Singer; Wolfgang

Patent Applications and Registrations

Patent applications and USPTO patent grants for Singer; Wolfgang.The latest application filed is for "device for mounting spherical optical components".

Company Profile

9.131.143

Singer; Wolfgang - Rochester MN
Singer; Wolfgang - Aalen DE
Singer; Wolfgang - 73431 Aalen DE
Singer; Wolfgang - Alean DE
Singer; Wolfgang - Vienna AT
Singer; Wolfgang - Eisbach/Rein AT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Using autologous mesenchymal stem cells to treat multiple system atrophy Grant 11,426,431 - Singer , et al. August 30, 2	2022-08-30
Device For Mounting Spherical Optical Components App 20220214518 - Prochnau; Jens ; et al.	2022-07-07
Optical element with a fresnel structure, and display device with such an optical element Grant 11,204,498 - Menke , et al. December 21, 2	2021-12-21
Arrangement for microscopy and for correction of aberrations Grant 11,163,147 - Siebenmorgen , et al. November 2, 2	2021-11-02
Optical transmission assembly for transmitting a source image Grant 11,137,531 - Singer , et al. October 5, 2	2021-10-05
Spectacle Lens Having A Diffraction Structure For Light App 20210278702 - Jabbour; Toufic ; et al.	2021-09-09
Light Guide For An Hmd, Hmd And Method For Transmitting An Image In An Hmd App 20200278547 - SINGER; Wolfgang ; et al.	2020-09-03
Optical Transmission Assembly For Transmitting A Source Image App 20200271847 - SINGER; Wolfgang ; et al.	2020-08-27
Microscope and method for SPIM microscopy Grant 10,698,225 - Singer , et al.	2020-06-30
Method for generating a result image and optical device Grant 10,475,168 - Stoppe , et al. Nov	2019-11-12
Optical system and method for transmitting a source image Grant 10,394,032 - Singer , et al. A	2019-08-27
Light field imaging with scanning optical unit Grant 10,371,932 - Singer , et al.	2019-08-06
Microscopical imaging system Grant 10,359,612 - Nobis , et al.	2019-07-23
Device for optical examination of a specimen, method for examining a specimen and method for transferring a device into an operation-ready state Grant 10,345,570 - Singer , et al. July 9, 2	2019-07-09
Arrangement For Microscopy And For Correction Of Aberrations App 20190170995 - SIEBENMORGEN; Dr. Jorg ; et al.	2019-06-06
Optical System And Method For Transmitting A Source Image App 20190155034 - Singer; Wolfgang ; et al.	2019-05-23
Laser scanning microscope and method for correcting imaging errors particularly in high-resolution scanning microscopy Grant 10,281,698 - Singer , et al.	2019-05-07
Optical system and method for transmitting a source image Grant 10,191,288 - Singer , et al. Ja	2019-01-29
Optical System And Method For Transmitting A Source Image App 20180299678 - Singer; Wolfgang ; et al.	2018-10-18
Device for imaging sample Grant 10,073,256 - Singer , et al. September 11, 2	2018-09-11
Optical transmission system for correcting image errors and microscope with such a transmission system Grant 10,048,478 - Degen , et al. August 14, 2	2018-08-14
Using Autologous Mesenchymal Stem Cells To Treat Multiple System Atrophy App 20180161374 - Singer; Wolfgang ; et al.	2018-06-14
Arrangement for light sheet microscopy Grant 9,804,378 - Singer , et al. October 31, 2	2017-10-31
Method for Generating a Result Image and Optical Device App 20170262968 - Stoppe; Lars ; et al.	2017-09-14
Light Field Imaging with Scanning Optical Unit App 20170168284 - Singer; Wolfgang ; et al.	2017-06-15
Collector Grant 9,645,503 - Saenger , et al. May 9, 2	2017-05-09
Device for optical examination of a specimen, method for examining a specimen and method for transferring a device into an operation-ready state App 20170123198 - Singer; Wolfgang ; et al.	2017-05-04
Mirror of a projection exposure apparatus for microlithography with mirror surfaces on different mirror sides, and projection exposure apparatus Grant 9,606,339 - Hetzler , et al. March 28, 2	2017-03-28
Optical Element With A Fresnel Structure, And Display Device With Such An Optical Element App 20160349512 - MENKE; Christoph ; et al.	2016-12-01
