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Method for simultaneous modification of multiple semiconductor device features
Grant 10,217,704 - Shul , et al. Feb | 2019-02-26 |
Integrating impact switch
Grant 8,507,813 - Christenson , et al. August 13, 2 | 2013-08-13 |
Integrating Impact Switch
App 20120211336 - Christenson; Todd Richard ; et al. | 2012-08-23 |
Micromachined cutting blade formed from {211}-oriented silicon
Grant 7,992,309 - Fleming , et al. August 9, 2 | 2011-08-09 |
Glaucoma implant having MEMS flow module with flexing diaphragm for pressure regulation
Grant 7,544,176 - Rodgers , et al. June 9, 2 | 2009-06-09 |
Filter Assembly With Microfabricated Filter Element
App 20090131851 - Sniegowski; Jeffry J. ; et al. | 2009-05-21 |
MEMS Flow Module with Filtration and Pressure Regulation Capabilities
App 20090093781 - Sniegowski; Jeffry J. ; et al. | 2009-04-09 |
Implant having MEMS Flow Module with Movable, Flow-Controlling Baffle
App 20080221500 - Sniegowski; Jeffry J. ; et al. | 2008-09-11 |
Glaucoma implant having MEMS filter module
Grant 7,384,550 - Rodgers , et al. June 10, 2 | 2008-06-10 |
Implant having MEMS flow module with movable, flow-controlling baffle
Grant 7,364,564 - Sniegowski , et al. April 29, 2 | 2008-04-29 |
MEMS filter module
Grant 7,226,540 - Rodgers , et al. June 5, 2 | 2007-06-05 |
Glaucoma implant having MEMS flow module with flexing diaphragm for pressure regulation
App 20070004998 - Rodgers; M. Steven ; et al. | 2007-01-04 |
MEMS flow module with piston-type pressure regulating structure
App 20060206049 - Rodgers; M. Steven ; et al. | 2006-09-14 |
MEMS flow module with pivoting-type baffle
App 20060173399 - Rodgers; M. Steven ; et al. | 2006-08-03 |
System and method for treating glaucoma
App 20060036207 - Koonmen; James P. ; et al. | 2006-02-16 |
Implant having MEMS flow module with movable, flow-controlling baffle
App 20050197613 - Sniegowski, Jeffry J. ; et al. | 2005-09-08 |
Filter assembly with microfabricated filter element
App 20050197653 - Sniegowski, Jeffry J. ; et al. | 2005-09-08 |
MEMS flow module with filtration and pressure regulation capabilities
App 20050194303 - Sniegowski, Jeffry J. ; et al. | 2005-09-08 |
MEMS filter module
App 20050184003 - Rodgers, M. Steven ; et al. | 2005-08-25 |
Glaucoma implant having MEMS filter module
App 20050184004 - Rodgers, M. Steven ; et al. | 2005-08-25 |
Method for making a microstructure by surface micromachining
App 20050059184 - Sniegowski, Jeffry J. ; et al. | 2005-03-17 |
Process for fabricating a microelectromechanical structure
Grant 6,808,952 - Sniegowski , et al. October 26, 2 | 2004-10-26 |
Surface micromachined optical system with reinforced mirror microstructure
Grant 6,791,730 - Sniegowski , et al. September 14, 2 | 2004-09-14 |
Surface micromachined optical system with reinforced mirror microstructure
Grant 6,778,306 - Sniegowski , et al. August 17, 2 | 2004-08-17 |
Surface micromachined optical system with reinforced mirror microstructure
Grant 6,778,305 - Sniegowski , et al. August 17, 2 | 2004-08-17 |
Microelectromechanical apparatus for elevating and tilting a platform
Grant 6,759,787 - Miller , et al. July 6, 2 | 2004-07-06 |
Method for making a microstructure by surface micromachining
Grant 6,756,317 - Sniegowski , et al. June 29, 2 | 2004-06-29 |
Surface-micromachined rotatable member having a low-contact-area hub
Grant 6,649,947 - Rodgers , et al. November 18, 2 | 2003-11-18 |
Micromachined cutting blade formed from {211}-oriented silicon
App 20030208911 - Fleming, James G. ; et al. | 2003-11-13 |
Surface micromachined optical system with reinforced mirror microstructure
App 20030210446 - Sniegowski, Jeffry J. ; et al. | 2003-11-13 |
Surface micromachined optical system with reinforced mirror microstructure
App 20030210447 - Sniegowski, Jeffry J. ; et al. | 2003-11-13 |
Surface micromachined optical system with reinforced mirror microstructure
App 20030210481 - Sniegowski, Jeffry J. ; et al. | 2003-11-13 |
Micromachined cutting blade formed from {211}-oriented silicon
Grant 6,615,496 - Fleming , et al. September 9, 2 | 2003-09-09 |
Surface micromachined optical system with reinforced mirror microstructure
Grant 6,600,587 - Sniegowski , et al. July 29, 2 | 2003-07-29 |
Microelectromechanical apparatus for elevating and tilting a platform
Grant 6,545,385 - Miller , et al. April 8, 2 | 2003-04-08 |
Microelectromechanical apparatus for elevating and tilting a platform
App 20020171327 - Miller, Samuel Lee ; et al. | 2002-11-21 |
Surface micromachined optical system with reinforced mirror microstructure
App 20020154422 - Sniegowski, Jeffry J. ; et al. | 2002-10-24 |
Method for making a microstructure by surface micromachining
App 20020155717 - Sniegowski, Jeffry J. ; et al. | 2002-10-24 |
Surface-micromachined rotatable member having a low-contact-area hub
App 20020096018 - Rodgers, M. Steven ; et al. | 2002-07-25 |
Microelectromechanical apparatus for elevating and tilting a platform
App 20010048265 - Miller, Samuel Lee ; et al. | 2001-12-06 |
Tungsten coating for improved wear resistance and reliability of microelectromechanical devices
Grant 6,290,859 - Fleming , et al. September 18, 2 | 2001-09-18 |
Use of silicon oxynitride as a sacrificial material for microelectromechanical devices
Grant 6,174,820 - Habermehl , et al. January 16, 2 | 2001-01-16 |
Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed
Grant 6,082,208 - Rodgers , et al. July 4, 2 | 2000-07-04 |
Monocrystalline test and reference structures, and use for calibrating instruments
Grant 5,920,067 - Cresswell , et al. July 6, 1 | 1999-07-06 |
Use of chemical mechanical polishing in micromachining
Grant 5,804,084 - Nasby , et al. September 8, 1 | 1998-09-08 |
Method for integrating microelectromechanical devices with electronic circuitry
Grant 5,798,283 - Montague , et al. August 25, 1 | 1998-08-25 |
Micromechanism linear actuator with capillary force sealing
Grant 5,649,423 - Sniegowski July 22, 1 | 1997-07-22 |
Microfabricated microengine for use as a mechanical drive and power source in the microdomain and fabrication process
Grant 5,631,514 - Garcia , et al. May 20, 1 | 1997-05-20 |
Micro-machined resonator oscillator
Grant 5,339,051 - Koehler , et al. August 16, 1 | 1994-08-16 |
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