loadpatents
Patent applications and USPTO patent grants for Smits; Peter.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 8,860,926 - Hennus , et al. October 14, 2 | 2014-10-14 |
Lithographic apparatus and device manufacturing method Grant 8,481,978 - Jansen , et al. July 9, 2 | 2013-07-09 |
Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing Grant 8,390,778 - Smulders , et al. March 5, 2 | 2013-03-05 |
Lithographic apparatus and device manufacturing method Grant 8,269,949 - Vermeulen , et al. September 18, 2 | 2012-09-18 |
Lithographic apparatus and device manufacturing method Grant 8,138,486 - Jansen , et al. March 20, 2 | 2012-03-20 |
Lithographic apparatus and device manufacturing method Grant 8,115,905 - Hennus , et al. February 14, 2 | 2012-02-14 |
Lithographic Apparatus And Device Manufacturing Method App 20120008114 - HENNUS; Pieter Renaat Maria ;   et al. | 2012-01-12 |
Lithographic Apparatus And Device Manufacturing Method App 20110183257 - JANSEN; Hans ;   et al. | 2011-07-28 |
Lithographic Apparatus And Device Manufacturing Method App 20110090474 - JANSEN; Hans ;   et al. | 2011-04-21 |
Lithographic apparatus and device manufacturing method Grant 7,928,407 - Jansen , et al. April 19, 2 | 2011-04-19 |
Substrate support and lithographic process Grant 7,791,709 - Hennus , et al. September 7, 2 | 2010-09-07 |
Lithographic Apparatus, Device Manufacturing Method, Seal Structure, Method Of Removing An Object And A Method Of Sealing App 20100182578 - Smulders; Patrick Johannes Cornelus Hendrik ;   et al. | 2010-07-22 |
Lithographic apparatus with mounted sensor Grant 7,755,742 - Cornelissen , et al. July 13, 2 | 2010-07-13 |
Lithographic Apparatus And Device Manufacturing Method App 20100085551 - VERMEULEN; Marcus Martinus Petrus Adrianus ;   et al. | 2010-04-08 |
Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing Grant 7,684,010 - Smulders , et al. March 23, 2 | 2010-03-23 |
Lithographic Apparatus And Device Manufacturing Method App 20100044593 - JANSEN; Hans ;   et al. | 2010-02-25 |
Lithographic apparatus and device manufacturing method Grant 7,633,073 - Jansen , et al. December 15, 2 | 2009-12-15 |
Lithographic Apparatus And Device Manufacturing Method App 20090279064 - DONDERS; Sjoerd Nicolaas Lambertus ;   et al. | 2009-11-12 |
Lithographic apparatus and device manufacturing method Grant 7,583,357 - Donders , et al. September 1, 2 | 2009-09-01 |
Lithographic apparatus and device manufacturing method App 20080174752 - HENNUS; PIETER RENAAT MARIA ;   et al. | 2008-07-24 |
Substrate support and lithographic process App 20080158526 - Hennus; Pieter Renaat Maria ;   et al. | 2008-07-03 |
Lithographic apparatus and device manufacturing method App 20080137055 - Hennus; Pieter Renaat Maria ;   et al. | 2008-06-12 |
Lithographic apparatus and device manufacturing method Grant 7,365,827 - Hennus , et al. April 29, 2 | 2008-04-29 |
Lithographic apparatus and device manufacturing method App 20070114451 - Jansen; Hans ;   et al. | 2007-05-24 |
Lithographic apparatus and device manufacturing method App 20070114452 - Jansen; Hans ;   et al. | 2007-05-24 |
Lithographic apparatus App 20070081141 - Cornelissen; Sebastiaan Maria Johannes ;   et al. | 2007-04-12 |
Lithographic apparatus, device manufacturing method, seal structure, method of removing an object and a method of sealing App 20060203215 - Hendrik Smulders; Patrick Johannes Cornelus ;   et al. | 2006-09-14 |
Lithographic apparatus and device manufacturing method App 20060119817 - Maria Hennus; Pieter Renaat ;   et al. | 2006-06-08 |
Lithographic apparatus and device manufacturing method App 20060103820 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2006-05-18 |
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