| Patent | Date |
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Systems and approaches for semiconductor metrology and surface analysis using Secondary Ion Mass Spectrometry
Grant 11,430,647 - Reed , et al. August 30, 2 | 2022-08-30 |
Systems And Approaches For Semiconductor Metrology And Surface Analysis Using Secondary Ion Mass Spectrometry
App 20210305037 - REED; David A. ; et al. | 2021-09-30 |
System And Method For Measuring A Sample By X-ray Reflectance Scatterometry
App 20210164924 - POIS; Heath ; et al. | 2021-06-03 |
Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry
Grant 10,910,208 - Reed , et al. February 2, 2 | 2021-02-02 |
Methods and systems for measuring periodic structures using multi-angle x-ray reflectance scatterometry (XRS)
Grant 10,859,519 - Pois , et al. December 8, 2 | 2020-12-08 |
Systems And Approaches For Semiconductor Metrology And Surface Analysis Using Secondary Ion Mass Spectrometry
App 20200258733 - A1 | 2020-08-13 |
Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry
Grant 10,636,644 - Reed , et al. | 2020-04-28 |
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs)
App 20200088656 - Pois; Heath A. ; et al. | 2020-03-19 |
Systems And Approaches For Semiconductor Metrology And Surface Analysis Using Secondary Ion Mass Spectrometry
App 20190385831 - REED; David A. ; et al. | 2019-12-19 |
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
Grant 10,481,112 - Pois , et al. Nov | 2019-11-19 |
Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry
Grant 10,403,489 - Reed , et al. Sep | 2019-09-03 |
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs)
App 20190086342 - Pois; Heath A. ; et al. | 2019-03-21 |
Systems And Approaches For Semiconductor Metrology And Surface Analysis Using Secondary Ion Mass Spectrometry
App 20180330935 - REED; David A. ; et al. | 2018-11-15 |
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
Grant 10,119,925 - Pois , et al. November 6, 2 | 2018-11-06 |
Systems and approaches for semiconductor metrology and surface analysis using secondary ion mass spectrometry
Grant 10,056,242 - Reed , et al. August 21, 2 | 2018-08-21 |
Systems And Approaches For Semiconductor Metrology And Surface Analysis Using Secondary Ion Mass Spectrometry
App 20180025897 - REED; David A. ; et al. | 2018-01-25 |
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs)
App 20170176354 - Pois; Heath A. ; et al. | 2017-06-22 |
Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS)
Grant 9,588,066 - Pois , et al. March 7, 2 | 2017-03-07 |
Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy
Grant 9,297,771 - Fanton , et al. March 29, 2 | 2016-03-29 |
System and method for characterizing a film by X-ray photoelectron and low-energy X-ray fluorescence spectroscopy
Grant 9,240,254 - Schueler , et al. January 19, 2 | 2016-01-19 |
Methods And Systems For Measuring Periodic Structures Using Multi-angle X-ray Reflectance Scatterometry (xrs)
App 20150204802 - Pois; Heath A. ; et al. | 2015-07-23 |
Methods and Systems for Fabricating Platelets of a Monochromator for X-ray Photoelectron Spectroscopy
App 20150052723 - Fanton; Jeffrey T. ; et al. | 2015-02-26 |
Methods and Systems for Determining a Critical Dimension and Overlay of a Specimen
App 20130314710 - Levy; Ady ; et al. | 2013-11-28 |
Methods and systems for determining a critical dimension and overlay of a specimen
Grant 8,502,979 - Levy , et al. August 6, 2 | 2013-08-06 |
System And Method For Characterizing A Film By X-ray Photoelectron And Low-energy X-ray Fluorescence Spectroscopy
App 20130077742 - Schueler; Bruno W. ; et al. | 2013-03-28 |
Methods And Systems For Determining A Critical Dimension And Overlay Of A Specimen
App 20130039460 - Levy; Ady ; et al. | 2013-02-14 |
Methods and systems for determining a critical dimension and overlay of a specimen
Grant 8,179,530 - Levy , et al. May 15, 2 | 2012-05-15 |
Methods And Systems For Determining A Critical Dimension And Overlay Of A Specimen
App 20100271621 - Levy; Ady ; et al. | 2010-10-28 |
Methods and systems for determining a critical dimension and overlay of a specimen
Grant 7,751,046 - Levy , et al. July 6, 2 | 2010-07-06 |
System for measuring periodic structures
Grant 7,433,037 - Zhao , et al. October 7, 2 | 2008-10-07 |
Measurement of overlay using diffraction gratings when overlay exceeds the grating period
Grant 7,193,715 - Smedt , et al. March 20, 2 | 2007-03-20 |
System for measuring periodic structures
App 20050099627 - Zhao, Guoheng ; et al. | 2005-05-12 |
Accurate small-spot spectrometry systems and methods
Grant 6,870,617 - Norton , et al. March 22, 2 | 2005-03-22 |
Methods and systems for determining a critical dimension and overlay of a specimen
App 20040235205 - Levy, Ady ; et al. | 2004-11-25 |
Accurate small-spot spectrometry systems and methods
App 20040174524 - Norton, Adam ; et al. | 2004-09-09 |
System for measuring periodic structures
App 20040141177 - Zhao, Guoheng ; et al. | 2004-07-22 |
Measurement of overlay using diffraction gratings when overlay exceeds the grating period
App 20040137651 - Smedt, Rodney ; et al. | 2004-07-15 |
Accurate small-spot spectrometry instrument
Grant 6,738,136 - Norton , et al. May 18, 2 | 2004-05-18 |
Systems for measuring periodic structures
Grant 6,721,052 - Zhao , et al. April 13, 2 | 2004-04-13 |
Accurate small-spot spectrometry instrument
App 20030090655 - Norton, Adam ; et al. | 2003-05-15 |
Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen
App 20020180985 - Wack, Dan ; et al. | 2002-12-05 |
Systems for measuring periodic structures
App 20020105646 - Zhao, Guoheng ; et al. | 2002-08-08 |
Semiconductor device inspection apparatus using a plurality of reflective elements
Grant 5,043,589 - Smedt , et al. August 27, 1 | 1991-08-27 |
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