Optical Transmission System And Microscope With Such A Transmission System App 20160291303 - DEGEN; Artur ; et al.	2016-10-06
Arrangement for Light Sheet Microscopy App 20160291304 - SINGER; Wolfgang ; et al.	2016-10-06
Catadioptric Projection Objective App 20160274343 - Shafer; David R. ; et al.	2016-09-22
Microlithographic illumination system Grant 9,341,953 - Deguenther , et al. May 17, 2	2016-05-17
Device For Imaging Sample App 20160131884 - SINGER; Wolfgang ; et al.	2016-05-12
EUV collector Grant 9,316,918 - Mann , et al. April 19, 2	2016-04-19
Microscopical Imaging System App 20160062111 - Nobis; Thomas ; et al.	2016-03-03
Methods And Materials For Treating Orthostatic Hypotension Or Postural Tachycardia Syndrome App 20150374691 - Singer; Wolfgang	2015-12-31
Projection lens system of a microlithographic projection exposure installation Grant 9,164,396 - Beierl , et al. October 20, 2	2015-10-20
Methods and materials for treating orthostatic hypotension or postural tachycardia syndrome Grant 9,155,728 - Singer October 13, 2	2015-10-13
Microscope And Method For Spim Microscopy App 20150168732 - Singer; Wolfgang ; et al.	2015-06-18
Laser Scanning Microscope And Method For Correcting Imaging Errors Particularly In High-resolution Scanning Microscopy App 20150077844 - SINGER; Wolfgang ; et al.	2015-03-19
Microlithographic projection exposure apparatus Grant 8,982,325 - Totzeck , et al. March 17, 2	2015-03-17
Catadioptric Projection Objective App 20150055214 - Shafer; David R. ; et al.	2015-02-26
Apparatus for microlithographic projection exposure and apparatus for inspecting a surface of a substrate Grant 8,953,173 - Mann , et al. February 10, 2	2015-02-10
Immersion catadioptric projection objective having two intermediate images Grant 8,908,269 - Shafer , et al. December 9, 2	2014-12-09
EUV lithography device and method for processing an optical element Grant 8,885,141 - Singer , et al. November 11, 2	2014-11-11
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system Grant 8,854,606 - Mann , et al. October 7, 2	2014-10-07
Projection objective and projection exposure apparatus with negative back focus of the entry pupil Grant 8,810,927 - Mann , et al. August 19, 2	2014-08-19
Collector App 20140192339 - Saenger; Ingo ; et al.	2014-07-10
Microlithographic Illumination System App 20140176930 - Deguenther; Markus ; et al.	2014-06-26
Catadioptric projection objective Grant 8,730,572 - Shafer , et al. May 20, 2	2014-05-20
Catadioptric Projection Objective App 20140111787 - Shafer; David R. ; et al.	2014-04-24
Microlithographic illumination system Grant 8,705,005 - Deguenther , et al. April 22, 2	2014-04-22
Projection system with compensation of intensity variations and compensation element therefor Grant 8,605,257 - Scheible , et al. December 10, 2	2013-12-10
Catadioptric projection objective Grant 8,416,490 - Shafer , et al. April 9, 2	2013-04-09
Catadioptric projection objective with tilted deflecting mirrors, projection exposure apparatus, projection exposure method, and mirror Grant 8,411,356 - Mueller , et al. April 2, 2	2013-04-02
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20130070224 - Beierl; Helmut ; et al.	2013-03-21
Apparatus For Microlithographic Projection Exposure And Apparatus For Inspecting A Surface Of A Substrate App 20130050672 - MANN; Hans-Juergen ; et al.	2013-02-28
Euv Collector App 20130027681 - Mann; Hans-Juergen ; et al.	2013-01-31
Catadioptric projection objective Grant 8,355,201 - Shafer , et al. January 15, 2	2013-01-15
Apparatus for microlithographic projection exposure and apparatus for inspecting a surface of a substrate Grant 8,345,267 - Mann , et al. January 1, 2	2013-01-01
Projection lens system of a microlithographic projection exposure installation Grant 8,319,944 - Beierl , et al. November 27, 2	2012-11-27
Catadioptric Projection Objective App 20120250147 - Shafer; David ; et al.	2012-10-04
Method and lithography device with a mask reflecting light Grant 8,268,518 - Mann , et al. September 18, 2	2012-09-18
