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Patent applications and USPTO patent grants for Singh Thakur; Randhir P..The latest application filed is for "silicon nitride film with stress control".
Patent | Date |
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Silicon nitride film with stress control Grant 7,488,690 - Iyer , et al. February 10, 2 | 2009-02-10 |
Silicon nitride film with stress control App 20060009041 - Iyer; R. Suryanarayanan ;   et al. | 2006-01-12 |
Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber App 20040086640 - Luo, Lee ;   et al. | 2004-05-06 |
Cycling deposition of low temperature films in a cold wall single wafer process chamber App 20030059535 - Luo, Lee ;   et al. | 2003-03-27 |
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