Patent | Date |
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Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same Grant 9,211,631 - Kim , et al. December 15, 2 | 2015-12-15 |
Wafer unloading system and wafer processing equipment including the same Grant 8,821,219 - Ahn , et al. September 2, 2 | 2014-09-02 |
Apparatus for growing high quality silicon single crystal ingot and growing method using the same Grant 8,753,445 - Cho June 17, 2 | 2014-06-17 |
Method and apparatus for manufacturing an ultra low defect semiconductor single crystalline ingot Grant 8,574,362 - Hong , et al. November 5, 2 | 2013-11-05 |
Light emitting diode display and method of manufacturing the same Grant 8,557,619 - Lee , et al. October 15, 2 | 2013-10-15 |
Double side polishing apparatus and carrier therefor Grant 8,414,360 - Lee , et al. April 9, 2 | 2013-04-09 |
Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same Grant 8,398,464 - Kim , et al. March 19, 2 | 2013-03-19 |
2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor Grant 8,349,075 - Song , et al. January 8, 2 | 2013-01-08 |
Silicon wafer with controlled distribution of embryos that become oxygen precipitates by succeeding annealing and its manufacturing method Grant 8,298,926 - Park , et al. October 30, 2 | 2012-10-30 |
Grinding Wheel Truing Tool And Manufacturing Method Thereof, And Truing Apparatus, Method For Manufacturing Grinding Wheel And Wafer Edge Grinding Apparatus Using The Same App 20120233930 - KIM; Yong-Dug ;   et al. | 2012-09-20 |
Apparatus for growing high quality silicon single crystal ingot and growing method using the same Grant 8,216,372 - Cho July 10, 2 | 2012-07-10 |
Compound semiconductor substrate grown on metal layer, method for manufacturing the same, and compound semiconductor device using the same Grant 8,198,649 - Kim , et al. June 12, 2 | 2012-06-12 |
2-dimensional Line-defects Controlled Silicon Ingot, Wafer And Epitaxial Wafer, And Manufacturing Process And Apparatus Therefor App 20120141808 - Song; Do-Won ;   et al. | 2012-06-07 |
2-dimensional Line-defects Controlled Silicon Ingot, Wafer And Epitaxial Wafer, And Manufacturing Process And Apparatus Therefor App 20120132131 - Song; Do-Won ;   et al. | 2012-05-31 |
Method for preparing compound semiconductor substrate Grant 8,158,496 - Lee , et al. April 17, 2 | 2012-04-17 |
Compound semiconductor substrate grown on metal layer, method of manufacturing the same, and compound semiconductor device using the same Grant 8,158,501 - Kim , et al. April 17, 2 | 2012-04-17 |
Method of manufacturing nitride semiconductor substrates having a base substrate with parallel trenches Grant 8,138,003 - Kim , et al. March 20, 2 | 2012-03-20 |
Method of manufacturing nitride semiconductor device Grant 8,124,497 - Kim , et al. February 28, 2 | 2012-02-28 |
2-dimensional line-defects controlled silicon ingot, wafer and epitaxial wafer, and manufacturing process and apparatus therefor Grant 8,114,215 - Song , et al. February 14, 2 | 2012-02-14 |
Semiconductor single crystal growth method having improvement in oxygen concentration characteristics Grant 8,114,216 - Cho , et al. February 14, 2 | 2012-02-14 |
Apparatus And Method For Wet Treatment Of An Object And Fluid Diffusion Plate And Barrel Used Therein App 20110309051 - Choi; Eun-Suck ;   et al. | 2011-12-22 |
Single-host Multi-workstation Computer System, Its Equipment Configuration Method And Workstation Card App 20110246697 - Zhang; Weiming | 2011-10-06 |
Box cleaner for cleaning wafer shipping box Grant 7,976,642 - Oh July 12, 2 | 2011-07-12 |
Nitride Semiconductor Substrate And Manufacturing Method Thereof App 20110143525 - Kim; Doo-Soo ;   et al. | 2011-06-16 |
Compound Semiconductor Substrate Grown On Metal Layer, Method Of Manufacturing The Same, And Compound Semiconductor Device Using The Same App 20110092055 - Kim; Yong-Jin ;   et al. | 2011-04-21 |
Nitride semiconductor substrate having a base substrate with parallel trenches Grant 7,915,698 - Kim , et al. March 29, 2 | 2011-03-29 |
Method of manufacturing strained silicon on-insulator substrate Grant 7,906,408 - Kim , et al. March 15, 2 | 2011-03-15 |
Method of identifying crystal defect region in monocrystalline silicon using metal contamination and heat treatment Grant 7,901,132 - Wee , et al. March 8, 2 | 2011-03-08 |