Method For Producing A Mirror Having At Least Two Mirror Surfaces, Mirror Of A Projection Exposure Apparatus For Microlithography, And Projection Exposure Apparatus App 20120224186 - HETZLER; Jochen ; et al.	2012-09-06
Catadioptric projection objective Grant 8,208,199 - Shafer , et al. June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,208,198 - Shafer , et al. June 26, 2	2012-06-26
Catadioptric projection objective Grant 8,199,400 - Shafer , et al. June 12, 2	2012-06-12
Microlithographic Projection Exposure Apparatus App 20120092637 - Totzeck; Michael ; et al.	2012-04-19
Projection Objective And Projection Exposure Apparatus With Negative Back Focus Of The Entry Pupil App 20120075608 - Mann; Hans-Juergen ; et al.	2012-03-29
Illumination system of a microlithographic exposure apparatus Grant 8,134,687 - Singer , et al. March 13, 2	2012-03-13
Microlithographic projection exposure apparatus Grant 8,107,054 - Totzeck , et al. January 31, 2	2012-01-31
Projection objective and projection exposure apparatus with negative back focus of the entry pupil Grant 8,094,380 - Mann , et al. January 10, 2	2012-01-10
Catadioptric Projection Objective With Tilted Deflecting Mirrors, Projection Exposure Apparatus, Projection Exposure Method, And Mirror App 20110304926 - Mueller; Ralf ; et al.	2011-12-15
EUV Lithography Device and Method For Processing An Optical Element App 20110279799 - Singer; Wolfgang ; et al.	2011-11-17
Projection Exposure System, Method For Manufacturing A Micro-structured Structural Member By The Aid Of Such A Projection Exposure System And Polarization-optical Element Adapted For Use In Such A System App 20110242517 - Mann; Hans-Jurgen ; et al.	2011-10-06
Catadioptric projection objective with tilted deflecting mirrors, projection exposure apparatus, projection exposure method, and mirror Grant 8,027,088 - Mueller , et al. September 27, 2	2011-09-27
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20110228246 - Kneer; Bernhard ; et al.	2011-09-22
Method and Lithography Device with a Mask Reflecting Light App 20110229827 - MANN; Hans-Jurgen ; et al.	2011-09-22
Catadioptric Projection Objective App 20110211252 - Shafer; David ; et al.	2011-09-01
Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system Grant 7,982,854 - Mann , et al. July 19, 2	2011-07-19
Illumination system particularly for microlithography Grant 7,977,651 - Mann , et al. July 12, 2	2011-07-12
Apparatus For Microlithographic Projection Exposure And Apparatus For Inspecting A Surface Of A Substrate App 20110085179 - Mann; Hans-Juergen ; et al.	2011-04-14
Masks, lithography device and semiconductor component Grant 7,914,955 - Mann , et al. March 29, 2	2011-03-29
Illumination system for microlithography Grant 7,911,584 - Singer , et al. March 22, 2	2011-03-22
Projection Objective And Projection Exposure Apparatus With Negative Back Focus Of The Entry Pupil App 20110063596 - Mann; Hans-Juergen ; et al.	2011-03-17
Methods And Materials For Treating Orthostatic Hypotension Or Postural Tachycardia Syndrome App 20110053989 - Singer; Wolfgang	2011-03-03
Illumination system particularly for microlithography Grant RE42,065 - Antoni , et al. January 25, 2	2011-01-25
Focusing-device for the radiation from a light source Grant 7,871,171 - Antoni , et al. January 18, 2	2011-01-18
Projection objective and projection exposure apparatus with negative back focus of the entry pupil Grant 7,869,138 - Mann , et al. January 11, 2	2011-01-11
Catadioptric Projection Objective App 20100265572 - Shafer; David ; et al.	2010-10-21
Projection Lens System Of A Microlithographic Projection Exposure Installation App 20100265478 - Beierl; Helmut ; et al.	2010-10-21
Oblique Mirror-type Normal-incidence Collector System For Light Sources, Particularly Euv Plasma Discharge Sources App 20100259742 - Singer; Wolfgang	2010-10-14
Illumination system particularly for microlithography Grant RE41,667 - Antoni , et al. September 14, 2	2010-09-14
Projection objective having a high aperture and a planar end surface Grant 7,782,538 - Beder , et al. August 24, 2	2010-08-24
