| Patent | Date |
|---|
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20220005694 - Smith; David Charles ; et al. | 2022-01-06 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 11,183,383 - Smith , et al. November 23, 2 | 2021-11-23 |
In Situ Protective Coating Of Chamber Components For Semiconductor Processing
App 20210340670 - Singhal; Akhil ; et al. | 2021-11-04 |
Selective growth of metal-containing hardmask thin films
Grant 11,107,683 - Smith , et al. August 31, 2 | 2021-08-31 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20210242019 - Smith; David Charles ; et al. | 2021-08-05 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 11,031,245 - Smith , et al. June 8, 2 | 2021-06-08 |
Selective deposition with atomic layer etch reset
Grant 10,998,187 - Reddy , et al. May 4, 2 | 2021-05-04 |
Selective deposition of silicon oxide
Grant 10,903,071 - Smith , et al. January 26, 2 | 2021-01-26 |
Selective deposition of silicon nitride on silicon oxide using catalytic control
Grant 10,777,407 - Smith , et al. Sept | 2020-09-15 |
Geometrically selective deposition of a dielectric film
Grant 10,763,108 - Hausmann , et al. Sep | 2020-09-01 |
Selective Growth Of Metal-containing Hardmask Thin Films
App 20200227260 - Smith; David Charles ; et al. | 2020-07-16 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20200219725 - Smith; David Charles ; et al. | 2020-07-09 |
Selective Deposition Of Silicon Oxide
App 20200219718 - Smith; David Charles ; et al. | 2020-07-09 |
Method for selective deposition using a base-catalyzed inhibitor
Grant 10,662,526 - Hausmann , et al. | 2020-05-26 |
Pre-treatment method to improve selectivity in a selective deposition process
Grant 10,643,889 - Hausmann , et al. | 2020-05-05 |
Selective growth of metal-containing hardmask thin films
Grant 10,643,846 - Smith , et al. | 2020-05-05 |
Selective deposition of silicon oxide
Grant 10,629,429 - Smith , et al. | 2020-04-21 |
Selective Deposition With Atomic Layer Etch Reset
App 20200118809 - Reddy; Kapu Sirish ; et al. | 2020-04-16 |
Method For Selective Deposition Using A Base-catalyzed Inhibitor
App 20200102650 - Hausmann; Dennis ; et al. | 2020-04-02 |
Selective deposition with atomic layer etch reset
Grant 10,559,461 - Reddy , et al. Feb | 2020-02-11 |
Pre-treatment Method To Improve Selectivity In A Selective Deposition Process
App 20200043776 - HAUSMANN; Dennis ; et al. | 2020-02-06 |
Hardware and process for film uniformity improvement
Grant 10,526,700 - Kumar , et al. J | 2020-01-07 |
Selective Growth Of Metal-containing Hardmask Thin Films
App 20200006073 - Smith; David Charles ; et al. | 2020-01-02 |
Selective growth of silicon nitride
Grant 10,490,413 - Smith , et al. Nov | 2019-11-26 |
Selective Deposition Of Silicon Nitride On Silicon Oxide Using Catalytic Control
App 20190148128 - Smith; David Charles ; et al. | 2019-05-16 |
Etching Metal Oxide Substrates Using Ale And Selective Deposition
App 20190131130 - Smith; David Charles ; et al. | 2019-05-02 |
Selective Deposition Of Silicon Oxide
App 20190115207 - Smith; David Charles ; et al. | 2019-04-18 |
Selective deposition of silicon nitride on silicon oxide using catalytic control
Grant 10,242,866 - Smith , et al. | 2019-03-26 |
Geometrically Selective Deposition Of A Dielectric Film
App 20190057858 - Hausmann; Dennis M. ; et al. | 2019-02-21 |
Hardware And Process For Film Uniformity Improvement
App 20190040528 - Kumar; Purushottam ; et al. | 2019-02-07 |
Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
Grant 10,199,212 - Smith , et al. Fe | 2019-02-05 |
Selective deposition of silicon oxide
Grant 10,176,984 - Smith , et al. J | 2019-01-08 |
Integrated direct dielectric and metal deposition
Grant 10,128,116 - Lee , et al. November 13, 2 | 2018-11-13 |
Euv Photopatterning And Selective Deposition For Negative Pattern Mask
App 20180308687 - Smith; David Charles ; et al. | 2018-10-25 |
Selective Deposition With Atomic Layer Etch Reset
App 20180308680 - Reddy; Kapu Sirish ; et al. | 2018-10-25 |
Hardware and process for film uniformity improvement
Grant 10,100,407 - Kumar , et al. October 16, 2 | 2018-10-16 |
Selective Growth Of Silicon Nitride
App 20180269058 - Smith; David Charles ; et al. | 2018-09-20 |
Selective Deposition Of Silicon Nitride On Silicon Oxide Using Catalytic Control
App 20180261447 - Smith; David Charles ; et al. | 2018-09-13 |
Selective Growth Of Silicon Oxide Or Silicon Nitride On Silicon Surfaces In The Presence Of Silicon Oxide
App 20180261448 - Smith; David Charles ; et al. | 2018-09-13 |
Selective Deposition Of Silicon Oxide
App 20180233349 - Smith; David Charles ; et al. | 2018-08-16 |
Selective growth of silicon oxide or silicon nitride on silicon surfaces in the presence of silicon oxide
Grant 10,043,656 - Smith , et al. August 7, 2 | 2018-08-07 |
Integrated Direct Dielectric And Metal Deposition
App 20180108529 - Lee; William T. ; et al. | 2018-04-19 |
Selective growth of silicon nitride
Grant 9,911,595 - Smith , et al. March 6, 2 | 2018-03-06 |
Tin Oxide Thin Film Spacers In Semiconductor Device Manufacturing
App 20180012759 - Smith; David Charles ; et al. | 2018-01-11 |
Tin oxide thin film spacers in semiconductor device manufacturing
Grant 9,824,893 - Smith , et al. November 21, 2 | 2017-11-21 |
Method for RF compensation in plasma assisted atomic layer deposition
Grant 9,624,578 - Qian , et al. April 18, 2 | 2017-04-18 |
Hardware And Process For Film Uniformity Improvement
App 20160177443 - Kumar; Purushottam ; et al. | 2016-06-23 |
Method And Apparatus For Rf Compensation In Plasma Assisted Atomic Layer Deposition
App 20160090650 - Qian; Jun ; et al. | 2016-03-31 |
Camera rig
Grant 8,811,812 - Lawler , et al. August 19, 2 | 2014-08-19 |
Method of generating time-frequency signal representation preserving phase information
Grant 7,457,756 - Nelson , et al. November 25, 2 | 2008-11-25 |
Car ramp
Grant 4,542,881 - Naylor September 24, 1 | 1985-09-24 |
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