Slotboom; Daan Maurits

Patent Applications and Registrations

Patent applications and USPTO patent grants for Slotboom; Daan Maurits.The latest application filed is for "a method for characterizing a manufacturing process of semiconductor devices".

Company Profile

6.10.15

Slotboom; Daan Maurits - Wolphaartsdijk NL
Slotboom; Daan Maurits - Veldhoven NL
Slotboom; Daan Maurits - Rhenen NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method and apparatus for configuring spatial dimensions of a beam during a scan Grant 11,366,396 - Slotboom , et al. June 21, 2	2022-06-21
A Method For Characterizing A Manufacturing Process Of Semiconductor Devices App 20220100098 - TEL; Wim Tjibbo ; et al.	2022-03-31
Method Of Manufacturing Devices App 20210397172 - SLACHTER; Abraham ; et al.	2021-12-23
Method And Apparatus For Configuring Spatial Dimensions Of A Beam During A Scan App 20210302843 - SLOTBOOM; Daan Maurits ; et al.	2021-09-30
Method For Controlling A Manufacturing Apparatus And Associated Apparatuses App 20210247700 - SIEMONS; Wolter ; et al.	2021-08-12
Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus Grant 10,908,512 - Slotboom , et al. February 2, 2	2021-02-02
Method and apparatus to correct for patterning process error Grant 10,719,011 - Ten Berge , et al.	2020-07-21
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate Grant 10,444,632 - Slotboom , et al. Oc	2019-10-15
Metrology method, target and substrate Grant 10,254,658 - Slotboom , et al.	2019-04-09
Methods Of Controlling A Patterning Process, Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus App 20180373162 - SLOTBOOM; Daan Maurits ; et al.	2018-12-27
Apparatus Operable To Perform A Measurement Operation On A Substrate, Lithographic Apparatus, And Method Of Performing A Measurement Operation On A Substrate App 20180364582 - SLOTBOOM; Daan Maurits ; et al.	2018-12-20
Alignment modeling and a lithographic apparatus and exposure method using the same Grant 10,095,131 - Kramer , et al. October 9, 2	2018-10-09
Method And Apparatus To Correct For Patterning Process Error App 20180252998 - TEN BERGE; Peter ; et al.	2018-09-06
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 10,025,193 - Cekli , et al. July 17, 2	2018-07-17
Apparatus operable to perform a measurement operation on a substrate, lithographic apparatus, and method of performing a measurement operation on a substrate Grant 9,989,858 - Slotboom , et al. June 5, 2	2018-06-05
Lithography system and a machine learning controller for such a lithography system Grant 9,971,251 - Schmitt-Weaver , et al. May 15, 2	2018-05-15
Lithographic Apparatus And Exposure Method App 20170108783 - KRAMER; Pieter Jacob ; et al.	2017-04-20
Metrology Method, Target and Substrate App 20170090302 - SLOTBOOM; DAAN MAURITS ; et al.	2017-03-30
Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product Grant 9,507,279 - Schmitt-Weaver , et al. November 29, 2	2016-11-29
Apparatus Operable To Perform A Measurement Operation On A Substrate, Lithographic Apparatus, And Method Of Performing A Measurement Operation On A Substrate App 20160334713 - SLOTBOOM; Daan Maurits ; et al.	2016-11-17
Lithographic Apparatus, Device Manufacturing Method And Associated Data Processing Apparatus And Computer Program Product App 20160334712 - CEKLI; Hakki Ergun ; et al.	2016-11-17
Lithography System And A Machine Learning Controller For Such A Lithography System App 20160170311 - SCHMITT-WEAVER; Emil Peter ; et al.	2016-06-16
Method of Operating a Lithographic Apparatus, Device Manufacturing Method and Associated Data Processing Apparatus and Computer Program Product App 20140168627 - SCHMITT-WEAVER; Emil Peter ; et al.	2014-06-19
Method Of Calculating Model Parameters Of A Substrate, A Lithographic Apparatus And An Apparatus For Controlling Lithographic Processing By A Lithographic Apparatus App 20120218533 - LYULINA; Irina ; et al.	2012-08-30
Object Alignment Measurement Method and Apparatus App 20110013188 - SLOTBOOM; Daan Maurits ; et al.	2011-01-20

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