Sobukawa; Hiroshi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sobukawa; Hiroshi.The latest application filed is for "method for polishing substrate including functional chip".
- Sobukawa; Hiroshi - Tokyo JP
- Sobukawa; Hiroshi - Zama JP
- Sobukawa; Hiroshi - Zama-shi JP
- Sobukawa; Hiroshi - Fujisawa JP
- Sobukawa; Hiroshi - Kanagawa JP
| Patent | Date |
|---|---|
| Magnetic levitated pump Grant 10,995,765 - Sato , et al. May 4, 2 | 2021-05-04 |
| Method For Polishing Substrate Including Functional Chip App 20200391341 - TOGAWA; Tetsuji ; et al. | 2020-12-17 |
| Polishing Apparatus Of Substrate App 20200130131 - Togawa; Tetsuji ; et al. | 2020-04-30 |
| Magnetic Levitated Pump App 20160131141 - SATO; Ichiju ; et al. | 2016-05-12 |
| Electro-optical inspection apparatus and method with dust or particle collection function Grant 9,105,444 - Watanabe , et al. August 11, 2 | 2015-08-11 |
| Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20140091215 - WATANABE; Kenji ; et al. | 2014-04-03 |
| Electro-optical inspection apparatus and method with dust or particle collection function Grant 8,624,182 - Watanabe , et al. January 7, 2 | 2014-01-07 |
| Vacuum Evacuation Apparatus App 20130259712 - Kawasaki; Hiroyuki ; et al. | 2013-10-03 |
| Extreme ultraviolet light source apparatus Grant 8,530,869 - Nagai , et al. September 10, 2 | 2013-09-10 |
| Electro-optical Inspection Apparatus And Method With Dust Or Particle Collection Function App 20120074316 - WATANABE; Kenji ; et al. | 2012-03-29 |
| Turbo vacuum pump Grant 8,109,744 - Kawasaki , et al. February 7, 2 | 2012-02-07 |
| Electron beam apparatus Grant 8,067,732 - Nakasuji , et al. November 29, 2 | 2011-11-29 |
| Extreme Ultraviolet Light Source Apparatus App 20110266468 - NAGAI; Shinji ; et al. | 2011-11-03 |
| Extreme ultraviolet light source apparatus Grant 8,003,963 - Nagai , et al. August 23, 2 | 2011-08-23 |
| Extreme Ultraviolet Light Source Apparatus App 20100108918 - Nagai; Shinji ; et al. | 2010-05-06 |
| Turbo Vacuum Pump App 20090246038 - KAWASAKI; Hiroyuki ; et al. | 2009-10-01 |
| Electron Beam Apparatus App 20090218506 - Nakasuji; Mamoru ; et al. | 2009-09-03 |
| Inspection system by charged particle beam and method of manufacturing devices using the system Grant 7,411,191 - Nakasuji , et al. August 12, 2 | 2008-08-12 |
| Inspection system by charged particle beam and method of manufacturing devices using the same App 20070235644 - Nakasuji; Mamoru ; et al. | 2007-10-11 |
| Processing method utilizing an apparatus to be sealed against workpiece Grant 7,098,045 - Noji , et al. August 29, 2 | 2006-08-29 |
| Processing method utilizing an apparatus to be sealed against workpiece App 20050145171 - Noji, Nobuharu ; et al. | 2005-07-07 |
| Processing apparatus to be sealed against workpiece Grant 6,869,890 - Noji , et al. March 22, 2 | 2005-03-22 |
| Turbo-molecular pump App 20030017047 - Shiokawa, Atsushi ; et al. | 2003-01-23 |
| Processing apparatus and method for processing workpiece App 20020088399 - Noji, Nobuharu ; et al. | 2002-07-11 |
| Turbo-molecular pump App 20020054815 - Kawasaki, Hiroyuki ; et al. | 2002-05-09 |
| Vacuum exhaust system Grant 6,382,249 - Kawasaki , et al. May 7, 2 | 2002-05-07 |
| Turbo-molecular pump Grant 6,343,910 - Kawasaki , et al. February 5, 2 | 2002-02-05 |
| Evacuation apparatus and evacuation method Grant RE36,610 - Okumura , et al. March 14, 2 | 2000-03-14 |
| Turbomolecular pump and method of operating the same Grant 4,926,648 - Okumura , et al. May 22, 1 | 1990-05-22 |
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