| Patent | Date |
|---|
E-beam Position Tracker
App 20220293390 - Tyminski; Jacek Kazimierz ; et al. | 2022-09-15 |
Additive Manufacturing System With Localized Controlled Environment
App 20220288855 - Phillips; Alton Hugh ; et al. | 2022-09-15 |
Metrology For Additive Manufacturing
App 20220252392 - Goodwin; Eric Peter ; et al. | 2022-08-11 |
Illumination system with curved 1d-patterned mask for use in EUV-exposure tool
Grant 11,300,884 - Smith , et al. April 12, 2 | 2022-04-12 |
Laser Radar
App 20220082697 - SLOTWINSKI; Anthony ; et al. | 2022-03-17 |
Euv lithography system for dense line patterning
Grant 11,099,483 - Flagello , et al. August 24, 2 | 2021-08-24 |
High-resolution position encoder with image sensor and encoded target pattern
Grant 11,061,338 - Wells , et al. July 13, 2 | 2021-07-13 |
Illumination system with flat 1D-patterned mask for use in EUV-exposure tool
Grant 11,054,745 - Smith , et al. July 6, 2 | 2021-07-06 |
Compensation for Goos-Hanchen error in autofocus systems
Grant 10,928,187 - Smith , et al. February 23, 2 | 2021-02-23 |
Optical Assembly, Method For Producing Data In The Same, And Method For Manufacturing Structure
App 20210025697 - Smith; Daniel Gene | 2021-01-28 |
EUV lithography system for dense line patterning
Grant 10,890,849 - Flagello , et al. January 12, 2 | 2021-01-12 |
Optical assembly, method for producing data in the same, and method for manufacturing structure
Grant 10,837,763 - Smith November 17, 2 | 2020-11-17 |
Autofocus system and method
Grant 10,794,689 - Smith , et al. October 6, 2 | 2020-10-06 |
Extreme ultraviolet lithography system that utilizes pattern stitching
Grant 10,747,117 - Binnard , et al. A | 2020-08-18 |
Measurement Of A Change In A Geometrical Characteristic And/or Position Of A Workpiece
App 20200232786 - Smith; Daniel Gene ; et al. | 2020-07-23 |
Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror
Grant 10,719,017 - Goodwin , et al. | 2020-07-21 |
Illumination device for optimizing polarization in an illumination pupil
Grant 10,690,317 - Smith , et al. | 2020-06-23 |
Optical Objective For Operation In Euv Spectral Region
App 20200117099 - Smith; Daniel Gene ; et al. | 2020-04-16 |
Illumination System With Curved 1d-patterned Mask For Use In Euv-exposure Tool
App 20200073251 - Smith; Daniel Gene ; et al. | 2020-03-05 |
Illumination System With Flat 1d-patterned Mask For Use In Euv-exposure Tool
App 20200057373 - Smith; Daniel Gene ; et al. | 2020-02-20 |
Extreme Ultraviolet Lithography System That Utilizes Pattern Stitching
App 20190235393 - Binnard; Michael B. ; et al. | 2019-08-01 |
Extreme ultraviolet lithography system that utilizes pattern stitching
Grant 10,295,911 - Binnard , et al. | 2019-05-21 |
Autofocus System And Method
App 20190107388 - Smith; Daniel Gene ; et al. | 2019-04-11 |
Eighth wave corner cube retarder for laser radar
Grant 10,197,668 - Smith Fe | 2019-02-05 |
Correction Of Errors Caused By Ambient Non-uniformities In A Fringe-projection Autofocus System In Absence Of A Reference Mirror
App 20180231899 - Goodwin; Eric Peter ; et al. | 2018-08-16 |
High-resolution Position Encoder With Image Sensor And Encoded Target Pattern
App 20180217510 - Wells; J. Kyle ; et al. | 2018-08-02 |
Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror
Grant 9,977,343 - Goodwin , et al. May 22, 2 | 2018-05-22 |
Compensation For Goos-hanchen Error In Autofocus Systems
App 20180038682 - Smith; Daniel Gene ; et al. | 2018-02-08 |
Optical Assembly, Method For Producing Data In The Same, And Method For Manufacturing Structure
App 20180031367 - Smith; Daniel Gene | 2018-02-01 |
Autofocus System And Method
App 20180031368 - Smith; Daniel Gene ; et al. | 2018-02-01 |
High order focus in laser radar tooling ball measurements
Grant 9,864,204 - Smith January 9, 2 | 2018-01-09 |
Extreme Ultraviolet Lithography System That Utilizes Pattern Stitching
App 20170336720 - Binnard; Michael B. ; et al. | 2017-11-23 |
Euv Lithography System For Dense Line Patterning
App 20170336715 - Flagello; Donis G. ; et al. | 2017-11-23 |
Euv Lithography System For Dense Line Patterning
App 20170336716 - Flagello; Donis G. ; et al. | 2017-11-23 |
Illumination Device For Optimizing Polarization In An Illumination Pupil
App 20170328538 - Smith; Daniel Gene ; et al. | 2017-11-16 |
Compensation for Goos-Hanchen error in autofocus systems
Grant 9,816,805 - Smith , et al. November 14, 2 | 2017-11-14 |
Autofocus system and method
Grant 9,810,530 - Smith , et al. November 7, 2 | 2017-11-07 |
Illumination device for optimizing polarization in an illumination pupil
Grant 9,732,934 - Smith , et al. August 15, 2 | 2017-08-15 |
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure
Grant 9,625,368 - Goodwin , et al. April 18, 2 | 2017-04-18 |
High Order Focus In Laser Radar Tooling Ball Measurements
App 20160246063 - Smith; Daniel Gene | 2016-08-25 |
Eighth Wave Corner Cube Retarder For Laser Radar
App 20160209496 - Smith; Daniel Gene | 2016-07-21 |
