Patent | Date |
---|
Substrate holder for use in a lithographic apparatus Grant 11,448,976 - Poiesz , et al. September 20, 2 | 2022-09-20 |
Method, Substrate And System For Estimating Stress In A Substrate App 20220113640 - POIESZ; Thomas ;   et al. | 2022-04-14 |
Method Of Clamping A Substrate To A Clamping System, A Substrate Holder And A Substrate Support App 20220082952 - SOETHOUDT; Abraham Alexander ;   et al. | 2022-03-17 |
Lithographic apparatus and a device manufacturing method Grant 11,269,259 - Poiesz , et al. March 8, 2 | 2022-03-08 |
Support Table For A Lithographic Apparatus, Method Of Loading A Substrate, Lithographic Apparatus And Device Manufacturing Method App 20210381548 - TROMP; Siegfried Alexander ;   et al. | 2021-12-09 |
Substrate holder, substrate support and method of clamping a substrate to a clamping system Grant 11,187,998 - Soethoudt , et al. November 30, 2 | 2021-11-30 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method Grant 11,098,759 - Tromp , et al. August 24, 2 | 2021-08-24 |
Substrate holder and a method of manufacturing a device Grant 11,086,234 - Poiesz , et al. August 10, 2 | 2021-08-10 |
Substrate, A Substrate Holder, A Substrate Coating Apparatus, A Method For Coating The Substrate And A Method For Removing The Coating App 20210223696 - ACHANTA; Satish ;   et al. | 2021-07-22 |
Substrate Holder For Use In A Lithographic Apparatus App 20210165334 - POIESZ; Thomas ;   et al. | 2021-06-03 |
Lithographic Apparatus And A Device Manufacturing Method App 20210072649 - Poiesz; Thomas ;   et al. | 2021-03-11 |
Lithographic apparatus and a device manufacturing method Grant 10,871,715 - Poiesz , et al. December 22, 2 | 2020-12-22 |
Substrate Holder, Substrate Support And Method Of Clamping A Substrate To A Clamping System App 20200326635 - SOETHOUDT; Abraham Alexander ;   et al. | 2020-10-15 |
Substrate Holder And A Method Of Manufacturing A Device App 20200292947 - POIESZ; Thomas ;   et al. | 2020-09-17 |
Lithographic Apparatus And A Device Manufacturing Method App 20200183289 - POIESZ; Thomas ;   et al. | 2020-06-11 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Grant 10,656,536 - Leenders , et al. | 2020-05-19 |
Support Table For A Lithographic Apparatus, Method Of Loading A Substrate, Lithographic Apparatus And Device Manufacturing Metho App 20200141445 - TROMP; Siegfried Alexander ;   et al. | 2020-05-07 |
Lithographic apparatus and method for loading a substrate Grant 10,599,053 - Soethoudt , et al. | 2020-03-24 |
Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method Grant 10,527,092 - Tromp , et al. J | 2020-01-07 |
Lithographic Apparatus And Method For Loading A Substrate App 20190339627 - SOETHOUDT; Abraham Alexander ;   et al. | 2019-11-07 |
Substrate holder, a lithographic apparatus and method of manufacturing devices Grant 10,453,734 - Poiesz , et al. Oc | 2019-10-22 |
Lithographic apparatus and method for loading a substrate Grant 10,353,303 - Soethoudt , et al. July 16, 2 | 2019-07-16 |
Lithographic Apparatus, Method For Unloading A Substrate And Method For Loading A Substrate App 20190043749 - JEUNINK; Andre Bernardus ;   et al. | 2019-02-07 |
Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20180190534 - POIESZ; Thomas ;   et al. | 2018-07-05 |
Lithographic Apparatus And Method For Loading A Substrate App 20180149983 - SOETHOUDT; Abraham Alexander ;   et al. | 2018-05-31 |
Support Table For A Lithographic Apparatus, Method Of Loading A Substrate, Lithographic Apparatus And Device Manufacturing Method App 20170292566 - TROMP; Siegfried Alexander ;   et al. | 2017-10-12 |
Substrate Support, Method For Loading A Substrate On A Substrate Support Location, Lithographic Apparatus And Device Manufacturing Method App 20170192359 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-07-06 |
Method and Apparatus for Loading a Substrate App 20130033691 - Soethoudt; Abraham Alexander | 2013-02-07 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus Grant 8,149,387 - Alberti , et al. April 3, 2 | 2012-04-03 |
Method of Placing a Substrate, Method of Transferring a Substrate, Support System and Lithographic Projection Apparatus App 20090180095 - ALBERTI; Jozef Augustinus Maria ;   et al. | 2009-07-16 |