| Patent | Date |
|---|
Method And Apparatus For Growing Silicon Single Crystal Ingot
App 20220251724 - HWANG; Hyun Ju ; et al. | 2022-08-11 |
Method And Apparatus Of Evaluating Quality Of Wafer Or Single Crystal Ingot
App 20220237771 - PARK; Hyun Woo | 2022-07-28 |
Apparatus Of Oxidation-combusting An Ingot Grower And Method Thereof
App 20220235485 - KIM; Jung Ryul | 2022-07-28 |
Raw Material Feed Hopper And Single Crystal Growth System
App 20220228289 - LEE; Sang Heon ; et al. | 2022-07-21 |
Polishing measurement device and abrasion time controlling method thereof, and polishing control system including same
Grant 11,389,922 - Han , et al. July 19, 2 | 2022-07-19 |
Air Circulation System And Final Polishing Apparatus Including The Same
App 20220219288 - Choi; Yong | 2022-07-14 |
Wafer carrier thickness measuring device
Grant 11,371,829 - Jung June 28, 2 | 2022-06-28 |
Apparatus Of Cleaning A Polishing Pad And Polishing Device
App 20220161390 - CHO; Ji Hwan | 2022-05-26 |
Silicon single crystal growth method and apparatus
Grant 11,332,848 - Kang , et al. May 17, 2 | 2022-05-17 |
Wafer Evaluation Method
App 20220148925 - PARK; Jung Kil ; et al. | 2022-05-12 |
Single Crystal Ingot Growth Control Device
App 20220127749 - PARK; Hyun Woo | 2022-04-28 |
Slurry cooling device and slurry supply system having the same
Grant 11,253,970 - Lee February 22, 2 | 2022-02-22 |
Silicon supply part, and device and method for growing silicon monocrystalline ingot comprising same
Grant 11,255,023 - Kong , et al. February 22, 2 | 2022-02-22 |
Wafer And Method For Analyzing Shape Thereof
App 20220018788 - LEE; Chung Hyun | 2022-01-20 |
Apparatus for growing single crystalline ingot and method for growing same
Grant 11,214,891 - Song , et al. January 4, 2 | 2022-01-04 |
Temperature control device for single crystal ingot growth and temperature control method applied thereto
Grant 11,198,948 - Park , et al. December 14, 2 | 2021-12-14 |
Wafer polishing apparatus
Grant 11,198,207 - Choi December 14, 2 | 2021-12-14 |
Silicon Single Crystal Growth Method And Apparatus
App 20210372002 - KANG; Jong Min ; et al. | 2021-12-02 |
Wafer cleaning apparatus and cleaning method using the same
Grant 11,152,228 - Yi October 19, 2 | 2021-10-19 |
Method For Evaluating Defective Region Of Wafer
App 20210320037 - LEE; Jae Hyeong | 2021-10-14 |
First Cleaning Apparatus, Cleaning Equipment Including The Same, And Cleaning Method
App 20210242041 - KWON; Ki Soo ; et al. | 2021-08-05 |
Polishing Measurement Device And Abrasion Time Controlling Method Thereof, And Polishing Control System Including Same
App 20210205948 - HAN; Kee Yun ; et al. | 2021-07-08 |
Wafer with beveled edge region and method for analyzing shape of the same
Grant 11,056,403 - Lee , et al. July 6, 2 | 2021-07-06 |
Wafer Carrier Thickness Measuring Device
App 20210164769 - JUNG; Suk Jin | 2021-06-03 |
Ingot growth control device and control method thereof
Grant 10,975,494 - Park , et al. April 13, 2 | 2021-04-13 |
Pulling control device for single crystal ingot growth and pulling control method applied thereto
Grant 10,968,534 - Park April 6, 2 | 2021-04-06 |
Wafer Cassette Stocker And Wafer Cassette Drying Method Using The Same
App 20210074565 - KIM; Dae Won ; et al. | 2021-03-11 |
Driving unit measuring apparatus and silicon crystal growing apparatus having same
Grant 10,920,338 - Kim February 16, 2 | 2021-02-16 |
Crucible For Ingot Grower
App 20210032768 - KANG; In Gu ; et al. | 2021-02-04 |
Wafer Cleaning Device
App 20210035822 - HA; Se Geun | 2021-02-04 |
Driving Unit Measuring Apparatus And Silicon Crystal Growing Apparatus Having Same
App 20210025076 - KIM; Woo Tae | 2021-01-28 |
Ingot clamping device and wire sawing apparatus for slicing ingot having the same
Grant 10,882,214 - Kim , et al. January 5, 2 | 2021-01-05 |
