| Patent | Date |
|---|
Prediction based chucking and lithography control optimization
Grant 10,788,759 - Tsai , et al. September 29, 2 | 2020-09-29 |
Patterned wafer geometry measurements for semiconductor process controls
Grant 10,576,603 - Vukkadala , et al. | 2020-03-03 |
Systems, Methods And Metrics For Wafer High Order Shape Characterization And Wafer Classification Using Wafer Dimensional Geomet
App 20190271654 - Chen; Haiguang ; et al. | 2019-09-05 |
Process-induced distortion prediction and feedforward and feedback correction of overlay errors
Grant 10,401,279 - Vukkadala , et al. Sep | 2019-09-03 |
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool
Grant 10,379,061 - Chen , et al. A | 2019-08-13 |
Systems and methods for wafer structure uniformity monitoring using interferometry wafer geometry tool
Grant 10,352,691 - Chen , et al. July 16, 2 | 2019-07-16 |
Prediction Based Chucking and Lithography Control Optimization
App 20180364579 - Tsai; Bin-Ming Benjamin ; et al. | 2018-12-20 |
Prediction based chucking and lithography control optimization
Grant 10,036,964 - Tsai , et al. July 31, 2 | 2018-07-31 |
System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking
Grant 10,025,894 - Vukkadala , et al. July 17, 2 | 2018-07-17 |
Systems and methods for effective pattern wafer surface measurement and analysis using interferometry tool
Grant 9,865,047 - Chen , et al. January 9, 2 | 2018-01-09 |
Process-induced asymmetry detection, quantification, and control using patterned wafer geometry measurements
Grant 9,779,202 - Vukkadala , et al. October 3, 2 | 2017-10-03 |
Predictive wafer modeling based focus error prediction using correlations of wafers
Grant 9,707,660 - Vukkadala , et al. July 18, 2 | 2017-07-18 |
Systems and methods for wafer surface feature detection and quantification
Grant 9,702,829 - Chen , et al. July 11, 2 | 2017-07-11 |
Detection of selected defects in relatively noisy inspection data
Grant 9,646,379 - Chen , et al. May 9, 2 | 2017-05-09 |
Hybrid phase unwrapping systems and methods for patterned wafer measurement
Grant 9,632,038 - Chen , et al. April 25, 2 | 2017-04-25 |
Predicting and controlling critical dimension issues and pattern defectivity in wafers using interferometry
Grant 9,558,545 - Vukkadala , et al. January 31, 2 | 2017-01-31 |
Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool
Grant 9,546,862 - Chen , et al. January 17, 2 | 2017-01-17 |
Process-Induced Asymmetry Detection, Quantification, and Control Using Patterned Wafer Geometry Measurements
App 20160371423 - Vukkadala; Pradeep ; et al. | 2016-12-22 |
Using wafer geometry to improve scanner correction effectiveness for overlay control
Grant 9,513,565 - MacNaughton , et al. December 6, 2 | 2016-12-06 |
Hybrid Phase Unwrapping Systems and Methods for Patterned Wafer Measurement
App 20160321799 - Chen; Haiguang ; et al. | 2016-11-03 |
System and Method to Emulate Finite Element Model Based Prediction of In-Plane Distortions Due to Semiconductor Wafer Chucking
App 20160283625 - Vukkadala; Pradeep ; et al. | 2016-09-29 |
System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking
Grant 9,430,593 - Vukkadala , et al. August 30, 2 | 2016-08-30 |
Prediction Based Chucking and Lithography Control Optimization
App 20160239600 - Tsai; Bin-Ming Benjamin ; et al. | 2016-08-18 |
Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance
Grant 9,373,165 - Azordegan , et al. June 21, 2 | 2016-06-21 |
Predicting and Controlling Critical Dimension Issues and Pattern Defectivity in Wafers Using Interferometry
App 20160163033 - Vukkadala; Pradeep ; et al. | 2016-06-09 |
Detection of selected defects in relatively noisy inspection data
Grant 9,355,440 - Chen , et al. May 31, 2 | 2016-05-31 |
