| Patent | Date |
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Method For Forming A Dry Glass-based Frit
App 20100095705 - Burkhalter; Robert S. ; et al. | 2010-04-22 |
Methods of generating and transporting short wavelength radiation and apparati used therein
Grant 7,463,806 - Borrelli , et al. December 9, 2 | 2008-12-09 |
Synthetic silica glass optical material having high resistance to optically induced index change
Grant 7,265,070 - Boek , et al. September 4, 2 | 2007-09-04 |
Photolithography methods and systems
App 20060037362 - Borrelli; Nicholas F. ; et al. | 2006-02-23 |
Photolithography methods and systems
Grant 6,982,232 - Borrelli , et al. January 3, 2 | 2006-01-03 |
Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
Grant 6,977,137 - Borrelli , et al. December 20, 2 | 2005-12-20 |
Method of inducing transmission in optical lithography preforms
Grant 6,915,665 - Borrelli , et al. July 12, 2 | 2005-07-12 |
Synthetic silica glass optical material having high resistance to optically induced index change
App 20050112380 - Boek, Heather D. ; et al. | 2005-05-26 |
Group iia metal fluoride single crystals suitable for below 200 nm optical lithography and a method for selecting such crystals
App 20050031970 - An, Chong P. ; et al. | 2005-02-10 |
UV photosensitive melted glasses
Grant 6,844,277 - Borrelli , et al. January 18, 2 | 2005-01-18 |
Methods of generating and transporting short wavelength radiation and apparati used therein
App 20040258381 - Borrelli, Nicholas F. ; et al. | 2004-12-23 |
Film coated optical lithography elements and method of making
Grant 6,833,949 - Maier , et al. December 21, 2 | 2004-12-21 |
Mask, mask blank, photosensitive material therefor and fabrication thereof
App 20040241557 - Bellman, Robert A. ; et al. | 2004-12-02 |
Photolithography methods and systems
App 20040235635 - Borrelli, Nicholas F. ; et al. | 2004-11-25 |
Photolithographic element blank calcium strontium fluoride UV transmitting mixed fluoride crystal with minimized spatial dispersion
Grant 6,806,039 - Allan , et al. October 19, 2 | 2004-10-19 |
Optical lithography and a method of inducing transmission in optical lithography preforms
App 20040202968 - Borrelli, Nicholas F. ; et al. | 2004-10-14 |
High repetition rate excimer laser system
Grant 6,801,562 - Pell , et al. October 5, 2 | 2004-10-05 |
Deep UV laser internally induced densification in silica glasses
Grant 6,796,148 - Borrelli , et al. September 28, 2 | 2004-09-28 |
Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
Grant 6,782,716 - Moore , et al. August 31, 2 | 2004-08-31 |
Preferred crystal orientation optical elements from cubic materials
Grant 6,765,717 - Allan , et al. July 20, 2 | 2004-07-20 |
Photolithography methods and systems
Grant 6,754,002 - Borrelli , et al. June 22, 2 | 2004-06-22 |
Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
App 20040091798 - Moore, Lisa A. ; et al. | 2004-05-13 |
Vacuum ultraviolet trasmitting silicon oxyfluoride lithography glass
Grant 6,682,859 - Moore , et al. January 27, 2 | 2004-01-27 |
Photolithographic method and UV transmitting fluoride crystals with minimized spatial dispersion
Grant 6,649,326 - Allan , et al. November 18, 2 | 2003-11-18 |
UV photosensitive melted germano-silicate glasses
Grant 6,632,759 - Borelli , et al. October 14, 2 | 2003-10-14 |
High repetition rate excimer laser system
App 20030174754 - Pell, Michael A. ; et al. | 2003-09-18 |
Method of increasing the initial transmittance of optical glass
Grant 6,619,073 - Borrelli , et al. September 16, 2 | 2003-09-16 |
Optical members and methods for predicting the performance of optical members and optical systems
App 20030167798 - Borrelli, Nicholas F. ; et al. | 2003-09-11 |
Photolithographic element blank calcium strontium fluoride UV transmitting mixed fluoride crystal with minimized spatial dispersion
App 20030104318 - Allan, Douglas C. ; et al. | 2003-06-05 |
Photolithographic method and UV transmitting fluoride crystals with minimized spatial dispersion
App 20030091934 - Allan, Douglas C. ; et al. | 2003-05-15 |
Preferred crystal orientation optical elements from cubic materials
App 20030067679 - Allan, Douglas C. ; et al. | 2003-04-10 |
UV photosensitive melted glasses
App 20030029203 - Borrelli, Nicholas F. ; et al. | 2003-02-13 |
Film coated optical lithography elements and method of making
App 20030021015 - Maier, Robert L. ; et al. | 2003-01-30 |
Method of making high repetition rate excimer laser crystal optics and UV<200NM transmitting optical fluoride crystal
App 20030012725 - Gray, Sandra L. ; et al. | 2003-01-16 |
High repetition rate excimer laser system
App 20030007536 - Pell, Michael A. ; et al. | 2003-01-09 |
Method of increasing the initial transmittance of optical glass
App 20020194869 - Borrelli, Nicholas F. ; et al. | 2002-12-26 |
Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
App 20020160276 - Moore, Lisa A. ; et al. | 2002-10-31 |
Film coated optical lithography elements and method of making
Grant 6,466,365 - Maier , et al. October 15, 2 | 2002-10-15 |
Oxygen Doping Of Silicon Oxyfluoride Glass
App 20020134111 - Moore, Lisa A. ; et al. | 2002-09-26 |
UV photosensitive melted glasses
App 20020123419 - Borrelli, Nicholas F. ; et al. | 2002-09-05 |
Direct writing of optical devices in silica-based glass using femtosecond pulse lasers
App 20020076655 - Borrelli, Nicholas F. ; et al. | 2002-06-20 |
Photolithography methods and systems
App 20020077244 - Borrelli, Nicholas F. ; et al. | 2002-06-20 |
Optical lithography and a method of inducing transmission in optical lithography preforms
App 20020042026 - Borrelli, Nicholas F. ; et al. | 2002-04-11 |
Method for determining laser-induced compaction in fused silica
App 20020036188 - Allan, Douglas C. ; et al. | 2002-03-28 |
UV photosensitive melted germano-silicate glasses
App 20020033031 - Borrelli, Nicholas F. ; et al. | 2002-03-21 |
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