Wafer Edge Polishing Unit, And Apparatus And Method For Polishing Wafer Edge Comprising Same
App 20200365389 - JANG; Jun Young | 2020-11-19 |
Polishing Pad For Wafer Polishing Apparatus And Manufacturing Method Therefor
App 20200353587 - AHN; Jin Woo | 2020-11-12 |
Apparatus of controlling temperature in wafer cleaning equipment and method thereof
Grant 10,818,526 - Ha October 27, 2 | 2020-10-27 |
Apparatus and method for measuring particle on surface of wafer
Grant 10,782,247 - Kim , et al. Sept | 2020-09-22 |
Surface plate cleaning apparatus
Grant 10,780,548 - Jung Sept | 2020-09-22 |
Wafer polishing chamber and wafer polishing system including same
Grant 10,784,112 - Lee Sept | 2020-09-22 |
Semiconductor substrate manufacturing method
Grant 10,755,989 - Lee , et al. A | 2020-08-25 |
Dressing apparatus and wafer polishing apparatus comprising same
Grant 10,737,366 - Lee A | 2020-08-11 |
Silicon Supply Part, And Device And Method For Growing Silicon Monocrystalline Ingot Comprising Same
App 20200232116 - KONG; Jung Hyun ; et al. | 2020-07-23 |
Wafer Cassette Packing Apparatus
App 20200219741 - YUN; Tae Ju ; et al. | 2020-07-09 |
Apparatus And Method For Measuring Particle On Surface Of Wafer
App 20200158660 - KIM; Kang San ; et al. | 2020-05-21 |
Growing apparatus and single-crystal ingot growing method using the same
Grant 10,655,242 - Kang , et al. | 2020-05-19 |
Method of identifying defect regions in wafer
Grant 10,634,622 - Lee | 2020-04-28 |
Method for predicting thickness of oxide layer of silicon wafer
Grant 10,615,085 - Park , et al. | 2020-04-07 |
Polishing Pad For Wafer Polishing Apparatus
App 20200078901 - LEE; Seung Won | 2020-03-12 |
Method for manufacturing silicon single crystal ingot, and silicon single crystal ingot manufactured by the method
Grant 10,577,718 - Kang , et al. | 2020-03-03 |
Semiconductor Substrate Manufacturing Method
App 20200066605 - LEE; Kyung Sun ; et al. | 2020-02-27 |
Manufacturing method for flexible device, flexible device, solar cell, and light emitting device
Grant 10,566,477 - Lee , et al. Feb | 2020-02-18 |
Method of preparing for reactor restart for manufacturing epitaxial wafer
Grant 10,550,465 - Kang , et al. Fe | 2020-02-04 |
Wafer and wafer defect analysis method
Grant 10,541,181 - Lee Ja | 2020-01-21 |
Wafer polishing system
Grant 10,525,568 - Baek , et al. J | 2020-01-07 |
Ingot Growth Control Device And Control Method Thereof
App 20190390364 - PARK; Hyun Woo ; et al. | 2019-12-26 |
Apparatus For Growing Single Crystalline Ingot And Method For Growing Same
App 20190382915 - SONG; Do-Won ; et al. | 2019-12-19 |
Ingot pressing apparatus and ingot slicing apparatus including the same
Grant 10,486,333 - Jeon Nov | 2019-11-26 |
Apparatus for growing single crystalline ingot and method for growing same
Grant 10,435,809 - Song , et al. O | 2019-10-08 |
Wafer And Wafer Defect Analysis Method
App 20190267294 - LEE; Jae Hyeong | 2019-08-29 |
Wire sawing apparatus
Grant 10,391,673 - Jeon , et al. A | 2019-08-27 |
Control system and control method for diameter of single crystal ingot
Grant 10,385,472 - Kim , et al. A | 2019-08-20 |
Method for growing single crystal
Grant 10,378,122 - Kang , et al. A | 2019-08-13 |
Ingot slicing apparatus
Grant 10,377,056 - Jeon A | 2019-08-13 |
Pulling Control Device For Single Crystal Ingot Growth And Pulling Control Method Applied Thereto
App 20190218683 - PARK; Hyun Woo | 2019-07-18 |
Wafer Polishing Apparatus
App 20190210182 - CHOI; Yong | 2019-07-11 |
Slurry Cooling Device And Slurry Supply System Having The Same
App 20190210186 - LEE; Sang Ho | 2019-07-11 |
Temperature Control Device For Single Crystal Ingot Growth And Temperature Control Method Applied Thereto
App 20190211471 - PARK; Hyun Woo ; et al. | 2019-07-11 |
