Patent | Date |
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Low-cost solar cell metallization over TCO and methods of their fabrication Grant 9,577,140 - Sinha , et al. February 21, 2 | 2017-02-21 |
Toll image review gamification Grant 9,550,120 - Mitchell , et al. January 24, 2 | 2017-01-24 |
Toll Image Review Gamification App 20160228769 - Mitchell; Charles F. ;   et al. | 2016-08-11 |
Low-cost Solar Cell Metallization Over Tco And Methods Of Their Fabrication App 20160111589 - Sinha; Ashok ;   et al. | 2016-04-21 |
Low-cost solar cells and methods for fabricating low cost substrates for solar cells Grant 8,796,066 - Sinha , et al. August 5, 2 | 2014-08-05 |
Method And Apparatus For Growing Thin Oxide Films On Silicon While Minimizing Impact On Existing Structures App 20120298039 - PEUSE; Bruce W. ;   et al. | 2012-11-29 |
Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures Grant 8,236,706 - Peuse , et al. August 7, 2 | 2012-08-07 |
Removal of process residues on the backside of a substrate Grant 8,083,963 - Delgadino , et al. December 27, 2 | 2011-12-27 |
Low-cost multi-junction solar cells and methods for their production Grant 8,084,683 - Sinha December 27, 2 | 2011-12-27 |
Methods to avoid unstable plasma states during a process transition Grant 8,048,806 - Kutney , et al. November 1, 2 | 2011-11-01 |
Low-cost Multi-junction Solar Cells And Methods For Their Production App 20110223708 - Sinha; Ashok | 2011-09-15 |
Low-cost Multi-junction Solar Cells And Methods For Their Production App 20110220201 - Sinha; Ashok | 2011-09-15 |
Low-cost Solar Cells And Methods For Their Production App 20110207259 - Sinha; Ashok | 2011-08-25 |
Low-cost multi-junction solar cells and methods for their production Grant 7,960,644 - Sinha June 14, 2 | 2011-06-14 |
Low-cost solar cells and methods for their production Grant 7,956,283 - Sinha June 7, 2 | 2011-06-07 |
Low-cost multi-junction solar cells and methods for their production Grant 7,951,640 - Sinha May 31, 2 | 2011-05-31 |
Low-cost Solar Cells And Methods For Fabricating Low Cost Substrates For Solar Cells App 20100317146 - Sinha; Ashok ;   et al. | 2010-12-16 |
Method And Apparatus For Growing Thin Oxide Films On Silicon While Minimizing Impact On Existing Structures App 20100151694 - Peuse; Bruce W. ;   et al. | 2010-06-17 |
Low-cost Multi-junction Solar Cells And Methods For Their Production App 20100116335 - Sinha; Ashok | 2010-05-13 |
Method for depositing tungsten-containing layers by vapor deposition techniques Grant 7,709,385 - Xi , et al. May 4, 2 | 2010-05-04 |
Method for forming tungsten materials during vapor deposition processes Grant 7,674,715 - Kori , et al. March 9, 2 | 2010-03-09 |
Method For Depositing Tungsten-containing Layers By Vapor Deposition Techniques App 20090156003 - XI; MING ;   et al. | 2009-06-18 |
Low-cost Solar Cells And Methods For Their Production App 20090120492 - Sinha; Ashok | 2009-05-14 |
Low-cost Multi-junction Solar Cells And Methods For Their Production App 20090120493 - Sinha; Ashok | 2009-05-14 |
Moisture Sensor App 20090035865 - DeMoor; Colette Pamela ;   et al. | 2009-02-05 |
Method for forming tungsten materials during vapor deposition processes Grant 7,465,666 - Kori , et al. December 16, 2 | 2008-12-16 |
Method for depositing tungsten-containing layers by vapor deposition techniques Grant 7,465,665 - Xi , et al. December 16, 2 | 2008-12-16 |
Removal Of Process Residues On The Backside Of A Substrate App 20080194111 - Delgadino; Gerardo A. ;   et al. | 2008-08-14 |
Method For Forming Tungsten Materials During Vapor Deposition Processes App 20070254481 - KORI; MORIS ;   et al. | 2007-11-01 |
Method For Depositing Tungsten-containing Layers By Vapor Deposition Techniques App 20070218688 - Xi; Ming ;   et al. | 2007-09-20 |
Method And Apparatus For Magnetic Mixing In Micron Size Droplets App 20070207272 - Puri; Ishwar K. ;   et al. | 2007-09-06 |
Method for forming tungsten materials during vapor deposition processes Grant 7,235,486 - Kori , et al. June 26, 2 | 2007-06-26 |
Method for depositing tungsten-containing layers by vapor deposition techniques Grant 7,220,673 - Xi , et al. May 22, 2 | 2007-05-22 |
