Smith; Bruce W.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smith; Bruce W..The latest application filed is for "evanescent wave assist features for microlithography".

Company Profile

0.23.15

Smith; Bruce W. - Webster NY
Smith; Bruce W. - Penfield NY
Smith, Bruce W - Webster NY
Smith; Bruce W. - Nipomo CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Trademarks

Patent Activity

Patent	Date
Method of photolithography using a fluid and a system thereof Grant 8,852,850 - Smith October 7, 2	2014-10-07
Method for aberration evaluation in a projection system Grant 7,768,648 - Smith August 3, 2	2010-08-03
Illumination device for projection system and method for fabricating Grant RE40,239 - Smith April 15, 2	2008-04-15
Apparatus for aberration detection and measurement Grant 7,345,735 - Smith March 18, 2	2008-03-18
Evanescent wave assist features for microlithography App 20070172745 - Smith; Bruce W.	2007-07-26
Method of photomask correction and its optimization using localized frequency analysis Grant 7,233,887 - Smith June 19, 2	2007-06-19
Method For Aberration Evaluation In A Projection System App 20070070320 - Smith; Bruce W.	2007-03-29
Reduction Smith-Talbot interferometer prism for micropatterning Grant 7,170,588 - Smith January 30, 2	2007-01-30
Apparatus for aberration detection and measurement App 20070019171 - Smith; Bruce W.	2007-01-25
Method for aberration detection and measurement Grant 7,136,143 - Smith November 14, 2	2006-11-14
Masks for use in optical lithography below 180 nm Grant RE39,349 - Smith October 17, 2	2006-10-17
Method of illuminating a photomask using chevron illumination Grant 7,092,073 - Smith August 15, 2	2006-08-15
Method of photolithography using a fluid and a system thereof App 20050270505 - Smith, Bruce W.	2005-12-08
Optical proximity correction method utilizing gray bars as sub-resolution assist features Grant 6,934,010 - Smith August 23, 2	2005-08-23
Optical proximity correction method utilizing ruled ladder bars as sub-resolution assist features Grant 6,881,523 - Smith April 19, 2	2005-04-19
Method of photomask correction and its optimization using localized frequency analysis App 20050076321 - Smith, Bruce W.	2005-04-07
Reduction Smith-Talbot interferometer prism for micropatterning App 20050057735 - Smith, Bruce W.	2005-03-17
Method of improving photomask geometry Grant 6,846,595 - Smith January 25, 2	2005-01-25
Mask for projection photolithography at or below about 160 nm and a method thereof Grant 6,835,505 - Smith December 28, 2	2004-12-28
Illumination device for projection system and method for fabricating Grant 6,791,667 - Smith September 14, 2	2004-09-14
Method for aberration detection and measurement App 20040174506 - Smith, Bruce W.	2004-09-09
Illumination device for projection system and method for fabricating Grant 6,788,388 - Smith September 7, 2	2004-09-07
Method of illuminating a photomask using chevron illumination App 20040048167 - Smith, Bruce W.	2004-03-11
Method of improving photomask geometry App 20030211400 - Smith, Bruce W	2003-11-13
Apparatus and method of image enhancement through spatial filtering App 20030112421 - Smith, Bruce W.	2003-06-19
Projection imaging system with a non-circular aperture and a method thereof Grant 6,556,361 - Smith , et al. April 29, 2	2003-04-29
Mask for projection photolithography at or below about 160 nm and a method thereof App 20030077520 - Smith, Bruce W.	2003-04-24
Apparatus and method of image enhancement through spatial filtering Grant 6,525,806 - Smith February 25, 2	2003-02-25
Optical proximity correction method utilizing ruled ladder bars as sub-resolution assist features App 20020192570 - Smith, Bruce W.	2002-12-19
Optical proximity correction method utilizing gray bars as sub-resolution assist features App 20020186356 - Smith, Bruce W.	2002-12-12
Illumination device for projection system and method for fabricating Grant 6,466,304 - Smith October 15, 2	2002-10-15
Illumination device for projection system and method for fabricating App 20020145720 - Smith, Bruce W.	2002-10-10
Illumination device for projection system and method for fabricating App 20020126267 - Smith, Bruce W.	2002-09-12
Photomask for projection lithography at or below about 160 nm and a method thereof Grant 6,395,433 - Smith May 28, 2	2002-05-28
Imaging method using phase boundary masking with modified illumination Grant 6,388,736 - Smith , et al. May 14, 2	2002-05-14
Multi-layered attenuated phase shift mask and a method for making the mask Grant 5,939,227 - Smith August 17, 1	1999-08-17
Stiffened structural laminate and method of molding laminate with stiffener beads Grant 4,053,667 - Smith October 11, 1	1977-10-11

Company Registrations

SEC

0001213035

SMITH BRUCE W

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