Two-dimensional encoder system and method
Grant 9,360,347 - Goodwin , et al. June 7, 2 | 2016-06-07 |
Interferometric Level Sensor
App 20160025480 - Goodwin; Eric Peter ; et al. | 2016-01-28 |
Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system
Grant 9,213,227 - Goodwin , et al. December 15, 2 | 2015-12-15 |
System and method for compensating instability in an autofocus system
Grant 9,097,851 - Goodwin , et al. August 4, 2 | 2015-08-04 |
Fast illumination simulator based on a calibrated flexible point-spread function
Grant 9,091,941 - Smith , et al. July 28, 2 | 2015-07-28 |
Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects
Grant 9,074,911 - Goodwin , et al. July 7, 2 | 2015-07-07 |
Autofocus System And Method
App 20150116729 - Smith; Daniel Gene ; et al. | 2015-04-30 |
Correction Of Errors Caused By Ambient Non-uniformities In A Fringe-projection Autofocus System In Absence Of A Reference Mirror
App 20150070670 - Goodwin; Eric Peter ; et al. | 2015-03-12 |
Two-dimensional Encoder System And Method
App 20140374579 - Goodwin; Eric Peter ; et al. | 2014-12-25 |
Enhancements To Integrated Optical Assembly
App 20140340691 - Smith; Daniel Gene | 2014-11-20 |
Compensation For Goos-hanchen Error In Autofocus Systems
App 20140293278 - Smith; Daniel Gene ; et al. | 2014-10-02 |
Two dimensional encoder system and method
Grant 8,829,420 - Goodwin , et al. September 9, 2 | 2014-09-09 |
Compound parabolic collectors for projection lens metrology
Grant 8,820,948 - Smith September 2, 2 | 2014-09-02 |
System And Method For Compensating Instability In An Autofocus System
App 20140233011 - Goodwin; Eric Peter ; et al. | 2014-08-21 |
Exposure apparatus with an illumination system generating multiple illumination beams
Grant 8,736,813 - Smith , et al. May 27, 2 | 2014-05-27 |
Optical assembly for laser radar
Grant 8,724,095 - Goodwin , et al. May 13, 2 | 2014-05-13 |
Measurement Assembly With Fiber Optic Array
App 20140009762 - Smith; Daniel Gene | 2014-01-09 |
Custom color or polarization sensitive CCD for separating multiple signals in Autofocus projection system
App 20130208104 - Goodwin; Eric Peter ; et al. | 2013-08-15 |
Illumination Device for optimizing polarization in an illumination pupil
App 20130148359 - Smith; Daniel Gene ; et al. | 2013-06-13 |
Optical Assembly for Laser Radar
App 20130099957 - Goodwin; Eric Peter ; et al. | 2013-04-25 |
Imaging optical system for producing control information regarding lateral movement of an image plane or an object plane
Grant 8,422,027 - Smith April 16, 2 | 2013-04-16 |
High Contrast Encoder Head
App 20130048842 - Goodwin; Eric Peter ; et al. | 2013-02-28 |
Enhanced Contrast Pin Mirror For Lithography Tools
App 20120274913 - Smith; Daniel Gene | 2012-11-01 |
Two Mirror Optical System
App 20120236397 - Smith; Daniel Gene | 2012-09-20 |
Optical components for use in measuring projection lens distortion or focus of an optical imaging system that images a substrate
App 20120224172 - Goodwin; Eric Peter ; et al. | 2012-09-06 |
Fast Illumination Simulator Based on a Calibrated Flexible Point Spread Function
App 20120212722 - Smith; Daniel Gene ; et al. | 2012-08-23 |
Target For Large Scale Metrology System
App 20120186059 - Goodwin; Eric Peter ; et al. | 2012-07-26 |
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure
App 20120188557 - Goodwin; Eric Peter ; et al. | 2012-07-26 |
Compound Parabolic Collectors for Projection Lens Metrology
App 20120140353 - Smith; Daniel Gene | 2012-06-07 |
Two dimensional encoder system and method
App 20120032067 - Goodwin; Eric Peter ; et al. | 2012-02-09 |
Autofocus system and method
App 20120008150 - Smith; Daniel Gene ; et al. | 2012-01-12 |
Imaging Optical System for Producing Control Information Regarding Lateral Movement of An Image Plane or An Object Plane
App 20110299092 - Smith; Daniel Gene | 2011-12-08 |
Autofocus system with error compensation
Grant 7,982,884 - Smith July 19, 2 | 2011-07-19 |
Goos-Hanchen compensation in autofocus systems
App 20110071784 - Smith; Daniel Gene ; et al. | 2011-03-24 |
Substrate Handling Structure
App 20100245797 - Goodwin; Eric Peter ; et al. | 2010-09-30 |
System and method for compensating instability in an autofocus system
App 20100245829 - Goodwin; Eric Peter ; et al. | 2010-09-30 |
Exposure Apparatus With An Illumination System Generating Multiple Illumination Beams
App 20100053583 - Smith; Daniel Gene ; et al. | 2010-03-04 |
Substrate Stage movement patterns for high throughput While Imaging a Reticle to a pair of Imaging Locations
App 20100053588 - Binnard; Michael B. ; et al. | 2010-03-04 |
Exposure Apparatus With A Scanning Illumination Beam
App 20090303454 - Binnard; Michael B. ; et al. | 2009-12-10 |
Autofocus System With Error Compensation
App 20090135437 - Smith; Daniel Gene | 2009-05-28 |
Apparatus And Method For Transferring Features To An Edge Of A Wafer
App 20090047608 - Novak; W. Thomas ; et al. | 2009-02-19 |
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