Patent | Date |
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Mass flow controller utilizing nonlinearity component functions Grant 11,435,764 - Smirnov September 6, 2 | 2022-09-06 |
Multi-chamber rate-of-change system for gas flow verification Grant 11,327,510 - Smirnov May 10, 2 | 2022-05-10 |
Thermal mass flow sensor with improved accuracy Grant 11,209,298 - Smirnov December 28, 2 | 2021-12-28 |
Parasitic flow correction method and apparatus Grant 11,073,845 - Smirnov July 27, 2 | 2021-07-27 |
Multi-gas Mass Flow Controller And Method App 20210190575 - Smirnov; Alexei V. | 2021-06-24 |
Multi-gas mass flow controller and method Grant 11,041,749 - Smirnov June 22, 2 | 2021-06-22 |
High flow tubular bypass Grant 10,982,985 - Smirnov , et al. April 20, 2 | 2021-04-20 |
Parasitic Flow Correction Method And Apparatus App 20210064067 - Smirnov; Alexei V. | 2021-03-04 |
High Flow Tubular Bypass App 20200284631 - Smirnov; Alexei V. ;   et al. | 2020-09-10 |
Gas insensitive mass flow control systems and methods Grant 10,534,375 - Johnson , et al. January 14, 2 | 2020-01-14 |
Mass flow controller and method for controlling a mass flow rate of a gas in a gas stream Grant 10,533,982 - Albright , et al. Ja | 2020-01-14 |
Multi-chamber Rate-of-change System For Gas Flow Verification App 20190361468 - Smirnov; Alexei V. | 2019-11-28 |
System and method for improved indicated flow in mass flow controllers Grant 10,473,500 - Smirnov Nov | 2019-11-12 |
Thermal Mass Flow Sensor With Improved Accuracy App 20190331515 - Smirnov; Alexei V. | 2019-10-31 |
Mass Flow Controller And Method For Controlling A Mass Flow Rate Of A Gas In A Gas Stream App 20190265218 - Albright; Patrick ;   et al. | 2019-08-29 |
System and method for detecting concentration of a gas in a gas stream Grant 10,295,518 - Albright , et al. | 2019-05-21 |
Gas Insensitive Mass Flow Control Systems And Methods App 20180348798 - Johnson; Ryan ;   et al. | 2018-12-06 |
Gas insensitive mass flow control systems and methods Grant 10,126,761 - Johnson , et al. November 13, 2 | 2018-11-13 |
On-tool mass flow controller diagnostic systems and methods Grant 10,041,825 - Smirnov , et al. August 7, 2 | 2018-08-07 |
On-tool Mass Flow Controller Diagnostic Systems And Methods App 20180106658 - Smirnov; Alexei V. ;   et al. | 2018-04-19 |
Mass flow controller for improved performance across fluid types Grant 9,898,013 - Smirnov February 20, 2 | 2018-02-20 |
On-tool mass flow controller diagnostic systems and methods Grant 9,846,073 - Smirnov , et al. December 19, 2 | 2017-12-19 |
Mass flow controller with onboard diagnostics, prognostics, and data logging Grant 9,766,635 - Smirnov , et al. September 19, 2 | 2017-09-19 |
On-tool Mass Flow Controller Diagnostic Systems And Methods App 20170184441 - Smirnov; Alexei V. ;   et al. | 2017-06-29 |
Gas Insensitive Mass Flow Control Systems And Methods App 20170185091 - Johnson; Ryan ;   et al. | 2017-06-29 |
System And Method For Detecting Concentration Of A Gas In A Gas Stream App 20170168035 - Albright; Patrick ;   et al. | 2017-06-15 |
Microwave Processing Chamber App 20170118807 - Zhylkov; Valerie S. ;   et al. | 2017-04-27 |
On-tool mass flow controller diagnostic systems and methods Grant 9,605,992 - Smirnov , et al. March 28, 2 | 2017-03-28 |
Microwave processing chamber Grant 9,560,699 - Zhylkov , et al. January 31, 2 | 2017-01-31 |
On-tool mass flow controller diagnostic systems and methods Grant 9,488,516 - Smirnov , et al. November 8, 2 | 2016-11-08 |
Mass Flow Controller With Onboard Diagnostics, Prognostics, And Data Logging App 20160139609 - Smirnov; Alexei V. ;   et al. | 2016-05-19 |
Mass flow controller with onboard diagnostics, prognostics, and data logging Grant 9,256,228 - Smirnov , et al. February 9, 2 | 2016-02-09 |
Mass Flow Controller For Improved Performance Across Fluid Types App 20150362924 - Smirnov; Alexei V. | 2015-12-17 |
Mass flow controller and method for improved performance across fluid types Grant 9,146,563 - Smirnov September 29, 2 | 2015-09-29 |
On-tool Mass Flow Controller Diagnostic Systems And Methods App 20150260565 - Smirnov; Alexei V. ;   et al. | 2015-09-17 |
Adaptive pressure insensitive mass flow controller and method for multi-gas applications Grant 9,027,585 - Smirnov May 12, 2 | 2015-05-12 |
Mass flow controller algorithm with adaptive valve start position Grant 8,915,262 - Smirnov December 23, 2 | 2014-12-23 |
