Thermophoretic wand to protect front and back surfaces of an object App 20050223718 - Sogard, Michael	2005-10-13
Practical pseudo-asynchronous filter architecture Grant 6,925,478 - Jabbari , et al. August 2, 2	2005-08-02
System for correcting aberrations and distortions in EUV lithography Grant 6,897,940 - Sogard May 24, 2	2005-05-24
Minimizing thermal distortion effects on EUV mirror App 20050099611 - Sogard, Michael	2005-05-12
Periodic clamping method and apparatus to reduce thermal stress in a wafer Grant 6,734,117 - Sogard May 11, 2	2004-05-11
System for correcting aberrations and distortions in EUV lithography App 20040013956 - Sogard, Michael	2004-01-22
Deformable mirror actuation system App 20030234970 - Phillips, Alton ; et al.	2003-12-25
Gas cooled electrostatic pin chuck for vacuum applications Grant 6,628,503 - Sogard September 30, 2	2003-09-30
Periodic clamping method and apparatus to reduce thermal stress in a wafer App 20030176079 - Sogard, Michael	2003-09-18
Methods and devices for hybridization and binding assays using thermophoresis App 20030077599 - Sogard, Michael	2003-04-24
Lens assembly for electron beam column App 20020148971 - Sogard, Michael	2002-10-17
Gas cooled electrostatic pin chuck for vacuum applications App 20020130276 - Sogard, Michael	2002-09-19
Practical pseudo-asynchronous filter architecture App 20020120656 - Jabbari, Alireza ; et al.	2002-08-29
Air bearing assembly App 20020104453 - Lee, Martin ; et al.	2002-08-08
Apparatus and method for containing debris from laser plasma radiation sources App 20020090054 - Sogard, Michael	2002-07-11
Vacuum compatible, deformable electrostatic chuck with high thermal conductivity Grant 6,215,642 - Sogard April 10, 2	2001-04-10