Projection lens system of a microlithographic projection exposure installation Grant 7,782,440 - Beierl , et al. August 24, 2	2010-08-24
Oblique mirror-type normal-incidence collector system for light sources, particularly EUV plasma discharge sources Grant 7,781,750 - Singer August 24, 2	2010-08-24
Illumination System For A Microlithography Projection Exposure Installation App 20100195077 - KOEHLER; Jess ; et al.	2010-08-05
Illumination system for a microlithography projection exposure installation Grant 7,714,983 - Koehler , et al. May 11, 2	2010-05-11
Lithographic apparatus and device manufacturing method Grant 7,684,013 - Hansen , et al. March 23, 2	2010-03-23
Catadioptric Projection Objective App 20100014153 - Shafer; David ; et al.	2010-01-21
Illumination System Particularly For Microlithography App 20090316128 - Mann; Hans-Juergen ; et al.	2009-12-24
Illumination system with zoom objective Grant 7,626,770 - Singer , et al. December 1, 2	2009-12-01
Masks, Lithography Device And Semiconductor Component App 20090268189 - MANN; Hans-Juergen ; et al.	2009-10-29
Optical device with raster elements, and illumination system with the optical device Grant 7,605,386 - Singer , et al. October 20, 2	2009-10-20
Illumination system particularly for microlithography Grant 7,592,598 - Mann , et al. September 22, 2	2009-09-22
Projection objective adapted for use with different immersion fluids or liquids, method of conversion of such and production method Grant 7,589,903 - Beder , et al. September 15, 2	2009-09-15
Multi mirror system for an illumination system Grant 7,583,433 - Antoni , et al. September 1, 2	2009-09-01
Masks, lithography device and semiconductor component Grant 7,572,556 - Mann , et al. August 11, 2	2009-08-11
Catadioptric Projection Objective App 20090190208 - Shafer; David ; et al.	2009-07-30
Lithography lens system and projection exposure system provided with at least one lithography lens system of this type Grant 7,551,361 - Rostalski , et al. June 23, 2	2009-06-23
Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus Grant 7,542,217 - Singer , et al. June 2, 2	2009-06-02
Optical beam transformation system and illumination system comprising an optical beam transformation system Grant 7,511,886 - Schultz , et al. March 31, 2	2009-03-31
Microlithographic Projection Exposure Apparatus App 20090073398 - Totzeck; Michael ; et al.	2009-03-19
Illumination System Particularly For Microlithography App 20090073410 - Mann; Hans-Juergen ; et al.	2009-03-19
Projection Objective Having A High Aperture And A Planar End Surface App 20090059385 - BEDER; Susanne ; et al.	2009-03-05
Microlithographic Illumination System App 20090021715 - Deguenther; Markus ; et al.	2009-01-22
Illumination System Particularly For Microlithography App 20090015812 - Schultz; Joerg ; et al.	2009-01-15
Illumination system for a wavelength of .ltoreq. 193 nm, with sensors for determining an illumination Grant 7,473,907 - Singer , et al. January 6, 2	2009-01-06
Arrangement of optical elements in a microlithographic projection exposure apparatus Grant 7,474,469 - Totzeck , et al. January 6, 2	2009-01-06
Projection objective having a high aperture and a planar end surface Grant 7,466,489 - Beder , et al. December 16, 2	2008-12-16
Projection Objective For A Microlithographic Projection Exposure Apparatus App 20080304033 - Kneer; Bernhard ; et al.	2008-12-11
Focusing-device for the radiation from a light source App 20080297755 - Antoni; Martin ; et al.	2008-12-04
Collector configured of mirror shells Grant 7,460,212 - Singer , et al. December 2, 2	2008-12-02
Illumination system particularly for microlithography Grant 7,456,408 - Mann , et al. November 25, 2	2008-11-25
Projection Objective Adapted For Use With Different Immersion Fluids Or Liquids, Method Of Conversion Of Such And Production Method App 20080273248 - Beder; Susanne ; et al.	2008-11-06
Illumination system particularly for microlithography Grant 7,443,948 - Schultz , et al. October 28, 2	2008-10-28
