Smilde; Hendrik Jan Hidde

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smilde; Hendrik Jan Hidde.The latest application filed is for "metrology method, target and substrate".

Company Profile

15.45.42

Smilde; Hendrik Jan Hidde - Veldhoven NL

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Patent Activity

Patent	Date
Metrology method, target and substrate Grant 11,428,521 - Bhattacharyya , et al. August 30, 2	2022-08-30
Method and metrology apparatus for determining estimated scattered radiation intensity Grant 11,392,043 - Mossavat , et al. July 19, 2	2022-07-19
Metrology Method, Target And Substrate App 20220057192 - BHATTACHARYYA; Kaustuve ; et al.	2022-02-24
Metrology method, target and substrate Grant 11,204,239 - Bhattacharyya , et al. December 21, 2	2021-12-21
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method Grant 11,181,828 - Warnaar , et al. November 23, 2	2021-11-23
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method Grant 11,092,900 - Van Der Schaar , et al. August 17, 2	2021-08-17
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method App 20200379359 - SMILDE; Hendrik Jan Hidde ; et al.	2020-12-03
Metrology Method, Target And Substrate App 20200348125 - BHATTACHARYYA; Kaustuve ; et al.	2020-11-05
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 10,739,687 - Smilde , et al. A	2020-08-11
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,725,386 - Middlebrooks , et al.	2020-07-28
Metrology method, target and substrate Grant 10,718,604 - Bhattacharyya , et al.	2020-07-21
Method Of Determining A Value Of A Parameter Of Interest Of A Patterning Process, Device Manufacturing Method App 20200133140 - WARNAAR; Patrick ; et al.	2020-04-30
Method and Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method App 20200073254 - VAN DER SCHAAR; Maurits ; et al.	2020-03-05
Method and Metrology Apparatus for Determining Estimated Scattered Radiation Intensity App 20200057386 - MOSSAVAT; Seyed Iman ; et al.	2020-02-20
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method Grant 10,481,503 - Van Der Schaar , et al. Nov	2019-11-19
Metrology Method, Target And Substrate App 20190346256 - BHATTACHARYYA; Kaustuve ; et al.	2019-11-14
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20190278190 - MIDDLEBROOKS; Scott Anderson ; et al.	2019-09-12
Metrology method, target and substrate Grant 10,386,176 - Bhattacharyya , et al. A	2019-08-20
Optimization of target arrangement and associated target Grant 10,331,043 - Van Buel , et al.	2019-06-25
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,331,041 - Middlebrooks , et al.	2019-06-25
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method App 20190094712 - SMILDE; Hendrik Jan Hidde ; et al.	2019-03-28
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20190049860 - MIDDLEBROOKS; Scott Anderson ; et al.	2019-02-14
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 10,162,271 - Smilde , et al. Dec	2018-12-25
Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method Grant 10,162,272 - Jak , et al. Dec	2018-12-25
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,126,662 - Middlebrooks , et al. November 13, 2	2018-11-13
Method, apparatus and substrates for lithographic metrology Grant 10,042,268 - Smilde , et al. August 7, 2	2018-08-07
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20180196357 - Middlebrooks; Scott Anderson ; et al.	2018-07-12
Metrology method and inspection apparatus, lithographic system and device manufacturing method Grant 9,946,167 - Smilde , et al. April 17, 2	2018-04-17
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,910,366 - Middlebrooks , et al. March 6, 2	2018-03-06
Metrology method and apparatus, computer program and lithographic system Grant 9,879,988 - Liu , et al. January 30, 2	2018-01-30
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,811,003 - Jak , et al. November 7, 2	2017-11-07
Metrology Method and Apparatus, Lithographic System, Device Manufacturing Method and Substrate App 20170314915 - Van Der Schaar; Maurits ; et al.	2017-11-02
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,719,945 - Smilde , et al. August 1, 2	2017-08-01
Metrology method and apparatus, lithographic system, device manufacturing method and substrate Grant 9,714,827 - Van Der Schaar , et al. July 25, 2	2017-07-25
Optimization Of Target Arrangement And Associated Target App 20170176871 - VAN BUEL; Henricus Wilhelmus Maria ; et al.	2017-06-22
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20170068173 - JAK; Martin Jacobus Johan ; et al.	2017-03-09
Method And Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method App 20170059999 - VAN DER SCHAAR; Maurits ; et al.	2017-03-02
Metrology Method And Apparatus, Substrates For Use In Such Methods, Lithographic System And Device Manufacturing Method App 20170052454 - JAK; Martin Jacobus Johan ; et al.	2017-02-23
Metrology method and apparatus, and device manufacturing method Grant 9,535,342 - Smilde , et al. January 3, 2	2017-01-03
