Silvetti; Mario David

Patent Applications and Registrations

Patent applications and USPTO patent grants for Silvetti; Mario David.The latest application filed is for "inner retaining ring and outer retaining ring for carrier head".

Company Profile

0.12.19

Silvetti; Mario David - Morgan Hill CA
Silvetti; Mario David - Morgan Hil CA
Silvetti; Mario David - Morgar Hill CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Inner retaining ring and outer retaining ring for carrier head Grant 11,173,579 - Chen , et al. November 16, 2	2021-11-16
Inner Retaining Ring And Outer Retaining Ring For Carrier Head App 20180304441 - Chen; Hung Chih ; et al.	2018-10-25
Wafer processing system with chuck assembly maintenance module Grant 9,812,344 - Rye , et al. November 7, 2	2017-11-07
Stand Alone Anneal System For Semiconductor Wafers App 20160240405 - Francischetti; Vincent Steffan ; et al.	2016-08-18
Wafer Processing System With Chuck Assembly Maintenance Module App 20160225656 - Rye; Jason ; et al.	2016-08-04
Substrate Edge Tuning With Retaining Ring App 20120034848 - Chen; Hung Chih ; et al.	2012-02-09
Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same Grant 7,997,851 - Moore , et al. August 16, 2	2011-08-16
Method For Monitoring The Position Of A Semiconductor Processing Robot App 20100145513 - Yim; Pyongwon ; et al.	2010-06-10
Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same Grant 7,695,232 - Moore , et al. April 13, 2	2010-04-13
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support Grant 7,582,167 - Kaszuba , et al. September 1, 2	2009-09-01
Multi-level Load Lock Chamber, Transfer Chamber, And Robot Suitable For Interfacing With Same App 20090092466 - Moore; Robert B. ; et al.	2009-04-09
High Productivity Plasma Processing Chamber App 20090068356 - SILVETTI; MARIO David ; et al.	2009-03-12
Method of retaining a substrate during a substrate transferring process Grant 7,374,393 - Rice , et al. May 20, 2	2008-05-20
Substrate gripper for a substrate handling robot Grant 7,374,391 - Rice , et al. May 20, 2	2008-05-20
Apparatus For Reducing Entrapment Of Foreign Matter Along A Moveable Shaft Of A Substrate Support App 20080017115 - Kaszuba; Andrzej ; et al.	2008-01-24
Multi-level Load Lock Chamber, Transfer Chamber, And Robot Suitable For Interfacing With Same App 20070292244 - MOORE; ROBERT B. ; et al.	2007-12-20
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support Grant 7,279,049 - Kaszuba , et al. October 9, 2	2007-10-09
Method of retaining a substrate during a substrate transferring process App 20070147982 - Rice; Mike ; et al.	2007-06-28
Substrate gripper for a substrate handling robot App 20070147979 - Rice; Michael ; et al.	2007-06-28
Method For Monitoring The Position Of A Semiconductor Processing Robot App 20060224276 - Yim; Pyongwon ; et al.	2006-10-05
Method and apparatus for monitoring the position of a semiconductor processing robot Grant 7,107,125 - Yim , et al. September 12, 2	2006-09-12
Universal mid-frequency matching network Grant 7,094,313 - Juco , et al. August 22, 2	2006-08-22
Cartesian robot design App 20060182535 - Rice; Mike ; et al.	2006-08-17
Substrate heater assembly Grant 7,024,105 - Fodor , et al. April 4, 2	2006-04-04
Universal mid-frquency matching network App 20050235916 - Juco, Eller Y. ; et al.	2005-10-27
High productivity plasma processing chamber App 20050229849 - Silvetti, Mario David ; et al.	2005-10-20
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support App 20050172905 - Kaszuba, Andrzej ; et al.	2005-08-11
Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics Grant 6,911,403 - Li , et al. June 28, 2	2005-06-28
Method and apparatus for monitoring the position of a semiconductor processing robot App 20050096794 - Yim, Pyongwon ; et al.	2005-05-05
Substrate heater assembly App 20050078953 - Fodor, Mark A. ; et al.	2005-04-14
Methods of reducing plasma-induced damage for advanced plasma CVD dielectrics App 20050042885 - Li, Lihua ; et al.	2005-02-24

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