Patent | Date |
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Arrangement of expanding optical flows for efficient laser extraction Grant 11,165,216 - Hunter, Jr. , et al. November 2, 2 | 2021-11-02 |
Arrangement of Expanding Optical Flows for Efficient Laser Extraction App 20200028313 - Hunter, Jr.; Robert O. ;   et al. | 2020-01-23 |
Thermal Wave Drive for ICF Targets App 20200027571 - Cornell; Eric W. ;   et al. | 2020-01-23 |
High Radiation Efficiency Non Fissile Shell for ICF App 20190139651 - Cornell; Eric W. ;   et al. | 2019-05-09 |
Precision geographic location system and method utilizing an image product Grant 10,222,178 - Hunter, Jr. , et al. | 2019-03-05 |
Reflectivity Variation of ICF Target Surfaces App 20190057780 - Hunter, JR.; Robert O. ;   et al. | 2019-02-21 |
System and method for advanced navigation Grant 9,903,719 - Hunter, Jr. , et al. February 27, 2 | 2018-02-27 |
System And Method For Advanced Navigation App 20170023365 - Hunter, JR.; Robert O. ;   et al. | 2017-01-26 |
Method and system for high accuracy and reliability registration of multi modal imagery Grant 9,483,816 - Smith , et al. November 1, 2 | 2016-11-01 |
Method & System For High Accuracy & Reliability Registration Of Multi Modal Imagery App 20150324989 - Smith; Adlai H. ;   et al. | 2015-11-12 |
Precision geographic location system and method utilizing an image product Grant 9,074,848 - Hunter, Jr. , et al. July 7, 2 | 2015-07-07 |
Method and apparatus for measurement of exit pupil transmittance Grant 8,786,827 - Smith , et al. July 22, 2 | 2014-07-22 |
Method and apparatus for self-referenced wafer stage positional error mapping Grant 7,871,002 - Smith , et al. January 18, 2 | 2011-01-18 |
Method And Apparatus For Measurement Of Exit Pupil Transmittance App 20110007298 - Smith; Adlai H. ;   et al. | 2011-01-13 |
Systems and methods for determination of focus and telecentricity, amelioration of metrology induced effects and application to determination of precision bossung curves Grant 7,846,624 - Smith , et al. December 7, 2 | 2010-12-07 |
Method and apparatus for determination of source polarization matrix Grant 7,697,138 - Smith , et al. April 13, 2 | 2010-04-13 |
Method and apparatus for measurement of exit pupil transmittance Grant 7,688,426 - Smith , et al. March 30, 2 | 2010-03-30 |
Apparatus and process for determination of dynamic lens field curvature Grant 7,671,979 - Smith , et al. March 2, 2 | 2010-03-02 |
Method and apparatus for embedded encoding of overlay data ordering in an in-situ interferometer Grant 7,598,006 - Smith , et al. October 6, 2 | 2009-10-06 |
Method and apparatus for measurement of crossfield chromatic response of projection imaging systems Grant 7,544,449 - Smith , et al. June 9, 2 | 2009-06-09 |
In-situ interferometer arrangement Grant 7,515,250 - Smith , et al. April 7, 2 | 2009-04-07 |
Reference wafer calibration reticle Grant 7,381,503 - Smith , et al. June 3, 2 | 2008-06-03 |
Method and apparatus for registration with integral alignment optics Grant 7,337,552 - Smith , et al. March 4, 2 | 2008-03-04 |
In-Situ Interferometer Arrangement App 20080007705 - Smith; Adlai H. ;   et al. | 2008-01-10 |
Apparatus and process for the determination of static lens field curvature Grant 7,295,291 - Smith , et al. November 13, 2 | 2007-11-13 |
In-situ interferometer arrangement Grant 7,286,208 - Smith , et al. October 23, 2 | 2007-10-23 |
In-situ interferometer arrangement Grant 7,283,202 - Smith , et al. October 16, 2 | 2007-10-16 |
Reference Wafer and Process for Manufacturing Same App 20070216902 - Smith; Adlai H. ;   et al. | 2007-09-20 |
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion Grant 7,268,360 - Smith , et al. September 11, 2 | 2007-09-11 |
Systems And Methods For Determination of Focus And Telecentricity, Amelioration of Metrology Induced Effects And Application to Determination Of Precision Bossung Curves App 20070206168 - Smith; Adlai H. ;   et al. | 2007-09-06 |
Reference wafer and process for manufacturing same Grant 7,261,983 - Smith , et al. August 28, 2 | 2007-08-28 |
Process for determination of optimized exposure conditions for transverse distortion mapping Grant 7,261,985 - Smith , et al. August 28, 2 | 2007-08-28 |
Reference wafer and process for manufacturing same App 20070072091 - Smith; Adlai H. ;   et al. | 2007-03-29 |
Apparatus and process for determination of dynamic scan field curvature App 20070024834 - Smith; Adlai H. ;   et al. | 2007-02-01 |
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion Grant 7,136,144 - Smith , et al. November 14, 2 | 2006-11-14 |
Apparatus and process for determination of dynamic scan field curvature Grant 7,126,668 - Smith , et al. October 24, 2 | 2006-10-24 |
Method and apparatus for compensation or amelioration of lens field curvature and other imaging defects by utilizing a multi-wavelength setting illumination source App 20060209410 - Smith; Adlai H. ;   et al. | 2006-09-21 |
Method and apparatus for self-referenced wafer stage positional error mapping App 20060209276 - Smith; Adlai H. ;   et al. | 2006-09-21 |
Method and apparatus for determination of source polarization matrix App 20060192961 - Smith; Adlai H. ;   et al. | 2006-08-31 |
