Smorenburg; Petrus Wilhelmus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smorenburg; Petrus Wilhelmus.The latest application filed is for "illumination source for an inspection apparatus, inspection apparatus and inspection method".

Company Profile

12.9.9

Smorenburg; Petrus Wilhelmus - Veldhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 11,347,155 - O Dwyer , et al. May 31, 2	2022-05-31
High harmonic generation radiation source Grant 11,223,181 - Smorenburg , et al. January 11, 2	2022-01-11
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20210191274 - O DWYER; David ; et al.	2021-06-24
Methods and apparatus for metrology Grant 10,996,568 - Smorenburg , et al. May 4, 2	2021-05-04
Methods and Apparatus for Metrology App 20200201192 - SMORENBURG; Petrus Wilhelmus ; et al.	2020-06-25
Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate Grant 10,670,974 - Brussaard , et al.	2020-06-02
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,642,172 - O Dwyer , et al.	2020-05-05
Apparatus for delivering gas and illumination source for generating high harmonic radiation Grant 10,630,037 - Srivastava , et al.	2020-04-21
High Harmonic Generation Radiation Source App 20200067258 - Smorenburg; Petrus Wilhelmus ; et al.	2020-02-27
Apparatus for delivering gas and illumination source for generating high harmonic radiation Grant 10,530,111 - Srivastava , et al. J	2020-01-07
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20190346776 - O DWYER; David ; et al.	2019-11-14
Free electron laser Grant 10,381,796 - Smorenburg , et al. A	2019-08-13
Methods and apparatus for optical metrology Grant 10,362,665 - Smorenburg , et al. July 23, 2	2019-07-23
Apparatus For Delivering Gas and Illumination Source for Generating High Harmonic Radiation App 20190212657 - SRIVASTAVA; Sudhir ; et al.	2019-07-11
Metrology Apparatus for and a Method of Determining a Characteristic of Interest of a Structure on a Substrate App 20190204757 - BRUSSAARD; Gerrit Jacobus Hendrik ; et al.	2019-07-04
Free Electron Laser App 20180366899 - SMORENBURG; Petrus Wilhelmus ; et al.	2018-12-20
Methods and Apparatus for Optical Metrology App 20180368243 - SMORENBURG; Petrus Wilhelmus ; et al.	2018-12-20
Apparatus For Delivering Gas and Illumination Source for Generating High Harmonic Radiation App 20180267411 - SRIVASTAVA; Sudhir ; et al.	2018-09-20

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