Enhanced Patterned Wafer Geometry Measurements Based Design Improvements for Optimal Integrated Chip Fabrication Performance
App 20160071260 - Azordegan; Amir ; et al. | 2016-03-10 |
Systems and methods of advanced site-based nanotopography for wafer surface metrology
Grant 9,177,370 - Chen , et al. November 3, 2 | 2015-11-03 |
Predictive Modeling Based Focus Error Prediction
App 20150302312 - Vukkadala; Pradeep ; et al. | 2015-10-22 |
Patterned Wafer Geometry Measurements for Semiconductor Process Controls
App 20150298282 - Vukkadala; Pradeep ; et al. | 2015-10-22 |
Using Wafer Geometry to Improve Scanner Correction Effectiveness for Overlay Control
App 20150212429 - MacNaughton; Craig ; et al. | 2015-07-30 |
Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control
Grant 9,087,176 - Chang , et al. July 21, 2 | 2015-07-21 |
Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections
Grant 9,052,190 - Salehpour , et al. June 9, 2 | 2015-06-09 |
Using wafer geometry to improve scanner correction effectiveness for overlay control
Grant 9,029,810 - MacNaughton , et al. May 12, 2 | 2015-05-12 |
Process-Induced Distortion Prediction and Feedforward and Feedback Correction of Overlay Errors
App 20150120216 - Vukkadala; Pradeep ; et al. | 2015-04-30 |
Using Wafer Geometry to Improve Scanner Correction Effectiveness for Overlay Control
App 20140353527 - MacNaughton; Craig ; et al. | 2014-12-04 |
Enhanced Inspection and Metrology Techniques And Systems Using Bright-Field Differential Interference Contrast
App 20140268172 - Salehpour; Ali ; et al. | 2014-09-18 |
Site based quantification of substrate topography and its relation to lithography defocus and overlay
Grant 8,768,665 - Veeraraghavan , et al. July 1, 2 | 2014-07-01 |
Systems, Methods and Metrics for Wafer High Order Shape Characterization and Wafer Classification Using Wafer Dimensional Geometry Tool
App 20140114597 - Chen; Haiguang ; et al. | 2014-04-24 |
System and Method to Emulate Finite Element Model Based Prediction of In-Plane Distortions Due to Semiconductor Wafer Chucking
App 20140107998 - Vukkadala; Pradeep ; et al. | 2014-04-17 |
Methods and systems for improved localized feature quantification in surface metrology tools
Grant 8,630,479 - Chen , et al. January 14, 2 | 2014-01-14 |
Systems and methods for wafer edge feature detection and quantification
Grant 8,594,975 - Chen , et al. November 26, 2 | 2013-11-26 |
Systems and Methods of Advanced Site-Based Nanotopography for Wafer Surface Metrology
App 20130236085 - Chen; Haiguang ; et al. | 2013-09-12 |
Methods And Systems For Improved Localized Feature Quantification In Surface Metrology Tools
App 20120177282 - Chen; Haiguang ; et al. | 2012-07-12 |
Systems And Methods For Wafer Edge Feature Detection And Quantification
App 20110218762 - Chen; Haiguang ; et al. | 2011-09-08 |
Site Based Quantification Of Substrate Topography And Its Relation To Lithography Defocus And Overlay
App 20110172982 - Veeraraghavan; Sathish ; et al. | 2011-07-14 |
Specimen topography reconstruction
Grant 7,136,519 - Sinha , et al. November 14, 2 | 2006-11-14 |
Ring chuck to hold 200 and 300 mm wafer
Grant 6,954,269 - Gaal , et al. October 11, 2 | 2005-10-11 |
Ring chuck to hold 200 and 300 MM wafer
App 20030142300 - Gaal, Christopher ; et al. | 2003-07-31 |
Ring chuck to hold 200 and 300 mm wafer
Grant 6,538,733 - Gaal , et al. March 25, 2 | 2003-03-25 |
Specimen topography reconstruction
App 20020177980 - Sinha, Jaydeep ; et al. | 2002-11-28 |
Ring chuck to hold 200 and 300 mm wafer
App 20020024174 - Gaal, Christopher ; et al. | 2002-02-28 |
Shape accuracy improvement using a novel calibration approach
App 20020017911 - Drohan, William ; et al. | 2002-02-14 |
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