Sivakumar; Swaminathan Sam
Patent Applications and Registrations
Patent applications and USPTO patent grants for Sivakumar; Swaminathan Sam.The latest application filed is for "sub-resolution assist features".
- Sivakumar; Swaminathan Sam - Portland OR
- Sivakumar; Swaminathan (Sam) - Sam
| Patent | Date |
|---|---|
| Sub-resolution assist features Grant 7,759,028 - Wallace , et al. July 20, 2 | 2010-07-20 |
| Sub-resolution Assist Features App 20100068633 - WALLACE; CHARLES H. ; et al. | 2010-03-18 |
| Sub-resolution assist features Grant 7,632,610 - Wallace , et al. December 15, 2 | 2009-12-15 |
| Accommodating diffraction in the printing of features on a substrate Grant 7,288,344 - Frost , et al. October 30, 2 | 2007-10-30 |
| Sub-resolution assist features App 20060046160 - Wallace; Charles H. ; et al. | 2006-03-02 |
| Multiple exposure technique to pattern tight contact geometries Grant 6,968,532 - Sivakumar , et al. November 22, 2 | 2005-11-22 |
| Accommodating diffraction in the printing of features on a substrate App 20050097502 - Frost, Rex K. ; et al. | 2005-05-05 |
| Multiple exposure technique to pattern tight contact geometries App 20050081178 - Sivakumar, Swaminathan (Sam) ; et al. | 2005-04-14 |
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