Objectives as a microlithography projection objective with at least one liquid lens Grant 7,428,105 - Shafer , et al. September 23, 2	2008-09-23
Illumination System With Variable Adjustment Of The Illumination App 20080225259 - Singer; Wolfgang ; et al.	2008-09-18
COLLECTOR FOR ILLUMINATION SYSTEMS WITH A WAVELENGTH LESS THAN OR EQUAL TO 193 nm App 20080225387 - Hainz; Joachim ; et al.	2008-09-18
EUV illumination system having a folding geometry App 20080225258 - Singer; Wolfgang ; et al.	2008-09-18
Illumination System of a Microlithographic Exposure Apparatus App 20080212327 - Singer; Wolfgang ; et al.	2008-09-04
Projection Exposure System, Method For Manufacturing a Micro-Structured Structural Member by the Aid of Such a Projection Exposure System and Polarization-Optical Element Adapted for Use in Such a System App 20080192225 - Mann; Hans-Jurgen ; et al.	2008-08-14
Focusing-device for the radiation from a light source Grant 7,410,265 - Antoni , et al. August 12, 2	2008-08-12
Illumination system particularly for microlithography Grant 7,405,809 - Hainz , et al. July 29, 2	2008-07-29
Illumination system with raster elements of different sizes Grant 7,400,699 - Singer , et al. July 15, 2	2008-07-15
Double-facetted Illumination System With Attenuator Elements On The Pupil Facet Mirror App 20080165925 - Singer; Wolfgang ; et al.	2008-07-10
Catadioptric Projection Objective With Tilted Deflecting Mirrors, Projection Exposure Apparatus, Projection Exposure Method, And Mirror App 20080158665 - Mueller; Ralf ; et al.	2008-07-03
Objectives as a microlithography projection objective with at least one liquid lens Grant 7,385,764 - Shafer , et al. June 10, 2	2008-06-10
Illumination system particularly for microlithography App 20080130076 - Mann; Hans-Juergen ; et al.	2008-06-05
Illumination System for a Microlithographic Projection Exposure Apparatus App 20080111983 - Singer; Wolfgang ; et al.	2008-05-15
Projection Lens System of a Microlithographic Projection Exposure Installation App 20080106711 - Beierl; Helmut ; et al.	2008-05-08
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby Grant 7,369,216 - Moors , et al. May 6, 2	2008-05-06
Projection System with Compensation of Intensity Variations and Compensation Element Therefor App 20080094599 - Scheible; Patrick ; et al.	2008-04-24
Optical system having an optical element that can be brought into at least two positions Grant 7,362,414 - Singer , et al. April 22, 2	2008-04-22
Facet mirror having a number of mirror facets Grant 7,354,168 - Holderer , et al. April 8, 2	2008-04-08
Illumination system particularly for microlithography Grant 7,348,565 - Mann , et al. March 25, 2	2008-03-25
Collector with fastening devices for fastening mirror shells App 20080042079 - Singer; Wolfgang ; et al.	2008-02-21
EUV illumination system having a plurality of light sources for illuminating an optical element Grant 7,329,886 - Singer , et al. February 12, 2	2008-02-12
Objectives As A Microlithography Projection Objective With At Least One Liquid Lens App 20080030869 - Shafer; David R. ; et al.	2008-02-07
Collector with fastening devices for fastening mirror shells Grant 7,321,126 - Singer , et al. January 22, 2	2008-01-22
Collector configured of mirror shells App 20080013680 - Singer; Wolfgang ; et al.	2008-01-17
Attenuator for attenuating wavelengths unequal to a used wavelength Grant 7,319,509 - Singer January 15, 2	2008-01-15
Illumination system having a nested collector for annular illumination of an exit pupil Grant 7,312,462 - Singer , et al. December 25, 2	2007-12-25
EUV-lithography apparatus having a chamber for cleaning an optical element App 20070283591 - Singer; Wolfgang ; et al.	2007-12-13
Lithography Lens System And Projection Exposure System Provided With At Least One Lithography Lens System Of This Type App 20070258134 - Rostalski; Hans-Juergen ; et al.	2007-11-08
Illumination system App 20070242799 - Weiss; Markus ; et al.	2007-10-18
Catadioptric projection objective App 20070236674 - Shafer; David ; et al.	2007-10-11