On-tool Mass Flow Controller Diagnostic Systems And Methods App 20140260513 - Smirnov; Alexei V. ;   et al. | 2014-09-18 |
System And Method For Improved Indicated Flow In Mass Flow Controllers App 20140257720 - Smirnov; Alexei V. | 2014-09-11 |
Mass Flow Controller And Method For Improved Performance Across Fluid Types App 20140246097 - Smirnov; Alexei V. | 2014-09-04 |
Mass flow controller hysteresis compensation system and method Grant 8,671,973 - Smirnov March 18, 2 | 2014-03-18 |
Method and mass flow controller for enhanced operating range Grant 8,504,311 - Smirnov , et al. August 6, 2 | 2013-08-06 |
Mass flow controller with enhanced operating range Grant 8,499,786 - Zolock , et al. August 6, 2 | 2013-08-06 |
Adaptive Pressure Insensitive Mass Flow Controller and Method for Multi-Gas Applications App 20130146148 - Smirnov; Alexei V. | 2013-06-13 |
Mass Flow Controller Algorithm with Adaptive Valve Start Position App 20130037112 - Smirnov; Alexei V. | 2013-02-14 |
Microwave Processing Chamber App 20120305808 - Zhylkov; Valerie S. ;   et al. | 2012-12-06 |
Method and system of on-tool and on-site MFC optimization providing consistent response Grant 8,321,060 - Smirnov , et al. November 27, 2 | 2012-11-27 |
Temperature insensitive mass flow controller Grant 8,251,091 - Zolock , et al. August 28, 2 | 2012-08-28 |
Mass Flow Controller With Onboard Diagnostics, Prognostics, And Data Logging App 20120186655 - Smirnov; Alexei V. ;   et al. | 2012-07-26 |
Thermal flow sensor with zero drift compensation Grant 8,196,601 - Smirnov June 12, 2 | 2012-06-12 |
Multi-mode control loop with improved performance for mass flow controller Grant 8,195,312 - Smirnov , et al. June 5, 2 | 2012-06-05 |
Thermal mass flow sensor with improved response across fluid types Grant 8,160,833 - Smirnov , et al. April 17, 2 | 2012-04-17 |
Adaptive on-tool mass flow controller tuning Grant 8,131,400 - Smirnov March 6, 2 | 2012-03-06 |
Adaptive On-Tool Mass Flow Controller Tuning App 20110307104 - Smirnov; Alexei V. | 2011-12-15 |
Method And System Of On-tool And On-site Mfc Optimization Providing Consistent Response App 20110264281 - Smirnov; Alexei V. | 2011-10-27 |
Method And Mass Flow Controller For Enhanced Operating Range App 20110247390 - Smirnov; Alexei V. ;   et al. | 2011-10-13 |
Mass Flow Controller With Enhanced Operating Range App 20110247696 - Zolock; Michael J. ;   et al. | 2011-10-13 |
Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements Grant 7,971,480 - Smirnov , et al. July 5, 2 | 2011-07-05 |
Flow controller delivery of a specified-quantity of a fluid Grant 7,971,604 - McDonald , et al. July 5, 2 | 2011-07-05 |
Temperature Insenstive Mass Flow Controller App 20110061841 - Zolock; Michael J. ;   et al. | 2011-03-17 |
Multi-mode Control Loop With Improved Performance For Mass Flow Controller App 20110054702 - Smirnov; Alexei V. ;   et al. | 2011-03-03 |
Thermal Mass Flow Sensor With Improved Response Across Fluid Types App 20110015791 - Smirnov; Alexei V. ;   et al. | 2011-01-20 |
Compact, short-pulse X-ray and T-ray fused source Grant 7,835,499 - Yu , et al. November 16, 2 | 2010-11-16 |
Mass Flow Controller Hysteresis Compensation System & Method App 20100180951 - Smirnov; Alexei V. | 2010-07-22 |
Mass Flow Controller And Method Of Operating The Same App 20100089459 - Smirnov; Alexei V. ;   et al. | 2010-04-15 |
Compact, short-pulse X-ray and T-ray fused source App 20100072405 - Yu; David U.L. ;   et al. | 2010-03-25 |
Compact high-power pulsed terahertz source Grant 7,649,328 - Smirnov , et al. January 19, 2 | 2010-01-19 |
Multi-mode control algorithm Grant 7,640,078 - Smirnov December 29, 2 | 2009-12-29 |
Adaptive response time closed loop control algorithm Grant 7,603,186 - Smirnov October 13, 2 | 2009-10-13 |
Compact high-power pulsed terahertz source App 20090146085 - Smirnov; Alexei V. ;   et al. | 2009-06-11 |
Symmetrized coupler converting circular waveguide TM01 mode to rectangular waveguide TE10 mode App 20080068110 - Smirnov; Alexei V. ;   et al. | 2008-03-20 |
Rod-loaded radiofrequency cavities and couplers App 20080068112 - Yu; David U.L. ;   et al. | 2008-03-20 |
Multi-mode control algorithm App 20080009978 - Smirnov; Alexei V. | 2008-01-10 |
Adaptive response time closed loop control algorithm App 20070276545 - Smirnov; Alexei V. | 2007-11-29 |
Flow controller delivery of a specified-quantity of a fluid App 20070246102 - McDonald; R. Michael ;   et al. | 2007-10-25 |