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Patent applications and USPTO patent grants for Siu; Tsz-Sin.The latest application filed is for "textured membrane for a multi-chamber carrier head".
Patent | Date |
---|---|
Textured membrane for a multi-chamber carrier head Grant 10,702,971 - Oh , et al. | 2020-07-07 |
Textured Membrane For A Multi-chamber Carrier Head App 20170001282 - Oh; Jeonghoon ;   et al. | 2017-01-05 |
Textured membrane for a multi-chamber carrier head Grant 9,452,505 - Oh , et al. September 27, 2 | 2016-09-27 |
Textured Membrane For A Multi-chamber Carrier Head App 20150038065 - Oh; Jeonghoon ;   et al. | 2015-02-05 |
Multi-chamber carrier head with a textured membrane Grant 8,808,062 - Oh , et al. August 19, 2 | 2014-08-19 |
Multi-chamber Carrier Head With A Textured Membrane App 20130334752 - Oh; Jeonghoon ;   et al. | 2013-12-19 |
Multi-chamber carrier head with a textured membrane Grant 8,454,413 - Oh , et al. June 4, 2 | 2013-06-04 |
Multiple zone carrier head with flexible membrane Grant 8,088,299 - Chen , et al. January 3, 2 | 2012-01-03 |
Multiple Zone Carrier Head With Flexible Membrane App 20110070810 - Chen; Hung Chih ;   et al. | 2011-03-24 |
Multiple zone carrier head with flexible membrane Grant 7,842,158 - Chen , et al. November 30, 2 | 2010-11-30 |
Multipe Zone Carrier Head With Flexible Membrane App 20070272356 - Chen; Hung Chih ;   et al. | 2007-11-29 |
Multi-chamber Carrier Head With A Textured Membrane App 20070202785 - Oh; Jeonghoon ;   et al. | 2007-08-30 |
Multiple zone carrier head with flexible membrane Grant 7,255,771 - Chen , et al. August 14, 2 | 2007-08-14 |
Substrate removal from polishing tool Grant 7,081,042 - Chen , et al. July 25, 2 | 2006-07-25 |
Substrate removal from polishing tool App 20060019582 - Chen; Hung Chih ;   et al. | 2006-01-26 |
Multiple zone carrier head with flexible membrane App 20050211377 - Chen, Hung Chih ;   et al. | 2005-09-29 |
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