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Patent applications and USPTO patent grants for Sinharoy; Arindam.The latest application filed is for "central source delivery for chemical vapor deposition systems".
Patent | Date |
---|---|
Gas concentration sensors and systems Grant 10,571,430 - Cheng , et al. Feb | 2020-02-25 |
Enhanced enclosures for acoustical gas concentration sensing and flow control Grant 10,099,185 - Logue , et al. October 16, 2 | 2018-10-16 |
Central Source Delivery For Chemical Vapor Deposition Systems App 20170362701 - Logue; Raymond C. ;   et al. | 2017-12-21 |
Gas Concentration Sensors And Systems App 20170261471 - Cheng; Chi-Jung ;   et al. | 2017-09-14 |
Patterning device support and lithographic apparatus Grant 9,740,112 - Sinharoy , et al. August 22, 2 | 2017-08-22 |
Lithographic apparatus and device manufacturing method Grant 9,457,947 - Lansbergen , et al. October 4, 2 | 2016-10-04 |
Enhanced Enclosures For Acoustical Gas Concentration Sensing And Flow Control App 20160041126 - Logue; Ray ;   et al. | 2016-02-11 |
Patterning Device Support and Lithographic Apparatus App 20150277240 - Sinharoy; Arindam ;   et al. | 2015-10-01 |
Lithographic Apparatus And Device Manufacturing Method App 20130100430 - LANSBERGEN; Robert Gabriel Maria ;   et al. | 2013-04-25 |
Jam detection apparatus and method for indexing of substrates and lead frames App 20060144899 - Hu; Xiao Ping ;   et al. | 2006-07-06 |
Apparatus and method for indexing of substrates and lead frames App 20050284915 - Beatson, David T. ;   et al. | 2005-12-29 |
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