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Patent applications and USPTO patent grants for Skvortsov; Dmitry.The latest application filed is for "integration of an optical height sensor in mask inspection tools".
Patent | Date |
---|---|
Broadband light interferometry for focal-map generation in photomask inspection Grant 11,442,021 - Shi , et al. September 13, 2 | 2022-09-13 |
Integration of an Optical Height Sensor in Mask Inspection Tools App 20220196572 - Marks; Zefram ;   et al. | 2022-06-23 |
Broadband Light Interferometry for Focal-Map Generation in Photomask Inspection App 20210109030 - Shi; Rui-Fang ;   et al. | 2021-04-15 |
Systems And Method For Laser Voltage Imaging State Mapping App 20160139200 - Ng; Yin Shyang ;   et al. | 2016-05-19 |
Systems and method for laser voltage imaging state mapping Grant 9,244,121 - Ng , et al. January 26, 2 | 2016-01-26 |
Systems And Method For Laser Voltage Imaging State Mapping App 20140292363 - Ng; Yin Shyang ;   et al. | 2014-10-02 |
Systems and method for laser voltage imaging state mapping Grant 8,754,633 - Ng , et al. June 17, 2 | 2014-06-17 |
Systems And Method For Laser Voltage Imaging State Mapping App 20100277159 - NG; Yin Shyang ;   et al. | 2010-11-04 |
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