Smith; Walter Lee
Patent Applications and Registrations
Patent applications and USPTO patent grants for Smith; Walter Lee.The latest application filed is for "modulated scatterometry".
- Smith; Walter Lee - Danville CA US
- Smith; Walter Lee - Livermore CA
| Patent | Date |
|---|---|
| Evolution of library data sets Grant 8,543,557 - Aikens , et al. September 24, 2 | 2013-09-24 |
| Modulated scatterometry Grant 7,400,402 - Smith July 15, 2 | 2008-07-15 |
| Modulated scatterometry App 20070188762 - Smith; Walter Lee | 2007-08-16 |
| Modulated scatterometry Grant 7,239,390 - Smith July 3, 2 | 2007-07-03 |
| Combination optical and electrical metrology apparatus Grant 6,982,567 - Smith January 3, 2 | 2006-01-03 |
| Scatterometry for junction metrology Grant 6,950,190 - Smith September 27, 2 | 2005-09-27 |
| Evolution of library data sets App 20050182592 - Aikens, David M. ; et al. | 2005-08-18 |
| Modulated scatterometry App 20050168759 - Smith, Walter Lee | 2005-08-04 |
| Evolution of library data sets Grant 6,898,596 - Aikens , et al. May 24, 2 | 2005-05-24 |
| Modulated scatterometry Grant 6,888,632 - Smith May 3, 2 | 2005-05-03 |
| Combination optical and electrical metrology apparatus App 20040207427 - Smith, Walter Lee | 2004-10-21 |
| Systems and methods for improved metrology using combined optical and electrical measurements Grant 6,791,310 - Smith September 14, 2 | 2004-09-14 |
| Modulated scatterometry App 20040169859 - Smith, Walter Lee | 2004-09-02 |
| Scatterometry for junction metrology App 20040136003 - Smith, Walter Lee | 2004-07-15 |
| Evolution of library data sets App 20030076511 - Aikens, David M. ; et al. | 2003-04-24 |
| Combination optical and electrical metrology apparatus App 20020186036 - Smith, Walter Lee | 2002-12-12 |
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