Illumination System With Zoom Objective App 20070236784 - Singer; Wolfgang ; et al.	2007-10-11
Projection Objective And Projection Exposure Apparatus With Negative Back Focus Of The Entry Pupil App 20070223112 - Mann; Hans-Juergen ; et al.	2007-09-27
Illumination System for a Microlithographic Projection Exposure Apparatus App 20070216887 - Singer; Wolfgang ; et al.	2007-09-20
Projection Lens for a Microlithographic Projection Exposure Apparatus App 20070188729 - Mann; Hans-Jurgen ; et al.	2007-08-16
Optical system for ultraviolet light Grant 7,256,932 - Epple , et al. August 14, 2	2007-08-14
Illumination system with a grating element Grant 7,248,667 - Weiss , et al. July 24, 2	2007-07-24
Projection objective for a microlithographic projection exposure apparatus App 20070165198 - Kneer; Bernhard ; et al.	2007-07-19
Illumination system for a microlithography projection exposure installation App 20070165202 - Koehler; Jess ; et al.	2007-07-19
Collector having unused region for illumination systems using a wavelength .ltoreq.193 nm Grant 7,244,954 - Singer , et al. July 17, 2	2007-07-17
Optical device with raster elements, and illumination system with the optical device App 20070146853 - Singer; Wolfgang ; et al.	2007-06-28
Illumination system particularly for microlithography App 20070120072 - Mann; Hans-Juergen ; et al.	2007-05-31
Projection lens for a microlithographic projection exposure apparatus Grant 7,221,516 - Mann , et al. May 22, 2	2007-05-22
Masks, lithography device and semiconductor component App 20070082272 - Mann; Hans-Jurgen ; et al.	2007-04-12
Lighting system, particularly for use in extreme ultraviolet (EUV) lithography Grant 7,196,841 - Melzer , et al. March 27, 2	2007-03-27
Illumination system for microlithography App 20070058274 - Singer; Wolfgang ; et al.	2007-03-15
Oblique mirror-type normal-incidence collector system for light sources, particularly euv plasma discharge sources App 20070058244 - Singer; Wolfgang	2007-03-15
Illumination system particularly for microlithography Grant 7,186,983 - Mann , et al. March 6, 2	2007-03-06
Illumination system with field mirrors for producing uniform scanning energy App 20070030948 - Singer; Wolfgang ; et al.	2007-02-08
Illumination System For A Microlithographic Projection Exposure Apparatus App 20070024836 - Singer; Wolfgang ; et al.	2007-02-01
Lithographic apparatus and device manufacturing method App 20070002300 - Hansen; Steven George ; et al.	2007-01-04
Collector with fastening devices for fastening mirror shells App 20060291062 - Singer; Wolfgang ; et al.	2006-12-28
Projection objective having adjacently mounted aspheric lens surfaces Grant 7,154,678 - Schuster , et al. December 26, 2	2006-12-26
Illumination system having a more efficient collector optic Grant 7,145,637 - Singer December 5, 2	2006-12-05
Illumination system particularly for microlithography Grant 7,142,285 - Antoni , et al. November 28, 2	2006-11-28
Illumination system particularly for microlithography App 20060245540 - Schultz; Jorg ; et al.	2006-11-02
Illumination system with field mirrors for producing uniform scanning energy Grant 7,126,137 - Singer , et al. October 24, 2	2006-10-24
Illumination System Particularly For Microlithography App 20060233300 - Antoni; Martin ; et al.	2006-10-19
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system Grant 7,116,394 - Bakker , et al. October 3, 2	2006-10-03
Illumination system particularly for microlithography App 20060208206 - Hainz; Joachim ; et al.	2006-09-21
Illumination system particularly for microlithography Grant 7,109,497 - Antoni , et al. September 19, 2	2006-09-19
Collector with fastening devices for fastening mirror shells Grant 7,091,505 - Singer , et al. August 15, 2	2006-08-15
Facet mirror having a number of mirror facets Grant 7,090,362 - Holderer , et al. August 15, 2	2006-08-15
Bluetooth theft control Grant 7,075,433 - Singer July 11, 2	2006-07-11
Optical beam transformation system and illumination system comprising an optical beam transformation system App 20060146384 - Schultz; Joerg ; et al.	2006-07-06