Apparatus and method for growing silicon single crystal ingot
Grant 10,344,395 - Hong , et al. July 9, 2 | 2019-07-09 |
Wafer grinding device
Grant 10,343,257 - Jang July 9, 2 | 2019-07-09 |
Ingot Clamping Device And Wire Sawing Apparatus For Slicing Ingot Having The Same
App 20190184603 - KIM; Woo Tae ; et al. | 2019-06-20 |
Wafer and wafer defect analysis method
Grant 10,325,823 - Lee | 2019-06-18 |
Method Of Identifying Defect Regions In Wafer
App 20190170661 - LEE; Jae Hyeong | 2019-06-06 |
Wafer And Method For Analyzing Shape Of The Same
App 20190131192 - LEE; Woo Sung ; et al. | 2019-05-02 |
Method For Predicting Thickness Of Oxide Layer Of Silicon Wafer
App 20190131191 - PARK; Jung Kil ; et al. | 2019-05-02 |
Wafer polishing apparatus and wafer polishing method using same
Grant 10,259,097 - Park | 2019-04-16 |
Semiconductor substrate for controlling a strain
Grant 10,256,368 - Eum , et al. | 2019-04-09 |
Defect measuring device for wafers
Grant 10,255,669 - Kang , et al. | 2019-04-09 |
Method Of Preparing For Reactor Restart For Manufacturing Epitaxial Wafer
App 20190093215 - KANG; Dong-Ho ; et al. | 2019-03-28 |
Monocrystal growth system and method capable of controlling shape of ingot interface
Grant 10,214,834 - Bang Feb | 2019-02-26 |
Wafer Cleaning Apparatus And Cleaning Method Using The Same
App 20190057883 - YI; Jae Hwan | 2019-02-21 |
Silicon Single Crystal Ingot Cooling Tube And Silicon Single Crystal Ingot Growth Apparatus Having The Same
App 20190055666 - HWANG; Jung Ha ; et al. | 2019-02-21 |
Apparatus Of Controlling Temperature In Wafer Cleaning Equipment And Method Thereof
App 20190035656 - HA; Se Geun | 2019-01-31 |
Wafer transfer device
Grant 10,192,794 - Kim Ja | 2019-01-29 |
Growing Apparatus And Single-crystal Ingot Growing Method Using The Same
App 20190017191 - KANG; In Gu ; et al. | 2019-01-17 |
Wafer Polishing Chamber And Wafer Polishing System Including Same
App 20190013205 - LEE; Sang Ho | 2019-01-10 |
Single Crystal Ingot Growing Apparatus
App 20190003075 - KANG; In Gu ; et al. | 2019-01-03 |
Cooling rate control apparatus and ingot growing apparatus including same
Grant 10,145,024 - Lee , et al. De | 2018-12-04 |
Scanning Device And Scanning System For Wafer Polishing Apparatus
App 20180335302 - JUNG; Suk Jin | 2018-11-22 |
Silicon single crystal growing apparatus and silocon single crystal growing method using same
Grant 10,072,352 - Kim , et al. September 11, 2 | 2018-09-11 |
Single crystal growing apparatus
Grant 10,066,315 - Bang , et al. September 4, 2 | 2018-09-04 |
Wafer loading apparatus of wafer polishing equipment and method for adjusting wafer loading position
Grant 10,068,785 - Bae September 4, 2 | 2018-09-04 |
Dressing Apparatus And Wafer Polishing Apparatus Comprising Same
App 20180243882 - LEE; Seung Won | 2018-08-30 |
Wafer polishing apparatus and method
Grant 10,062,574 - Ahn , et al. August 28, 2 | 2018-08-28 |
Method For Growing Single Crystal
App 20180237937 - KANG; In-Gu ; et al. | 2018-08-23 |
Apparatus For Growing Single Crystalline Ingot And Method For Growing Same
App 20180237939 - SONG; Do-Won ; et al. | 2018-08-23 |
Wafer And Wafer Defect Analysis Method
App 20180190547 - LEE; Jae Hyeong | 2018-07-05 |
View port for observing ingot growth process and ingot growth apparatus including same
Grant 9,994,969 - Kim , et al. June 12, 2 | 2018-06-12 |
Ingot Slicing Apparatus
App 20180133927 - JEON; Ji Won | 2018-05-17 |
Apparatus And Meth0d For Growing Silicon Single Crystal Ingot
App 20180094359 - HONG; Young Ho ; et al. | 2018-04-05 |
Silicon single crystal wafer, manufacturing method thereof and method of detecting defects
Grant 9,917,022 - Sim March 13, 2 | 2018-03-13 |
Semiconductor substrate
Grant 9,905,656 - Lee , et al. February 27, 2 | 2018-02-27 |
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