loadpatents
name:-0.010527849197388
name:-0.011945009231567
name:-0.0023000240325928
Siu; Tsz-Sin Patent Filings

Siu; Tsz-Sin

Patent Applications and Registrations

Patent applications and USPTO patent grants for Siu; Tsz-Sin.The latest application filed is for "textured membrane for a multi-chamber carrier head".

Company Profile
1.9.9
  • Siu; Tsz-Sin - Hong Kong HK
  • Siu; Tsz-Sin - Santa Clara CA
  • Siu; Tsz-Sin - Kowloon N/A HK
  • Siu; Tsz-Sin - Lai Chi Kok HK
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Textured membrane for a multi-chamber carrier head
Grant 10,702,971 - Oh , et al.
2020-07-07
Textured Membrane For A Multi-chamber Carrier Head
App 20170001282 - Oh; Jeonghoon ;   et al.
2017-01-05
Textured membrane for a multi-chamber carrier head
Grant 9,452,505 - Oh , et al. September 27, 2
2016-09-27
Textured Membrane For A Multi-chamber Carrier Head
App 20150038065 - Oh; Jeonghoon ;   et al.
2015-02-05
Multi-chamber carrier head with a textured membrane
Grant 8,808,062 - Oh , et al. August 19, 2
2014-08-19
Multi-chamber Carrier Head With A Textured Membrane
App 20130334752 - Oh; Jeonghoon ;   et al.
2013-12-19
Multi-chamber carrier head with a textured membrane
Grant 8,454,413 - Oh , et al. June 4, 2
2013-06-04
Multiple zone carrier head with flexible membrane
Grant 8,088,299 - Chen , et al. January 3, 2
2012-01-03
Multiple Zone Carrier Head With Flexible Membrane
App 20110070810 - Chen; Hung Chih ;   et al.
2011-03-24
Multiple zone carrier head with flexible membrane
Grant 7,842,158 - Chen , et al. November 30, 2
2010-11-30
Multipe Zone Carrier Head With Flexible Membrane
App 20070272356 - Chen; Hung Chih ;   et al.
2007-11-29
Multi-chamber Carrier Head With A Textured Membrane
App 20070202785 - Oh; Jeonghoon ;   et al.
2007-08-30
Multiple zone carrier head with flexible membrane
Grant 7,255,771 - Chen , et al. August 14, 2
2007-08-14
Substrate removal from polishing tool
Grant 7,081,042 - Chen , et al. July 25, 2
2006-07-25
Substrate removal from polishing tool
App 20060019582 - Chen; Hung Chih ;   et al.
2006-01-26
Multiple zone carrier head with flexible membrane
App 20050211377 - Chen, Hung Chih ;   et al.
2005-09-29

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