Optical element for an illumination system App 20060132747 - Singer; Wolfgang ; et al.	2006-06-22
Optical system for ultraviolet light App 20060119750 - Epple; Alexander ; et al.	2006-06-08
Collector having unused region for illumination systems using a wavelength <193 nm App 20060097202 - Singer; Wolfgang ; et al.	2006-05-11
Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby App 20060082751 - Moors; Johannes Hubertus Josephina ; et al.	2006-04-20
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm Grant 7,015,489 - Singer , et al. March 21, 2	2006-03-21
Illumination system particularly for microlithography Grant 7,006,595 - Singer , et al. February 28, 2	2006-02-28
Illumination system having a more efficient collector optic App 20060033895 - Singer; Wolfgang	2006-02-16
Projection objective having a high aperture and a planar end surface App 20060012885 - Beder; Susanne ; et al.	2006-01-19
Optical system having an optical element that can be brought into at least two positions App 20060001854 - Singer; Wolfgang ; et al.	2006-01-05
Illumination system having a light mixer for the homogenization of radiation distributions App 20050280821 - Fiolka, Damian ; et al.	2005-12-22
Attenuator for attenuating wavelengths unequal to a used wavelength App 20050275818 - Singer, Wolfgang	2005-12-15
Illumination system for a wavelength of less than or equal to 193 nm, with sensors for determining an illumination App 20050274897 - Singer, Wolfgang ; et al.	2005-12-15
Method and apparatus for determining the non-volatile component of aerosol particles in a gas sample Grant 6,972,841 - Krempl , et al. December 6, 2	2005-12-06
Projection lens for a microlithographic projection exposure apparatus App 20050264787 - Mann, Hans-Jurgen ; et al.	2005-12-01
Collector for an illumination system with a wavelength of less than or equal to 193 nm Grant 6,964,485 - Singer , et al. November 15, 2	2005-11-15
Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus App 20050219495 - Singer, Wolfgang ; et al.	2005-10-06
Optical element for forming an arc-shaped illumination field App 20050207039 - Singer, Wolfgang ; et al.	2005-09-22
Illumination system particularly for microlithography Grant 6,947,124 - Antoni , et al. September 20, 2	2005-09-20
Illumination system particularly for microlithography Grant 6,947,120 - Antoni , et al. September 20, 2	2005-09-20
Lighting system, particularly for use in extreme ultraviolet (euv) lithography App 20050174650 - Melzer, Frank ; et al.	2005-08-11
Illumination system that suppresses debris from a light source Grant 6,927,403 - Singer , et al. August 9, 2	2005-08-09
Projection objective having adjacently mounted aspheric lens surfaces App 20050157400 - Schuster, Karl-Heinz ; et al.	2005-07-21
Projection objective having adjacently mounted aspheric lens surfaces Grant 6,903,802 - Schuster , et al. June 7, 2	2005-06-07
Method and apparatus for analysis of schlieren Grant 6,891,980 - Gerhard , et al. May 10, 2	2005-05-10
Illumination system having a nested collector for annular illumination of an exit pupil App 20050093041 - Singer, Wolfgang ; et al.	2005-05-05
Illumination system particularly for microlithography App 20050088760 - Mann, Hans-Juergen ; et al.	2005-04-28
Multi mirror system for an illumination system App 20050083503 - Antoni, Martin ; et al.	2005-04-21
Projection lens, in particular for microlithography Grant 6,867,923 - Singer , et al. March 15, 2	2005-03-15
Illumination system particularly for microlithography Grant 6,859,328 - Schultz , et al. February 22, 2	2005-02-22
Illumination system particularly for microlithography Grant 6,858,853 - Antoni , et al. February 22, 2	2005-02-22
Facet mirror having a number of mirror facets App 20050030656 - Holderer, Hubert ; et al.	2005-02-10
Facet mirror having a number of mirror facets App 20050030653 - Holderer, Hubert ; et al.	2005-02-10
Multi mirror system for an illumination system Grant 6,840,640 - Antoni , et al. January 11, 2	2005-01-11
