Patent | Date |
---|
Metrology method, target and substrate Grant 11,428,521 - Bhattacharyya , et al. August 30, 2 | 2022-08-30 |
Method and metrology apparatus for determining estimated scattered radiation intensity Grant 11,392,043 - Mossavat , et al. July 19, 2 | 2022-07-19 |
Metrology Method, Target And Substrate App 20220057192 - BHATTACHARYYA; Kaustuve ;   et al. | 2022-02-24 |
Metrology method, target and substrate Grant 11,204,239 - Bhattacharyya , et al. December 21, 2 | 2021-12-21 |
Method of determining a value of a parameter of interest of a patterning process, device manufacturing method Grant 11,181,828 - Warnaar , et al. November 23, 2 | 2021-11-23 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method Grant 11,092,900 - Van Der Schaar , et al. August 17, 2 | 2021-08-17 |
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method App 20200379359 - SMILDE; Hendrik Jan Hidde ;   et al. | 2020-12-03 |
Metrology Method, Target And Substrate App 20200348125 - BHATTACHARYYA; Kaustuve ;   et al. | 2020-11-05 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 10,739,687 - Smilde , et al. A | 2020-08-11 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,725,386 - Middlebrooks , et al. | 2020-07-28 |
Metrology method, target and substrate Grant 10,718,604 - Bhattacharyya , et al. | 2020-07-21 |
Method Of Determining A Value Of A Parameter Of Interest Of A Patterning Process, Device Manufacturing Method App 20200133140 - WARNAAR; Patrick ;   et al. | 2020-04-30 |
Method and Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method App 20200073254 - VAN DER SCHAAR; Maurits ;   et al. | 2020-03-05 |
Method and Metrology Apparatus for Determining Estimated Scattered Radiation Intensity App 20200057386 - MOSSAVAT; Seyed Iman ;   et al. | 2020-02-20 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method Grant 10,481,503 - Van Der Schaar , et al. Nov | 2019-11-19 |
Metrology Method, Target And Substrate App 20190346256 - BHATTACHARYYA; Kaustuve ;   et al. | 2019-11-14 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20190278190 - MIDDLEBROOKS; Scott Anderson ;   et al. | 2019-09-12 |
Metrology method, target and substrate Grant 10,386,176 - Bhattacharyya , et al. A | 2019-08-20 |
Optimization of target arrangement and associated target Grant 10,331,043 - Van Buel , et al. | 2019-06-25 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,331,041 - Middlebrooks , et al. | 2019-06-25 |
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method App 20190094712 - SMILDE; Hendrik Jan Hidde ;   et al. | 2019-03-28 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20190049860 - MIDDLEBROOKS; Scott Anderson ;   et al. | 2019-02-14 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 10,162,271 - Smilde , et al. Dec | 2018-12-25 |
Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method Grant 10,162,272 - Jak , et al. Dec | 2018-12-25 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 10,126,662 - Middlebrooks , et al. November 13, 2 | 2018-11-13 |
Method, apparatus and substrates for lithographic metrology Grant 10,042,268 - Smilde , et al. August 7, 2 | 2018-08-07 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20180196357 - Middlebrooks; Scott Anderson ;   et al. | 2018-07-12 |
Metrology method and inspection apparatus, lithographic system and device manufacturing method Grant 9,946,167 - Smilde , et al. April 17, 2 | 2018-04-17 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,910,366 - Middlebrooks , et al. March 6, 2 | 2018-03-06 |
Metrology method and apparatus, computer program and lithographic system Grant 9,879,988 - Liu , et al. January 30, 2 | 2018-01-30 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,811,003 - Jak , et al. November 7, 2 | 2017-11-07 |
Metrology Method and Apparatus, Lithographic System, Device Manufacturing Method and Substrate App 20170314915 - Van Der Schaar; Maurits ;   et al. | 2017-11-02 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,719,945 - Smilde , et al. August 1, 2 | 2017-08-01 |
Metrology method and apparatus, lithographic system, device manufacturing method and substrate Grant 9,714,827 - Van Der Schaar , et al. July 25, 2 | 2017-07-25 |
Optimization Of Target Arrangement And Associated Target App 20170176871 - VAN BUEL; Henricus Wilhelmus Maria ;   et al. | 2017-06-22 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20170068173 - JAK; Martin Jacobus Johan ;   et al. | 2017-03-09 |
Method And Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method App 20170059999 - VAN DER SCHAAR; Maurits ;   et al. | 2017-03-02 |
Metrology Method And Apparatus, Substrates For Use In Such Methods, Lithographic System And Device Manufacturing Method App 20170052454 - JAK; Martin Jacobus Johan ;   et al. | 2017-02-23 |
Metrology method and apparatus, and device manufacturing method Grant 9,535,342 - Smilde , et al. January 3, 2 | 2017-01-03 |
Metrology method and apparatus, substrate, lithographic system and device manufacturing method Grant 9,535,338 - Jak , et al. January 3, 2 | 2017-01-03 |
Metrology Method And Apparatus, Substrate, Lithographic System And Device Manufacturing Method App 20160334715 - SMILDE; Hendrik Jan Hidde ;   et al. | 2016-11-17 |
