Smeets; Erik Marie Jose

Patent Applications and Registrations

Patent applications and USPTO patent grants for Smeets; Erik Marie Jose.The latest application filed is for "substrate distortion measurement".

Company Profile

0.9.7

Smeets; Erik Marie Jose - Prinsenbeek N/A NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate distortion measurement Grant 9,645,512 - Smeets May 9, 2	2017-05-09
Substrate Distortion Measurement App 20120270150 - SMEETS; Erik Marie Jose	2012-10-25
Substrate distortion measurement Grant 8,194,242 - Derksen , et al. June 5, 2	2012-06-05
Substrate distortion measurement Grant 8,139,218 - Smeets March 20, 2	2012-03-20
Lithographic apparatus and device manufacturing method Grant 7,936,447 - Derksen , et al. May 3, 2	2011-05-03
Lithographic Apparatus, Positioning System, And Positioning Method App 20100265487 - SMEETS; Erik Marie Jose	2010-10-21
Lithographic apparatus and method for masking a substrate Grant 7,808,612 - Wakker , et al. October 5, 2	2010-10-05
Lithographic apparatus with mask to prevent exposure of peripheral exposure region of substrate Grant 7,777,863 - Smeets , et al. August 17, 2	2010-08-17
Lithographic apparatus App 20080297748 - Smeets; Erik Marie Jose ; et al.	2008-12-04
Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method Grant 7,398,177 - Smeets , et al. July 8, 2	2008-07-08
Lithographic apparatus and device manufacturing method Grant 7,359,030 - Simon , et al. April 15, 2	2008-04-15
Lithographic apparatus and method App 20080055577 - Smeets; Erik Marie Jose ; et al.	2008-03-06
Substrate distortion measurement App 20070008531 - Smeets; Erik Marie Jose	2007-01-11
Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method App 20060085161 - Smeets; Erik Marie Jose ; et al.	2006-04-20
Lithographic apparatus and device manufacturing method App 20040135099 - Simon, Klaus ; et al.	2004-07-15

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