Double Side Polishing Apparatus And Carrier Therefor App 20110045748 - Lee; Chi-Bok ;   et al. | 2011-02-24 |
Method For Preparing Compound Semiconductor Substrate App 20100330784 - LEE; Ho-Jun ;   et al. | 2010-12-30 |
Method for preparing compound semiconductor substrate Grant 7,816,241 - Lee , et al. October 19, 2 | 2010-10-19 |
Silicon single crystal ingot and wafer, growing apparatus and method thereof Grant 7,799,130 - Hong , et al. September 21, 2 | 2010-09-21 |
Wafer support pin for preventing slip dislocation during annealing of water and wafer annealing method using the same Grant 7,767,596 - Kim , et al. August 3, 2 | 2010-08-03 |
Method And Apparatus For Growing High Quality Silicon Single Crystal, Silicon Single Crystal Ingot Grown Thereby And Wafer Produced From The Same Single Crystal Ingot App 20100158781 - Cho; Hyon-Jong | 2010-06-24 |
Silicon wafers and method of fabricating the same Grant 7,732,352 - Mun , et al. June 8, 2 | 2010-06-08 |
Method for manufacturing gallium nitride single crystalline substrate using self-split Grant 7,723,217 - Lee , et al. May 25, 2 | 2010-05-25 |
Method for preparing substrate for growing gallium nitride and method for preparing gallium nitride substrate Grant 7,708,832 - Kim , et al. May 4, 2 | 2010-05-04 |
Silicon Wafer With Controlled Distribution Of Embryos That Become Oxygen Precipitates By Succeeding Annealing And Its Manufacturing Method App 20100038755 - Park; Hyung Kook ;   et al. | 2010-02-18 |
Method of manufacturing gallium nitride semiconductor Grant 7,615,470 - Kim , et al. November 10, 2 | 2009-11-10 |
High Quality Single Crystal and Method of Growing the Same App 20090272948 - CHO; Hyon-Jong | 2009-11-05 |
Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby Grant 7,608,145 - Cho October 27, 2 | 2009-10-27 |
Apparatus For Manufacturing High-quality Semiconductor Single Crystal Ingot And Method Using The Same App 20090183670 - Cho; Hyon-Jong ;   et al. | 2009-07-23 |
Method and apparatus for growing high quality silicon single crystal, silicon single crystal ingot grown thereby and wafer produced from the same single crystal ingot Grant 7,559,988 - Cho July 14, 2 | 2009-07-14 |
2-dimensional Line-defects Controlled Silicon Ingot, Wafer And Epitaxial Wafer, And Manufacturing Process And Apparatus Therefor App 20090169460 - Song; Do-Won ;   et al. | 2009-07-02 |
Method For Manufacturing Gallium Nitride Single Crystalline Substrate Using Self-split App 20090155986 - Lee; Ho-Jun ;   et al. | 2009-06-18 |
Grinding Wheel Truing Tool And Manufacturing Method Thereof, And Truing Apparatus, Method For Manufacturing Grinding Wheel And Wafer Edge Grinding Apparatus Using The Same App 20090156104 - Kim; Yong-Dug ;   et al. | 2009-06-18 |
Silicon Wafer Grinding Apparatus, Retaining Assembly Used for the Same and Silicon Wafer Flatness Correcting Method App 20090149118 - Moon; Do Min | 2009-06-11 |
Method of Manufacturing Compound Semiconductor Devices App 20090148982 - Yi; Gyu-Chul ;   et al. | 2009-06-11 |
Silicon Wafer Grinding Apparatus, Retaining Assembly Used for the Same and Silicon Wafer Flatness Correcting Method App 20090142991 - Moon; Do Min | 2009-06-04 |
Semiconductor Single Crystal Growth Method Having Improvement In Oxygen Concentration Characteristics App 20090114147 - Cho; Hyon-Jong ;   et al. | 2009-05-07 |
Method For Cleaning Silicon Wafer App 20090095321 - Kim; In-Jung ;   et al. | 2009-04-16 |
Method And Apparatus For Manufacturing An Ultra Low Defect Semiconductor Single Crystalline Ingot App 20090090294 - Hong; Young-Ho ;   et al. | 2009-04-09 |
Box Cleaner For Cleaning Wafer Shipping Box App 20090084416 - Oh; Se-Youl | 2009-04-02 |
Manufacturing Method For Ssoi Substrate App 20090053875 - KIM; In Kyum ;   et al. | 2009-02-26 |
Apparatus and method for slicing an ingot Grant 7,431,028 - Ji , et al. October 7, 2 | 2008-10-07 |
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby Grant 7,427,325 - Cho September 23, 2 | 2008-09-23 |
Method for cleaning solar cell substrates App 20080202551 - Joo; Hyun-Seok | 2008-08-28 |
Method for manufacturing high flatness silicon wafer App 20080206992 - Nam; Byung-Wook | 2008-08-28 |
High quality single crystal and method of growing the same Grant 7,416,603 - Cho August 26, 2 | 2008-08-26 |
