Skelly; Sonia Margart
Patent Applications and Registrations
Patent applications and USPTO patent grants for Skelly; Sonia Margart.The latest application filed is for "controlling the flow through the collector during cleaning".
- Skelly; Sonia Margart - Veldhoven NL
| Patent | Date |
|---|---|
| Controlling the flow through the collector during cleaning Grant 7,465,943 - Banine , et al. December 16, 2 | 2008-12-16 |
| Lithographic apparatus and device manufacturing method Grant 7,342,237 - Severijns , et al. March 11, 2 | 2008-03-11 |
| Controlling the flow through the collector during cleaning App 20070131878 - Banine; Vadim Yevgenyevich ; et al. | 2007-06-14 |
| Lithographic apparatus and device manufacturing method App 20060197036 - Severijns; Ronald Walther Jeanne ; et al. | 2006-09-07 |
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