Sobukawa; Hirosi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Sobukawa; Hirosi.The latest application filed is for "testing apparatus using charged particles and device manufacturing method using the testing apparatus".

Company Profile

0.50.54

Sobukawa; Hirosi - Kanagawa-ken JP
Sobukawa; Hirosi - Tokyo N/A JP
Sobukawa; Hirosi - Zama JP
Sobukawa; Hirosi - Zama-shi JP
Sobukawa; Hirosi - Ohta-ku JP
Sobukawa; Hirosi - Kanagawa N/A JP
Sobukawa; Hirosi - Isehara-shi JP
Sobukawa; Hirosi - Isehara JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 9,406,480 - Noji , et al. August 2, 2	2016-08-02
Electro-optical inspection apparatus using electron beam Grant 9,390,886 - Nakasuji , et al. July 12, 2	2016-07-12
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 9,368,314 - Nakasuji , et al. June 14, 2	2016-06-14
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20150122993 - Noji; Nobuharu ; et al.	2015-05-07
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,946,631 - Noji , et al. February 3, 2	2015-02-03
Substrate Inspection Method And A Substrate Processing Method App 20140367570 - Kimba; Toshifumi ; et al.	2014-12-18
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140319346 - Nakasuji; Mamoru ; et al.	2014-10-30
Method and apparatus for inspecting sample surface Grant 8,859,984 - Noji , et al. October 14, 2	2014-10-14
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 8,822,919 - Kimba , et al. September 2, 2	2014-09-02
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,803,103 - Nakasuji , et al. August 12, 2	2014-08-12
Testing Apparatus Using Charged Particles And Device Manufacturing Method Using The Testing Apparatus App 20140158885 - Noji; Nobuharu ; et al.	2014-06-12
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 8,742,341 - Noji , et al. June 3, 2	2014-06-03
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20140034831 - Nakasuji; Mamoru ; et al.	2014-02-06
Method And Apparatus For Inspecting Sample Surface App 20130313429 - Noji; Nobuharu ; et al.	2013-11-28
Method and apparatus for inspecting sample surface Grant 8,525,127 - Noji , et al. September 3, 2	2013-09-03
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,368,031 - Nakasuji , et al. February 5, 2	2013-02-05
Method And Apparatus For Inspecting Sample Surface App 20120145921 - Noji; Nobuharu ; et al.	2012-06-14
Inspection System By Charged Particle Beam And Method Of Manufacturing Devices Using The System App 20120032079 - Nakasuji; Mamoru ; et al.	2012-02-09
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 8,053,726 - Nakasuji , et al. November 8, 2	2011-11-08
Apparatus and method for inspecting sample surface Grant 7,952,071 - Noji , et al. May 31, 2	2011-05-31
Apparatus For Inspection With Electron Beam, Method For Operating Same, And Method For Manufacturing Semiconductor Device Using Former App 20110104830 - Kimba; Toshifumi ; et al.	2011-05-05
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,928,378 - Kimba , et al. April 19, 2	2011-04-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,888,642 - Nakasuji , et al. February 15, 2	2011-02-15
Electron beam apparatus and an aberration correction optical apparatus Grant 7,863,580 - Hatakeyama , et al. January 4, 2	2011-01-04
Sheet beam-type testing apparatus Grant 7,829,871 - Nakasuji , et al. November 9, 2	2010-11-09
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20100237243 - Noji; Nobuharu ; et al.	2010-09-23
Electron Beam Apparatus App 20100213370 - Nakasuji; Mamoru ; et al.	2010-08-26
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,745,784 - Nakasuji , et al. June 29, 2	2010-06-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,741,601 - Noji , et al. June 22, 2	2010-06-22
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,601,972 - Nakasuji , et al. October 13, 2	2009-10-13
Projection Electron Beam Apparatus And Defect Inspection System Using The Apparatus App 20090212213 - Nakasuji; Mamoru ; et al.	2009-08-27
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,569,838 - Watanabe , et al. August 4, 2	2009-08-04
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20090101816 - Noji; Nobuharu ; et al.	2009-04-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20090050822 - Nakasuji; Mamoru ; et al.	2009-02-26
Method And Apparatus For Inspecting Sample Surface App 20090050802 - Noji; Nobuharu ; et al.	2009-02-26
Electron Beam Apparatus And Method Of Manufacturing Semiconductor Device Using The Apparatus App 20090039262 - NAKASUJI; Mamoru ; et al.	2009-02-12
Inspection system by charged particle beam and method of manufacturing devices using the system App 20090032708 - Nakasuji; Mamoru ; et al.	2009-02-05
Apparatus And Method For Inspecting Sample Surface App 20090026368 - Noji; Nobuharu ; et al.	2009-01-29
Electron Beam Apparatus App 20090014649 - Nakasuji; Mamoru ; et al.	2009-01-15
Objective lens, electron beam system and method of inspecting defect App 20080315090 - Nakasuji; Mamoru ; et al.	2008-12-25
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20080308729 - Kimba; Toshifumi ; et al.	2008-12-18
Sheet Beam-type Testing Apparatus App 20080302963 - NAKASUJI; Mamoru ; et al.	2008-12-11
Electron beam apparatus and device production method using the electron beam apparatus Grant 7,439,502 - Nakasuji , et al. October 21, 2	2008-10-21
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,423,267 - Nakasuji , et al. September 9, 2	2008-09-09
Objective lens, electron beam system and method of inspecting defect Grant 7,420,164 - Nakasuji , et al. September 2, 2	2008-09-02
Sheet beam-type testing apparatus Grant 7,417,236 - Nakasuji , et al. August 26, 2	2008-08-26
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,408,175 - Kimba , et al. August 5, 2	2008-08-05
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20080173814 - Watanabe; Kenji ; et al.	2008-07-24