Machine specific and machine group correction of masks based on machine subsystem performance parameters App 20060190915 - Smith; Adlai H. ;   et al. | 2006-08-24 |
Apparatus and method for high resolution in-situ illumination source measurement in projection imaging systems Grant 7,088,427 - Smith , et al. August 8, 2 | 2006-08-08 |
Method and apparatus for measurement of exit pupil telecentricity and source boresighting App 20060164618 - Smith; Adlai H. ;   et al. | 2006-07-27 |
Process for amelioration of scanning synchronization error Grant 7,053,979 - Smith , et al. May 30, 2 | 2006-05-30 |
Method and apparatus for self-referenced dynamic step and scan intra-field lens distortion App 20060109438 - Smith; Adlai H. ;   et al. | 2006-05-25 |
Method and apparatus for registration with integral alignment optics App 20060042106 - Smith; Adlai H. ;   et al. | 2006-03-02 |
Method and apparatus for self-referenced dynamic step and scan intra-field scanning distortion App 20060007431 - Smith; Adlai H. ;   et al. | 2006-01-12 |
Process for manufacture of semiconductor chips utilizing a posteriori corrections to machine control system and settings App 20050285056 - Smith, Adlai H. ;   et al. | 2005-12-29 |
In-situ interferometer arrangement App 20050264783 - Smith, Adlai H. ;   et al. | 2005-12-01 |
Apparatus and process for the determination of static lens field curvature App 20050254040 - Smith, Adlai H. ;   et al. | 2005-11-17 |
Process for amelioration of scanning synchronization error App 20050254027 - Smith, Adlai H. ;   et al. | 2005-11-17 |
In-situ interferometer arrangement Grant 6,963,390 - Smith , et al. November 8, 2 | 2005-11-08 |
Apparatus and process for determination of dynamic lens field curvature App 20050243309 - Smith, Adlai H. ;   et al. | 2005-11-03 |
Apparatus and process for determination of dynamic scan field curvature App 20050243294 - Smith, Adlai H. ;   et al. | 2005-11-03 |
In-situ interferometer arrangement App 20050237541 - Smith, Adlai H. ;   et al. | 2005-10-27 |
Method and apparatus for measurement of exit pupil transmittance App 20050237512 - Smith, Adlai H. ;   et al. | 2005-10-27 |
Method of emulation of lithographic projection tools App 20050240895 - Smith, Adlai H. ;   et al. | 2005-10-27 |
Apparatus and method for high resolution in-situ illumination source measurement in projection imaging systems App 20050231705 - Smith, Adlai H. ;   et al. | 2005-10-20 |
Process for determination of optimized exposure conditions for transverse distortion mapping App 20050202328 - Smith, Adlai H. ;   et al. | 2005-09-15 |
In-situ source metrology instrument and method of use Grant 6,741,338 - McArthur , et al. May 25, 2 | 2004-05-25 |
In-situ source metrology instrument and method of use App 20030007143 - McArthur, Bruce B. ;   et al. | 2003-01-09 |
In-situ source metrology instrument and method of use Grant 6,356,345 - McArthur , et al. March 12, 2 | 2002-03-12 |
Apparatus and process for nozzle production utilizing computer generated holograms Grant 6,130,009 - Smith , et al. October 10, 2 | 2000-10-10 |
Apparatus method of measurement and method of data analysis for correction of optical system Grant 5,978,085 - Smith , et al. November 2, 1 | 1999-11-02 |
Apparatus, method of measurement, and method of data analysis for correction of optical system Grant 5,828,455 - Smith , et al. October 27, 1 | 1998-10-27 |
Plate correction technique for imaging systems Grant 5,640,233 - McArthur , et al. June 17, 1 | 1997-06-17 |
Dual plate holographic imaging technique and masks Grant 5,625,471 - Smith April 29, 1 | 1997-04-29 |
Gray level imaging masks and methods for encoding same Grant 5,538,817 - Smith , et al. July 23, 1 | 1996-07-23 |
Laser ablation control system and method Grant 5,523,543 - Hunter, Jr. , et al. June 4, 1 | 1996-06-04 |
Direct etch processes for the manufacture of high density multichip modules Grant 5,509,553 - Hunter, Jr. , et al. April 23, 1 | 1996-04-23 |
High power masks and methods for manufacturing same Grant 5,501,925 - Smith , et al. March 26, 1 | 1996-03-26 |
Apparatus and process for using Fresnel zone plate array for processing materials Grant 5,481,407 - Smith , et al. January 2, 1 | 1996-01-02 |
Plate correction of imaging systems Grant 5,392,119 - McArthur , et al. February 21, 1 | 1995-02-21 |
Apparatus and process for the production of fine line metal traces Grant 5,364,493 - Hunter, Jr. , et al. November 15, 1 | 1994-11-15 |
Use of Fresnel zone plates for material processing Grant 5,362,940 - MacDonald , et al. November 8, 1 | 1994-11-08 |
High power phase masks for imaging systems Grant 5,328,785 - Smith , et al. July 12, 1 | 1994-07-12 |
In situ process control system for steppers Grant 5,202,748 - MacDonald , et al. April 13, 1 | 1993-04-13 |
Adaptive optic wafer stepper illumination system Grant 5,142,132 - MacDonald , et al. August 25, 1 | 1992-08-25 |
Imaging and illumination system with aspherization and aberration correction by phase steps Grant 5,136,413 - MacDonald , et al. August 4, 1 | 1992-08-04 |
Deformable wafer chuck Grant 5,094,536 - MacDonald , et al. March 10, 1 | 1992-03-10 |