Singh, Vinita
Patent Applications and Registrations
Patent applications and USPTO patent grants for Singh, Vinita.The latest application filed is for "method for cleaning a process chamber".
- Singh, Vinita - Mountain View CA
| Patent | Date |
|---|---|
| Method for cleaning a process chamber App 20050211265 - Zheng, Yi ; et al. | 2005-09-29 |
| Method for cleaning a process chamber Grant 6,902,629 - Zheng , et al. June 7, 2 | 2005-06-07 |
| Use of cyclic siloxanes for hardness improvement App 20040234688 - Singh, Vinita ; et al. | 2004-11-25 |
| Use of cyclic siloxanes for hardness improvement of low k dielectric films Grant 6,815,373 - Singh , et al. November 9, 2 | 2004-11-09 |
| Method for cleaning a process chamber App 20030192568 - Zheng, Yi ; et al. | 2003-10-16 |
| Use of cyclic siloxanes for hardness improvement App 20030194880 - Singh, Vinita ; et al. | 2003-10-16 |
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