Electron beam apparatus and device production method using the electron beam apparatus App 20080173815 - Nakasuji; Mamoru ; et al.	2008-07-24
Electron beam apparatus and a device manufacturing method using the same apparatus Grant 7,385,197 - Nakasuji , et al. June 10, 2	2008-06-10
Method for inspecting substrate, substrate inspecting system and electron App 20080121804 - Nakasuji; Mamoru ; et al.	2008-05-29
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,365,324 - Noji , et al. April 29, 2	2008-04-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 7,351,969 - Watanabe , et al. April 1, 2	2008-04-01
Electron Beam Apparatus And An Aberration Correction Optical Apparatus App 20080067377 - Hatakeyama; Masahiro ; et al.	2008-03-20
Inspection system by charged particle beam and method of manufacturing devices using the system App 20080042060 - Nakasuji; Mamoru ; et al.	2008-02-21
Electron beam apparatus and device production method using the electron beam apparatus App 20070272859 - Nakasuji; Mamoru ; et al.	2007-11-29
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,297,949 - Nakasuji , et al. November 20, 2	2007-11-20
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20070194235 - Kimba; Toshifumi ; et al.	2007-08-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,247,848 - Nakasuji , et al. July 24, 2	2007-07-24
Electron beam apparatus and device fabrication method using the electron beam apparatus Grant 7,244,932 - Nakasuji , et al. July 17, 2	2007-07-17
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,241,993 - Nakasuji , et al. July 10, 2	2007-07-10
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 7,223,973 - Kimba , et al. May 29, 2	2007-05-29
Inspection system by charged particle beam and method of manufacturing devices using the system App 20070057186 - Nakasuji; Mamoru ; et al.	2007-03-15
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20070045536 - Nakasuji; Mamoru ; et al.	2007-03-01
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20070018101 - Nakasuji; Mamoru ; et al.	2007-01-25
Testing apparatus using charged particles and device manufacturing method using the testing apparatus Grant 7,138,629 - Noji , et al. November 21, 2	2006-11-21
Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,135,676 - Nakasuji , et al. November 14, 2	2006-11-14
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,129,485 - Nakasuji , et al. October 31, 2	2006-10-31
Sheet beam-type inspection apparatus Grant 7,109,484 - Nakasuji , et al. September 19, 2	2006-09-19
Method for inspecting substrate, substrate inspecting system and electron beam apparatus Grant 7,109,483 - Nakasuji , et al. September 19, 2	2006-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 7,095,022 - Nakasuji , et al. August 22, 2	2006-08-22
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20060169900 - Noji; Nobuharu ; et al.	2006-08-03
Sheet beam-type testing apparatus App 20060138343 - Nakasuji; Mamoru ; et al.	2006-06-29
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20060118719 - Watanabe; Kenji ; et al.	2006-06-08
Sheet beam-type testing apparatus Grant 7,049,585 - Nakasuji , et al. May 23, 2	2006-05-23
Stage device and angle detecting device Grant 7,025,005 - Shinozaki , et al. April 11, 2	2006-04-11
Electron beam inspection system and inspection method and method of manufacturing devices using the system Grant 6,992,290 - Watanabe , et al. January 31, 2	2006-01-31
Electron beam apparatus and a device manufacturing method using the same apparatus App 20060016989 - Nakasuji; Mamoru ; et al.	2006-01-26
Objective lens, electron beam system and method of inspecting defect App 20050263715 - Nakasuji, Mamoru ; et al.	2005-12-01
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20050121611 - Kimba, Toshifumi ; et al.	2005-06-09
Sheet beam-type inspection apparatus App 20050092921 - Nakasuji, Mamoru ; et al.	2005-05-05
Testing apparatus using charged particles and device manufacturing method using the testing apparatus App 20050045821 - Noji, Nobuharu ; et al.	2005-03-03
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former Grant 6,855,929 - Kimba , et al. February 15, 2	2005-02-15
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20040183013 - Nakasuji, Mamoru ; et al.	2004-09-23
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20030207475 - Nakasuji, Mamoru ; et al.	2003-11-06
Stage device and angle detecting device App 20030136309 - Shinozaki, Hiroyuki ; et al.	2003-07-24
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus Grant 6,593,152 - Nakasuji , et al. July 15, 2	2003-07-15
Charged particle beam control system and charge partical beam optical apparatus using the system App 20030030008 - Sobukawa, Hirosi ; et al.	2003-02-13
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former App 20020148975 - Kimba, Toshifumi ; et al.	2002-10-17
Electron beam apparatus and device production method using the electron beam apparatus App 20020148961 - Nakasuji, Mamoru ; et al.	2002-10-17
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020142496 - Nakasuji, Mamoru ; et al.	2002-10-03
Method for inspecting substrate, substrate inspecting system and electron beam apparatus App 20020130262 - Nakasuji, Mamoru ; et al.	2002-09-19
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus App 20020109090 - Nakasuji, Mamoru ; et al.	2002-08-15
Electron beam inspection system and inspection method and method of manufacturing devices using the system App 20020088940 - Watanabe, Kenji ; et al.	2002-07-11
Sheet beam-type inspection apparatus App 20020036264 - Nakasuji, Mamoru ; et al.	2002-03-28
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020033449 - Nakasuji, Mamoru ; et al.	2002-03-21
Inspection system by charged particle beam and method of manufacturing devices using the system App 20020028399 - Nakasuji, Mamoru ; et al.	2002-03-07