Smith; Nigel P.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smith; Nigel P..The latest application filed is for "sample surface polarization modification in interferometric defect inspection".

Company Profile

6.18.17

Smith; Nigel P. - Beaverton OR
Smith; Nigel P. - Hillsboro CA
Smith; Nigel P. - Munich N/A DE
Smith; Nigel P. - Hsinchu TW
Smith; Nigel P. - Winsford GB2

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Sample surface polarization modification in interferometric defect inspection Grant 11,150,195 - Smith October 19, 2	2021-10-19
Sample Surface Polarization Modification In Interferometric Defect Inspection App 20210088453 - SMITH; Nigel P.	2021-03-25
Sample inspection using topography Grant 10,937,705 - Smith , et al. March 2, 2	2021-03-02
Sub-resolution defect detection Grant 10,935,501 - Smith March 2, 2	2021-03-02
Interferometer with pixelated phase shift mask Grant 10,830,709 - Smith November 10, 2	2020-11-10
Interferometer With Pixelated Phase Shift Mask App 20200103355 - SMITH; Nigel P.	2020-04-02
Sample Inspection Using Topography App 20190304851 - SMITH; Nigel P. ; et al.	2019-10-03
Sub-resolution Defect Detection App 20190170655 - Smith; Nigel P.	2019-06-06
Scanning white-light interferometry system for characterization of patterned semiconductor features Grant 10,288,408 - Smith , et al.	2019-05-14
Image based overlay measurement with finite gratings Grant 10,107,621 - Smith October 23, 2	2018-10-23
Scanning White-light Interferometry System For Characterization Of Patterned Semiconductor Features App 20180156597 - Smith; Nigel P. ; et al.	2018-06-07
Diffraction based overlay linearity testing Grant 9,239,523 - Li , et al. January 19, 2	2016-01-19
Electronic device and method for providing a digital signal at a level shifter output Grant 8,674,744 - Smith , et al. March 18, 2	2014-03-18
Image Based Overlay Measurement With Finite Gratings App 20130208279 - Smith; Nigel P.	2013-08-15
Electronic Device And Method For Providing A Digital Signal At A Level Shifter Output App 20130113540 - Smith; Nigel P. ; et al.	2013-05-09
Level shifter for use in LCD display applications Grant 8,390,556 - Smith , et al. March 5, 2	2013-03-05
Multilayer alignment and overlay target and measurement method Grant 8,339,605 - Ausschnitt , et al. December 25, 2	2012-12-25
Multi layer alignment and overlay target and measurement method Grant 8,107,079 - Ausschnitt , et al. January 31, 2	2012-01-31
Diffraction Based Overlay Linearity Testing App 20110238365 - Li; Jie ; et al.	2011-09-29
Level Shifter For Use In Lcd Display Applications App 20110193839 - Smith; Nigel P. ; et al.	2011-08-11
Multilayer Alignment And Overlay Target And Measurement Method App 20110069314 - Ausschnitt; Christopher P. ; et al.	2011-03-24
Multi Layer Alignment And Overlay Target And Measurement Method App 20110058170 - Ausschnitt; Christopher P. ; et al.	2011-03-10
Multi layer alignment and overlay target and measurement method Grant 7,876,439 - Ausschnitt , et al. January 25, 2	2011-01-25
Determining overlay error using an in-chip overlay target Grant 7,808,643 - Smith , et al. October 5, 2	2010-10-05
Imaging Diffraction Based Overlay App 20090296075 - Hu; Jiangtao ; et al.	2009-12-03
Determining Overlay Error Using an In-chip Overlay Target App 20090116014 - Smith; Nigel P. ; et al.	2009-05-07
Multi-layer alignment and overlay target and measurement method Grant 7,474,401 - Ausschnitt , et al. January 6, 2	2009-01-06
Multi Layer Alignment And Overlay Target And Measurement Method App 20080259334 - Ausschnitt; Christopher P. ; et al.	2008-10-23
Overlay Metrology Mark App 20070222088 - Smith; Nigel P. ; et al.	2007-09-27
Multi-layer Alignment and Overlay Target and Measurement Method App 20070058169 - Ausschnitt; Christopher P. ; et al.	2007-03-15
Apparatus for detecting fibrous particle sizes by detecting scattered light at different angles Grant 4,737,648 - Smith , et al. April 12, 1	1988-04-12

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