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,535,338 - Jak , et al. January 3, 2	2017-01-03
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method App 20160334715 - SMILDE; Hendrik Jan Hidde ; et al.	2016-11-17
Method, Apparatus and Substrates for Lithographic Metrology App 20160291481 - SMILDE; Hendrik Jan Hidde ; et al.	2016-10-06
Metrology Method and Apparatus, Computer Program and Lithographic System App 20160223322 - LIU; Xing Lan ; et al.	2016-08-04
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20160179019 - VAN DER SCHAAR; Maurits ; et al.	2016-06-23
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20160161864 - MIDDLEBROOKS; Scott Anderson ; et al.	2016-06-09
Substrate and patterning device for use in metrology, metrology method and device manufacturing method Grant 9,331,022 - Van Der Schaar , et al. May 3, 2	2016-05-03
Metrology Method, Target And Substrate App 20160061589 - BHATTACHARYYA; Kaustuve ; et al.	2016-03-03
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus Grant 9,255,892 - Van De Kerkhof , et al. February 9, 2	2016-02-09
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20160033877 - SMILDE; Hendrik Jan Hidde ; et al.	2016-02-04
Inspection apparatus and method for measuring a property of a substrate Grant 9,235,141 - Van Der Schaar , et al. January 12, 2	2016-01-12
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus Grant 9,229,338 - Van De Kerkhof , et al. January 5, 2	2016-01-05
Substrate, a Method of Measuring a Property, an Inspection Apparatus and a Lithographic Apparatus App 20150346113 - Van De Kerkhof; Marcus Adrianus ; et al.	2015-12-03
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20150346116 - SMILDE; Hendrik Jan Hidde ; et al.	2015-12-03
Metrology method and inspection apparatus, lithographic system and device manufacturing method Grant 9,140,998 - Smilde , et al. September 22, 2	2015-09-22
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,134,256 - Smilde , et al. September 15, 2	2015-09-15
Substrate, an inspection apparatus, and a lithographic apparatus Grant 9,081,304 - Smilde , et al. July 14, 2	2015-07-14
Methods and scatterometers, lithographic systems, and lithographic processing cells Grant 9,081,303 - Cramer , et al. July 14, 2	2015-07-14
Metrology Method and Apparatus, Lithographic System, Device Manufacturing Method and Substrate App 20150145151 - Van Der Schaar; Maurits ; et al.	2015-05-28
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20150138523 - Jak; Martin Jacobus Johan ; et al.	2015-05-21
Methods and scatterometers, lithographic systems, and lithographic processing cells Grant 8,994,944 - Cramer , et al. March 31, 2	2015-03-31
Metrology method and apparatus, and device manufacturing method Grant 8,867,020 - Smilde , et al. October 21, 2	2014-10-21
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20140233031 - VAN DER SCHAAR; Maurits ; et al.	2014-08-21
Metrology Method and Apparatus, and Device Manufacturing Method App 20140204397 - SMILDE; Hendrik Jan Hidde ; et al.	2014-07-24
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells App 20140139814 - CRAMER; Hugo Augustinus Joseph ; et al.	2014-05-22
Substrate and patterning device for use in metrology, metrology method and device manufacturing method Grant 8,709,687 - Van Der Schaar , et al. April 29, 2	2014-04-29
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20130258310 - SMILDE; Hendrik Jan Hidde ; et al.	2013-10-03
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate Grant 8,411,287 - Smilde , et al. April 2, 2	2013-04-02
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20130059240 - Van Der Schaar; Maurits ; et al.	2013-03-07
Metrology Method and Apparatus, and Device Manufacturing Method App 20120242970 - SMILDE; Hendrik Jan Hidde ; et al.	2012-09-27
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,223,347 - Smilde , et al. July 17, 2	2012-07-17
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20120123581 - SMILDE; Hendrik Jan Hidde ; et al.	2012-05-17
Substrate for Use in Metrology, Metrology Method and Device Manufacturing Method App 20120044470 - SMILDE; Hendrik Jan Hidde ; et al.	2012-02-23
Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell App 20120033193 - VAN DER SCHAAR; Maurits ; et al.	2012-02-09
Substrate, a Method of Measuring a Property, an Inspection Apparatus and a Lithographic Apparatus App 20110205518 - Van De Kerkhof; Marcus Adrianus ; et al.	2011-08-25
Substrate, an Inspection Apparatus, and a Lithographic Apparatus App 20110194092 - Smilde; Hendrik Jan Hidde ; et al.	2011-08-11
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate App 20110043791 - Smilde; Hendrik Jan Hidde ; et al.	2011-02-24
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells App 20110027704 - Cramer; Hugo Augustinus Joseph ; et al.	2011-02-03
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20110001978 - SMILDE; Hendrik Jan Hidde ; et al.	2011-01-06