Smith; Patricia Beauregard

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smith; Patricia Beauregard.The latest application filed is for "n2 based plasma treatment for enhanced sidewall smoothing and pore sealing of porous low-k dielectric films".

Company Profile

0.5.7

Smith; Patricia Beauregard - Colleyville TX

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
N2 based plasma treatment for enhanced sidewall smoothing and pore sealing of porous low-k dielectric films Grant 7,910,936 - Ajmera , et al. March 22, 2	2011-03-22
N2 Based Plasma Treatment For Enhanced Sidewall Smoothing And Pore Sealing Of Porous Low-k Dielectric Films App 20090115030 - Ajmera; Sameer Kumar ; et al.	2009-05-07
N.sub.2 based plasma treatment for enhanced sidewall smoothing and pore sealing porous low-k dielectric films Grant 7,476,602 - Ajmera , et al. January 13, 2	2009-01-13
Hydrogen and oxygen based photoresist removal process Grant 7,413,994 - Smith , et al. August 19, 2	2008-08-19
Method for removing residue containing an embedded metal App 20070184666 - Smith; Patricia Beauregard ; et al.	2007-08-09
Hydrogen and oxygen based photoresist removal process App 20060281312 - Smith; Patricia Beauregard ; et al.	2006-12-14
Semiconductor devices and methods of manufacturing such semiconductor devices Grant 7,101,788 - Smith , et al. September 5, 2	2006-09-05
N2 based plasma treatment for enhanced sidewall smoothing and pore sealing porous low-k dielectric films App 20060172552 - Ajmera; Sameer Kumar ; et al.	2006-08-03
Post-etch clean process for porous low dielectric constant materials App 20050045206 - Smith, Patricia Beauregard ; et al.	2005-03-03
Methods for polymer removal following etch-stop layer etch Grant 6,713,402 - Smith , et al. March 30, 2	2004-03-30
Methods for polymer removal following etch-stop layer etch App 20030224595 - Smith, Patricia Beauregard ; et al.	2003-12-04
Semiconductor devices and methods of manufacturing such semiconductor devices App 20030162384 - Smith, Patricia Beauregard ; et al.	2003-08-28

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