Simons; Hubertus Johannes Gertrudus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Simons; Hubertus Johannes Gertrudus.The latest application filed is for "method and apparatus for inspection and metrology".

Company Profile

1.26.20

Simons; Hubertus Johannes Gertrudus - Venlo NL
Simons; Hubertus Johannes Gertrudus - DH Venlo NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inspection method and apparatus and lithographic processing cell Grant RE49,199 - Mos , et al. September 6, 2	2022-09-06
Method And Apparatus For Inspection And Metrology App 20220027437 - MOS; Everhardus Cornelis ; et al.	2022-01-27
Method and apparatus for inspection and metrology Grant 11,170,072 - Mos , et al. November 9, 2	2021-11-09
Device manufacturing method Grant 11,061,336 - Simons , et al. July 13, 2	2021-07-13
Device Manufacturing Method App 20200081353 - SIMONS; Hubertus Johannes Gertrudus ; et al.	2020-03-12
Inspection method and apparatus, and lithographic apparatus Grant 9,927,717 - Rhe , et al. March 27, 2	2018-03-27
Method And Apparatus For Inspection And Metrology App 20180067900 - MOS; Everhardus Cornelis ; et al.	2018-03-08
Inspection Method And Apparatus, And Lithographic Apparatus App 20160327870 - RHE; Kyu Kab ; et al.	2016-11-10
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods Grant 9,291,916 - Van Der Sanden , et al. March 22, 2	2016-03-22
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods App 20150153656 - VAN DER SANDEN; Stefan Cornelis Theodorus ; et al.	2015-06-04
Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus Grant 8,982,347 - Wei , et al. March 17, 2	2015-03-17
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods Grant 8,976,355 - Van Der Sanden , et al. March 10, 2	2015-03-10
Inspection method and apparatus and lithographic processing cell Grant 8,887,107 - Mos , et al. November 11, 2	2014-11-11
Alignment system, lithographic system and method Grant 8,706,442 - Mos , et al. April 22, 2	2014-04-22
Inspection Method and Apparatus and Lithographic Processing Cell App 20140089870 - MOS; Everhardus Cornelis ; et al.	2014-03-27
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods App 20130230797 - VAN DER SANDEN; Stefan Cornelis Theodorus ; et al.	2013-09-05
Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing method Grant 8,504,333 - Mos , et al. August 6, 2	2013-08-06
Alignment Mark Deformation Estimating Method, Substrate Position Predicting Method, Alignment System and Lithographic Apparatus App 20130141723 - WEI; Xiuhong ; et al.	2013-06-06
Method Of Calculating Model Parameters Of A Substrate, A Lithographic Apparatus And An Apparatus For Controlling Lithographic Processing By A Lithographic Apparatus App 20120218533 - LYULINA; Irina ; et al.	2012-08-30
Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patterns Grant 8,248,579 - Mos , et al. August 21, 2	2012-08-21
Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patterns Grant 8,237,914 - Mos , et al. August 7, 2	2012-08-07
Alignment systems and methods for lithographic systems Grant 8,139,217 - Van Bilsen , et al. March 20, 2	2012-03-20
Alignment System, Lithographic System and Method App 20110196646 - Mos; Everhardus ; et al.	2011-08-11
Alignment Systems And Methods For Lithographic Systems App 20110128520 - Van Bilsen; Franciscus Bernardus Maria ; et al.	2011-06-02
Alignment systems and methods for lithographic systems Grant 7,880,880 - Van Bilsen , et al. February 1, 2	2011-02-01
Method for Selecting Sample Positions on a Substrate, Method for Providing a Representation of a Model of Properties of a Substrate, Method of Providing a Representation of the Variation of Properties of a Substrate Across the Substrate and Device Manufacturing Method App 20110010000 - Mos; Everhardus Cornelis ; et al.	2011-01-13
Lithographic apparatus and device manufacturing method Grant 7,683,351 - Mos , et al. March 23, 2	2010-03-23
Lithographic apparatus and device manufacturing method Grant 7,573,574 - Hinnen , et al. August 11, 2	2009-08-11
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same Grant 7,468,795 - Simons , et al. December 23, 2	2008-12-23
Alignment systems and methods for lithographic systems Grant 7,439,531 - Van Bilsen , et al. October 21, 2	2008-10-21
Lithographic Apparatus, Device Manufacturing Method and Device App 20080165332 - Mos; Everhardus Cornelis ; et al.	2008-07-10
Lithographic apparatus and device manufacturing method App 20080128642 - Mos; Everhardus Cornelis ; et al.	2008-06-05
Alignment systems and methods for lithographic systems Grant 7,332,732 - Van Bilsen , et al. February 19, 2	2008-02-19
Alignment systems and methods for lithographic systems Grant 7,329,888 - Van Bilsen , et al. February 12, 2	2008-02-12
Alignment systems and methods for lithographic systems Grant 7,297,971 - Van Bilsen , et al. November 20, 2	2007-11-20
Alignment system and method and device manufactured thereby Grant 7,259,828 - Tolsma , et al. August 21, 2	2007-08-21
Alignment systems and methods for lithographic systems App 20060091330 - Van Bilsen; Franciscus Bernardus Maria ; et al.	2006-05-04
Alignment systems and methods for lithographic systems App 20060081792 - Van Bilsen; Franciscus Bernardus Maria ; et al.	2006-04-20
Alignment system and method and device manufactured thereby App 20050254030 - Tolsma, Hoite Pieter Theodoor ; et al.	2005-11-17
Alignment systems and methods for lithographic systems App 20050189502 - Van Bilsen, Franciscus Bernardus Maria ; et al.	2005-09-01
Alignment system and methods for lithographic systems using at least two wavelengths Grant 6,844,918 - Navarro Y Koren , et al. January 18, 2	2005-01-18
Alignment system and methods for lithographic systems using at least two wavelengths App 20040130690 - Koren, Ramon Navarro Y ; et al.	2004-07-08

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