Method, Apparatus and Substrates for Lithographic Metrology App 20160291481 - SMILDE; Hendrik Jan Hidde ;   et al. | 2016-10-06 |
Metrology Method and Apparatus, Computer Program and Lithographic System App 20160223322 - LIU; Xing Lan ;   et al. | 2016-08-04 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20160179019 - VAN DER SCHAAR; Maurits ;   et al. | 2016-06-23 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20160161864 - MIDDLEBROOKS; Scott Anderson ;   et al. | 2016-06-09 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method Grant 9,331,022 - Van Der Schaar , et al. May 3, 2 | 2016-05-03 |
Metrology Method, Target And Substrate App 20160061589 - BHATTACHARYYA; Kaustuve ;   et al. | 2016-03-03 |
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus Grant 9,255,892 - Van De Kerkhof , et al. February 9, 2 | 2016-02-09 |
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20160033877 - SMILDE; Hendrik Jan Hidde ;   et al. | 2016-02-04 |
Inspection apparatus and method for measuring a property of a substrate Grant 9,235,141 - Van Der Schaar , et al. January 12, 2 | 2016-01-12 |
Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus Grant 9,229,338 - Van De Kerkhof , et al. January 5, 2 | 2016-01-05 |
Substrate, a Method of Measuring a Property, an Inspection Apparatus and a Lithographic Apparatus App 20150346113 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2015-12-03 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20150346116 - SMILDE; Hendrik Jan Hidde ;   et al. | 2015-12-03 |
Metrology method and inspection apparatus, lithographic system and device manufacturing method Grant 9,140,998 - Smilde , et al. September 22, 2 | 2015-09-22 |
Metrology method and apparatus, lithographic system and device manufacturing method Grant 9,134,256 - Smilde , et al. September 15, 2 | 2015-09-15 |
Substrate, an inspection apparatus, and a lithographic apparatus Grant 9,081,304 - Smilde , et al. July 14, 2 | 2015-07-14 |
Methods and scatterometers, lithographic systems, and lithographic processing cells Grant 9,081,303 - Cramer , et al. July 14, 2 | 2015-07-14 |
Metrology Method and Apparatus, Lithographic System, Device Manufacturing Method and Substrate App 20150145151 - Van Der Schaar; Maurits ;   et al. | 2015-05-28 |
Metrology Method and Apparatus, Substrate, Lithographic System and Device Manufacturing Method App 20150138523 - Jak; Martin Jacobus Johan ;   et al. | 2015-05-21 |
Methods and scatterometers, lithographic systems, and lithographic processing cells Grant 8,994,944 - Cramer , et al. March 31, 2 | 2015-03-31 |
Metrology method and apparatus, and device manufacturing method Grant 8,867,020 - Smilde , et al. October 21, 2 | 2014-10-21 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20140233031 - VAN DER SCHAAR; Maurits ;   et al. | 2014-08-21 |
Metrology Method and Apparatus, and Device Manufacturing Method App 20140204397 - SMILDE; Hendrik Jan Hidde ;   et al. | 2014-07-24 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells App 20140139814 - CRAMER; Hugo Augustinus Joseph ;   et al. | 2014-05-22 |
Substrate and patterning device for use in metrology, metrology method and device manufacturing method Grant 8,709,687 - Van Der Schaar , et al. April 29, 2 | 2014-04-29 |
Metrology Method and Apparatus, Lithographic System and Device Manufacturing Method App 20130258310 - SMILDE; Hendrik Jan Hidde ;   et al. | 2013-10-03 |
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate Grant 8,411,287 - Smilde , et al. April 2, 2 | 2013-04-02 |
Substrate and Patterning Device for Use in Metrology, Metrology Method and Device Manufacturing Method App 20130059240 - Van Der Schaar; Maurits ;   et al. | 2013-03-07 |
Metrology Method and Apparatus, and Device Manufacturing Method App 20120242970 - SMILDE; Hendrik Jan Hidde ;   et al. | 2012-09-27 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 8,223,347 - Smilde , et al. July 17, 2 | 2012-07-17 |
Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method App 20120123581 - SMILDE; Hendrik Jan Hidde ;   et al. | 2012-05-17 |
Substrate for Use in Metrology, Metrology Method and Device Manufacturing Method App 20120044470 - SMILDE; Hendrik Jan Hidde ;   et al. | 2012-02-23 |
Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell App 20120033193 - VAN DER SCHAAR; Maurits ;   et al. | 2012-02-09 |
Substrate, a Method of Measuring a Property, an Inspection Apparatus and a Lithographic Apparatus App 20110205518 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2011-08-25 |
Substrate, an Inspection Apparatus, and a Lithographic Apparatus App 20110194092 - Smilde; Hendrik Jan Hidde ;   et al. | 2011-08-11 |
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate App 20110043791 - Smilde; Hendrik Jan Hidde ;   et al. | 2011-02-24 |
Methods and Scatterometers, Lithographic Systems, and Lithographic Processing Cells App 20110027704 - Cramer; Hugo Augustinus Joseph ;   et al. | 2011-02-03 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method App 20110001978 - SMILDE; Hendrik Jan Hidde ;   et al. | 2011-01-06 |