EUV illumination system having a folding geometry App 20050002090 - Singer, Wolfgang ; et al.	2005-01-06
Illumination system with a plurality of individual gratings Grant 6,836,530 - Singer , et al. December 28, 2	2004-12-28
Illumination system with a plurality of light sources App 20040256575 - Singer, Wolfgang ; et al.	2004-12-23
Projection objective having adjacently mounted aspheric lens surfaces App 20040233409 - Schuster, Karl-Heinz ; et al.	2004-11-25
Collector with fastening devices for fastening mirror shells App 20040227103 - Singer, Wolfgang ; et al.	2004-11-18
Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system App 20040218157 - Bakker, Levinus Pieter ; et al.	2004-11-04
Projection exposure system Grant 6,806,942 - Schuster , et al. October 19, 2	2004-10-19
Focusing-device for the radiation from a light source App 20040130809 - Antoni, Martin ; et al.	2004-07-08
Illumination system with variable adjustment of the illumination App 20040119961 - Singer, Wolfgang ; et al.	2004-06-24
Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm App 20040065817 - Singer, Wolfgang ; et al.	2004-04-08
Illumination system particularly for microlithography App 20040037388 - Antoni, Martin ; et al.	2004-02-26
Illumination system particularly for microlithography App 20040037387 - Antoni, Martin ; et al.	2004-02-26
Bluetooth theft control App 20040032325 - Singer, Wolfgang	2004-02-19
Illumination system particularly for microlithography App 20040028175 - Antoni, Martin ; et al.	2004-02-12
Illumination system particularly for microlithography App 20040022353 - Antoni, Martin ; et al.	2004-02-05
Projection exposure system App 20040017554 - Schuster, Karl-Heinz ; et al.	2004-01-29
Illumination system particularly for microlithography App 20040017885 - Antoni, Martin ; et al.	2004-01-29
Focusing-device for the radiation from a light source Grant 6,655,808 - Antoni , et al. December 2, 2	2003-12-02
Illumination system with variable adjustment of the illumination Grant 6,658,084 - Singer December 2, 2	2003-12-02
Projection objective having adjacently mounted aspheric lens surfaces Grant 6,646,718 - Schuster , et al. November 11, 2	2003-11-11
Projection objective having adjacently mounted aspheric lens surfaces App 20030179356 - Schuster, Karl-Heinz ; et al.	2003-09-25
Illumination system with reduced heat load Grant 6,611,574 - Singer , et al. August 26, 2	2003-08-26
Method and apparatus for determining the non-volatile component of aerosol particles in a gas sample App 20030123059 - Krempl, Peter W. ; et al.	2003-07-03
Illumination system with a plurality of individual gratings App 20030099040 - Singer, Wolfgang ; et al.	2003-05-29
Illumination system particularly for microlithography App 20030095622 - Schultz, Jorg ; et al.	2003-05-22
Illumination system that suppresses debris from a ligh source App 20030095623 - Singer, Wolfgang ; et al.	2003-05-22
Illumination system particularly for microlithography App 20030086524 - Schultz, Jorg ; et al.	2003-05-08
Multi mirror system for an illumination system App 20030076607 - Antoni, Martin ; et al.	2003-04-24
Collector for an illumination system with a wavelength of less than or equal to 193 nm App 20030043455 - Singer, Wolfgang ; et al.	2003-03-06
Illumination system with a grating element App 20020186811 - Weiss, Markus ; et al.	2002-12-12
Method and apparatus for analysis of schlieren App 20020154814 - Gerhard, Michael ; et al.	2002-10-24
Illumination system with reduced heat load App 20020141071 - Singer, Wolfgang ; et al.	2002-10-03
Illumination system with variable adjustment of the illumination App 20020136351 - Singer, Wolfgang	2002-09-26
Illumination system with raster elements of different sizes App 20020131181 - Singer, Wolfgang ; et al.	2002-09-19
Focusing-device for the radiation from a light source App 20020113954 - Antoni, Martin ; et al.	2002-08-22
Illumination system particularly for microlithography Grant 6,438,199 - Schultz , et al. August 20, 2	2002-08-20
Projection lens, in particular for microlithography App 20020008861 - Singer, Wolfgang ; et al.	2002-01-24