Methods to avoid unstable plasma states during a process transition App 20070066064 - Kutney; Michael C. ;   et al. | 2007-03-22 |
Method to reduce plasma-induced charging damage App 20070048882 - Kutney; Michael C. ;   et al. | 2007-03-01 |
Method For Forming Tungsten Materials During Vapor Deposition Processes App 20060292874 - Kori; Moris ;   et al. | 2006-12-28 |
Method For Depositing Tungsten-containing Layers By Vapor Deposition Techniques App 20060264031 - Xi; Ming ;   et al. | 2006-11-23 |
Method and system for controlling the presence of fluorine in refractory metal layers Grant 7,115,494 - Sinha , et al. October 3, 2 | 2006-10-03 |
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer Grant 7,101,795 - Xi , et al. September 5, 2 | 2006-09-05 |
Method and system for controlling the presence of fluorine in refractory metal layers App 20060128132 - Sinha; Ashok ;   et al. | 2006-06-15 |
Method and system for controlling the presence of fluorine in refractory metal layers Grant 7,033,922 - Kori , et al. April 25, 2 | 2006-04-25 |
Method of conditioning electrochemical baths in plating technology Grant 6,893,548 - Cheung , et al. May 17, 2 | 2005-05-17 |
Method and system for controlling the presence of fluorine in refractory metal layers App 20050059241 - Kori, Moris ;   et al. | 2005-03-17 |
System and method to form a composite film stack utilizing sequential deposition techniques Grant 6,849,545 - Mak , et al. February 1, 2 | 2005-02-01 |
Method and apparatus for depositing refractory metal layers employing sequential deposition techniques to form a nucleation layer App 20040209465 - Xi, Ming ;   et al. | 2004-10-21 |
Apparatus for electro chemical deposition of copper metallization with the capability of in-situ thermal annealing App 20040079633 - Cheung, Robin ;   et al. | 2004-04-29 |
Bifurcated deposition process for depositing refractory metal layers employing atomic layer deposition and chemical vapor deposition techniques Grant 6,551,929 - Kori , et al. April 22, 2 | 2003-04-22 |
System and method to form a composite film stack utilizing sequential deposition techniques App 20020197863 - Mak, Alfred W. ;   et al. | 2002-12-26 |
Processes to improve electroplating fill Grant 6,399,479 - Chen , et al. June 4, 2 | 2002-06-04 |
Method and apparatus for conditioning electrochemical baths in plating technology App 20020033340 - Cheung, Robin ;   et al. | 2002-03-21 |
Chemical vapor deposition hardware and process Grant 6,296,712 - Guo , et al. October 2, 2 | 2001-10-02 |
Etch chamber Grant 6,270,621 - Tam , et al. August 7, 2 | 2001-08-07 |
Plasma treatment of titanium nitride formed by chemical vapor deposition Grant 6,270,859 - Zhao , et al. August 7, 2 | 2001-08-07 |
Plasma Treatment Of Titanium Nitride Formed By Chemical Vapor Deposition App 20010004478 - ZHAO, JUN ;   et al. | 2001-06-21 |
High temperature, high flow rate chemical vapor deposition apparatus and related methods Grant 6,189,482 - Zhao , et al. February 20, 2 | 2001-02-20 |
Multideck wafer processing system Grant 6,176,667 - Fairbairn , et al. January 23, 2 | 2001-01-23 |
Apparatus for electro-chemical deposition with thermal anneal chamber Grant 6,136,163 - Cheung , et al. October 24, 2 | 2000-10-24 |
Apparatus for substrate processing with improved throughput and yield Grant 6,129,044 - Zhao , et al. October 10, 2 | 2000-10-10 |
Removable pumping channel liners within a chemical vapor deposition chamber Grant 5,964,947 - Zhao , et al. October 12, 1 | 1999-10-12 |
Chemical vapor deposition chamber Grant 5,882,419 - Sinha , et al. March 16, 1 | 1999-03-16 |
Ultra high throughput wafer vacuum processing system Grant 5,855,681 - Maydan , et al. January 5, 1 | 1999-01-05 |
Chemical vapor deposition of a thin film onto a substrate Grant 5,856,240 - Sinha , et al. January 5, 1 | 1999-01-05 |
Thermally floating pedestal collar in a chemical vapor deposition chamber Grant 5,846,332 - Zhao , et al. December 8, 1 | 1998-12-08 |
Chemical vapor deposition chamber Grant 5,695,568 - Sinha , et al. December 9, 1 | 1997-12-09 |
Process and apparatus for full wafer deposition Grant 5,384,008 - Sinha , et al. January 24, 1 | 1995-01-24 |
Process for treating aluminum surfaces in a vacuum apparatus Grant 5,201,990 - Chang , et al. April 13, 1 | 1993-04-13 |