Wafer support pin for preventing slip dislocation during annealing of water and wafer annealing method using the same App 20080176415 - Kim; Kun ;   et al. | 2008-07-24 |
Method for cleaning silicon wafer App 20080156349 - Kim; In-Jung ;   et al. | 2008-07-03 |
Apparatus and method for mounting silicon ingot to mounter App 20080156430 - Jo; Yong-Joon | 2008-07-03 |
Wafer inspection machine and method App 20080156122 - Oh; Se Youl ;   et al. | 2008-07-03 |
Nitride semiconductor substrate and manufacturing method thereof App 20080142846 - Kim; Doo-Soo ;   et al. | 2008-06-19 |
Silicon wafer and method for producing silicon single crystal Grant 7,378,071 - Cho , et al. May 27, 2 | 2008-05-27 |
Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby Grant 7,371,283 - Cho May 13, 2 | 2008-05-13 |
Apparatus and method for slicing an ingot Grant 7,370,646 - Ji , et al. May 13, 2 | 2008-05-13 |
Method for manufacturing semiconductor single crystal by Czochralski technology, and single crystal ingot and wafer manufactured using the same App 20080107582 - Hong; Young-Ho ;   et al. | 2008-05-08 |
Apparatus and method for slicing an ingot Grant 7,353,818 - Ji , et al. April 8, 2 | 2008-04-08 |
Method and Apparatus of Growing Silicon Single Crystal and Silicon Wafer Fabricated Thereby App 20080053366 - Cho; Hyon-Jong | 2008-03-06 |
Method and Apparatus of Growing Silicon Single Crystal and Silicon Wafer Fabricated Thereby App 20080053365 - Cho; Hyon-Jong | 2008-03-06 |
Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same Grant 7,338,882 - Park , et al. March 4, 2 | 2008-03-04 |
Apparatus for Growing High Quality Silicon Single Crystal Ingot and Growing Method Using the Same App 20080047485 - Cho; Hyon-Jong | 2008-02-28 |
Apparatus and method for supplying solid raw material to single crystal grower App 20080031720 - Seo; Gyeong-Ho ;   et al. | 2008-02-07 |
Quality evaluation method for single crystal ingot Grant 7,326,292 - Kim , et al. February 5, 2 | 2008-02-05 |
Apparatus and method for slicing an ingot Grant 7,261,099 - Ji , et al. August 28, 2 | 2007-08-28 |
Method for manufacturing silicon wafer App 20070169688 - Yoon; Sung Ho ;   et al. | 2007-07-26 |
Silicon wafers and method of fabricating the same Grant 7,242,075 - Mun , et al. July 10, 2 | 2007-07-10 |
Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby App 20070151505 - Cho; Hyon-Jong | 2007-07-05 |
Silicon Wafer Grinding Apparatus, Retaining Assembly Used for the Same and Silicon Wafer Flatness Correcting Method App 20070141958 - Moon; Do Min | 2007-06-21 |
Silicon wafer and method for producing silicon single crystal Grant 7,229,495 - Cho , et al. June 12, 2 | 2007-06-12 |
A Silicon Single Crystal Ingot and Wafer, Growing Apparatus and Method Therof App 20070022943 - Hong; Young Ho ;   et al. | 2007-02-01 |
Single-crystal silicon ingot and wafer having homogeneous vacancy defects, and method and apparatus for making same Grant 7,125,608 - Hong , et al. October 24, 2 | 2006-10-24 |
Compound semiconductor devices and methods of manufacturing the same App 20060205197 - Yi; Gyu-Chul ;   et al. | 2006-09-14 |
Nitride semiconductor device and method of manufacturing the same Grant 7,102,173 - Yi , et al. September 5, 2 | 2006-09-05 |
Silicon wafer and method for manufacturing the same App 20050247259 - Yoon, Sung Ho ;   et al. | 2005-11-10 |
Nitride semiconductor device and method of manufacturing the same App 20050199886 - Yi, Gyu-Chul ;   et al. | 2005-09-15 |
Silicon single crystal growing furnace supplemented with low melting point dopant feeding instrument and the low melting point dopant feeding method thereof Grant 6,899,760 - Choi , et al. May 31, 2 | 2005-05-31 |
Method of fabricating nano SOI wafer and nano SOI wafer fabricated by the same Grant 6,884,694 - Park , et al. April 26, 2 | 2005-04-26 |
Single crystalline silicon wafer, ingot, and producing method thereof Grant 6,858,077 - Lee , et al. February 22, 2 | 2005-02-22 |
Method of fabricating annealed wafer Grant 6,818,569 - Mun , et al. November 16, 2 | 2004-11-16 |
Coating material for absorbing radiant heat, manufacturing method thereof Grant 6,743,472 - Park , et al. June 1, 2 | 2004-06-01 |
Single crystalline silicon wafer, ingot, and producing method thereof App 20030068501 - Lee, Hong-Woo ;   et al. | 2003-04-10 |