| Patent | Date |
|---|
Extreme Ultraviolet (euv) Lithography Using An Intervening Layer Or A Multi-layer Stack With Varying Mean Free Paths For Secondary Electron Generation
App 20220197147 - LIANG; Andrew ; et al. | 2022-06-23 |
Profile Shaping For Control Gate Recesses
App 20220123114 - Singhal; Akhil ; et al. | 2022-04-21 |
Systems And Methods Of Seasoning Electrostatic Chucks With Dielectric Seasoning Films
App 20220122872 - Singhal; Akhil ; et al. | 2022-04-21 |
In Situ Protective Coating Of Chamber Components For Semiconductor Processing
App 20210340670 - Singhal; Akhil ; et al. | 2021-11-04 |
Metal-containing Passivation For High Aspect Ratio Etch
App 20210242032 - COLINJIVADI; Karthik S. ; et al. | 2021-08-05 |
Modification of SNO.sub.2 surface for EUV lithography
Grant 11,031,244 - Singhal , et al. June 8, 2 | 2021-06-08 |
Apparatus and method for deposition and etch in gap fill
Grant 10,957,514 - Singhal , et al. March 23, 2 | 2021-03-23 |
Method To Clean Sno2 Film From Chamber
App 20210057208 - Singhal; Akhil ; et al. | 2021-02-25 |
Method to clean SnO.sub.2 film from chamber
Grant 10,840,082 - Singhal , et al. November 17, 2 | 2020-11-17 |
Methods of encapsulation
Grant 10,763,107 - van Schravendijk , et al. Sep | 2020-09-01 |
Deposition Tool And Method For Depositing Metal Oxide Films On Organic Materials
App 20200199751 - SINGHAL; Akhil ; et al. | 2020-06-25 |
Methods Of Encapsulation
App 20200152452 - van Schravendijk; Bart J. ; et al. | 2020-05-14 |
Modification Of Sno2 Surface For Euv Lithography
App 20200058492 - Singhal; Akhil ; et al. | 2020-02-20 |
Methods of encapsulation
Grant 10,566,186 - van Schravendijk , et al. Feb | 2020-02-18 |
Method To Clean Sno2 Film From Chamber
App 20200051807 - Singhal; Akhil ; et al. | 2020-02-13 |
Deposition Tool And Method For Depositing Metal Oxide Films On Organic Materials
App 20190390341 - SINGHAL; Akhil ; et al. | 2019-12-26 |
Apparatus And Method For Deposition And Etch In Gap Fill
App 20190385820 - Singhal; Akhil ; et al. | 2019-12-19 |
Apparatus and method for deposition and etch in gap fill
Grant 10,373,806 - Singhal , et al. | 2019-08-06 |
Methods Of Encapsulation
App 20190157078 - van Schravendijk; Bart J. ; et al. | 2019-05-23 |
Methods of encapsulation
Grant 10,157,736 - van Schravendijk , et al. Dec | 2018-12-18 |
Apparatus And Method For Deposition And Etch In Gap Fill
App 20180005801 - Singhal; Akhil ; et al. | 2018-01-04 |
Method To Deposit Conformal And Low Wet Etch Rate Encapsulation Layer Using Pecvd
App 20170323785 - Singhal; Akhil ; et al. | 2017-11-09 |
Methods Of Encapsulation
App 20170323803 - van Schravendijk; Bart J. ; et al. | 2017-11-09 |
Apparatus and method for deposition and etch in gap fill
Grant 9,773,643 - Singhal , et al. September 26, 2 | 2017-09-26 |
Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems
Grant 9,617,637 - Dhas , et al. April 11, 2 | 2017-04-11 |
Method for the reduction of defectivity in vapor deposited films
Grant 9,328,416 - Dhas , et al. May 3, 2 | 2016-05-03 |
Systems And Methods For Improving Deposition Rate Uniformity And Reducing Defects In Substrate Peocessing Systems
App 20160017493 - Dhas; Arul ; et al. | 2016-01-21 |
Method And Apparatus For The Reduction Of Defectivity In Vapor Deposited Films
App 20150203967 - Dhas; Arul N. ; et al. | 2015-07-23 |
Method for making high stress boron-doped carbon films
Grant 7,998,881 - Wu , et al. August 16, 2 | 2011-08-16 |
PMOS transistor with compressive dielectric capping layer
Grant 7,327,001 - Singhal , et al. February 5, 2 | 2008-02-05 |
PMOS transistor with compressive dielectric capping layer
Grant 7,214,630 - Varadarajan , et al. May 8, 2 | 2007-05-08 |
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